SG170697A1 - Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly - Google Patents
Edge-clamped and mechanically fastened inner electrode of showerhead electrode assemblyInfo
- Publication number
- SG170697A1 SG170697A1 SG201007631-3A SG2010076313A SG170697A1 SG 170697 A1 SG170697 A1 SG 170697A1 SG 2010076313 A SG2010076313 A SG 2010076313A SG 170697 A1 SG170697 A1 SG 170697A1
- Authority
- SG
- Singapore
- Prior art keywords
- inner electrode
- clamped
- edge
- mechanically fastened
- showerhead
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0818—Flat gaskets
- F16J15/0825—Flat gaskets laminated
- F16J15/0831—Flat gaskets laminated with mounting aids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0887—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing the sealing effect being obtained by elastic deformation of the packing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/12—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
- F16J15/121—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering with metal reinforcement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32559—Protection means, e.g. coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32605—Removable or replaceable electrodes or electrode systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
- F16J15/0818—Flat gaskets
- F16J2015/0856—Flat gaskets with a non-metallic coating or strip
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25117709P | 2009-10-13 | 2009-10-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG170697A1 true SG170697A1 (en) | 2011-05-30 |
Family
ID=43794874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG201007631-3A SG170697A1 (en) | 2009-10-13 | 2010-10-13 | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
Country Status (8)
Country | Link |
---|---|
US (2) | US9245716B2 (zh) |
JP (2) | JP3160877U (zh) |
KR (1) | KR200464037Y1 (zh) |
CN (1) | CN201781676U (zh) |
DE (1) | DE202010014257U1 (zh) |
FR (1) | FR2951317B1 (zh) |
SG (1) | SG170697A1 (zh) |
TW (1) | TWM396561U (zh) |
Families Citing this family (33)
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US8161906B2 (en) * | 2008-07-07 | 2012-04-24 | Lam Research Corporation | Clamped showerhead electrode assembly |
US8221582B2 (en) | 2008-07-07 | 2012-07-17 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8272346B2 (en) * | 2009-04-10 | 2012-09-25 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
KR200464037Y1 (ko) * | 2009-10-13 | 2012-12-07 | 램 리써치 코포레이션 | 샤워헤드 전극 어셈블리의 에지-클램핑되고 기계적으로 패스닝된 내부 전극 |
US8573152B2 (en) * | 2010-09-03 | 2013-11-05 | Lam Research Corporation | Showerhead electrode |
US8470127B2 (en) | 2011-01-06 | 2013-06-25 | Lam Research Corporation | Cam-locked showerhead electrode and assembly |
US9245717B2 (en) * | 2011-05-31 | 2016-01-26 | Lam Research Corporation | Gas distribution system for ceramic showerhead of plasma etch reactor |
TW201317372A (zh) * | 2011-10-31 | 2013-05-01 | Hon Hai Prec Ind Co Ltd | 鍍膜修正板及鍍膜裝置 |
CN102601873B (zh) * | 2012-03-28 | 2014-09-03 | 长春光华微电子设备工程中心有限公司 | 精密机械用绝缘垫板及其制作方法 |
US20130284092A1 (en) * | 2012-04-25 | 2013-10-31 | Applied Materials, Inc. | Faceplate having regions of differing emissivity |
US9058960B2 (en) | 2012-05-09 | 2015-06-16 | Lam Research Corporation | Compression member for use in showerhead electrode assembly |
US9267205B1 (en) * | 2012-05-30 | 2016-02-23 | Alta Devices, Inc. | Fastener system for supporting a liner plate in a gas showerhead reactor |
KR101482630B1 (ko) * | 2012-11-07 | 2015-01-14 | 삼성디스플레이 주식회사 | 기상 증착 장치 |
US9610591B2 (en) * | 2013-01-25 | 2017-04-04 | Applied Materials, Inc. | Showerhead having a detachable gas distribution plate |
US8883029B2 (en) * | 2013-02-13 | 2014-11-11 | Lam Research Corporation | Method of making a gas distribution member for a plasma processing chamber |
US9911579B2 (en) * | 2014-07-03 | 2018-03-06 | Applied Materials, Inc. | Showerhead having a detachable high resistivity gas distribution plate |
JP6298373B2 (ja) * | 2014-07-11 | 2018-03-20 | 東京エレクトロン株式会社 | プラズマ処理装置および上部電極アセンブリ |
JP6375163B2 (ja) * | 2014-07-11 | 2018-08-15 | 東京エレクトロン株式会社 | プラズマ処理装置および上部電極アセンブリ |
SG11201701461TA (en) * | 2014-09-08 | 2017-03-30 | Applied Materials Inc | Honeycomb multi-zone gas distribution plate |
US9847599B2 (en) * | 2014-10-17 | 2017-12-19 | Raytheon Company | Longitudinal, tolerance-mitigating cam-lock fastening system |
KR102398067B1 (ko) * | 2014-11-05 | 2022-05-13 | 삼성디스플레이 주식회사 | 정전 척 |
US20180230597A1 (en) * | 2017-02-14 | 2018-08-16 | Applied Materials, Inc. | Method and apparatus of remote plasmas flowable cvd chamber |
US20180323039A1 (en) * | 2017-05-05 | 2018-11-08 | Applied Materials, Inc. | Active far edge plasma tunability |
US20190048467A1 (en) * | 2017-08-10 | 2019-02-14 | Applied Materials, Inc. | Showerhead and process chamber incorporating same |
WO2020023854A1 (en) | 2018-07-27 | 2020-01-30 | Applied Materials, Inc. | Gas distribution plate for thermal deposition |
KR102198929B1 (ko) * | 2019-02-28 | 2021-01-06 | 세메스 주식회사 | 기판 처리 장치의 가스 공급 유닛 |
KR102168313B1 (ko) * | 2019-09-09 | 2020-10-21 | 김홍석 | 플라즈마챔버 전극 체결부재 |
US20210238746A1 (en) * | 2020-02-03 | 2021-08-05 | Applied Materials, Inc. | Showerhead assembly |
US20230279547A1 (en) * | 2020-06-06 | 2023-09-07 | Lam Research Corporation | Removable showerhead faceplate for semiconductor processing tools |
WO2022066240A1 (en) * | 2020-09-25 | 2022-03-31 | Lam Research Corporation | Axially cooled metal showerheads for high temperature processes |
US20220134362A1 (en) * | 2020-11-02 | 2022-05-05 | Changxin Memory Technologies, Inc. | Detaching and installing device for gas distribution plate of etching machine, and etching machine |
WO2023027199A1 (ko) * | 2021-08-23 | 2023-03-02 | 피에스케이 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
JP7203262B1 (ja) | 2022-03-31 | 2023-01-12 | Sppテクノロジーズ株式会社 | プラズマ処理装置 |
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-
2010
- 2010-01-21 KR KR2020100000703U patent/KR200464037Y1/ko active IP Right Grant
- 2010-01-21 JP JP2010000333U patent/JP3160877U/ja not_active Expired - Lifetime
- 2010-01-22 CN CN2010201141288U patent/CN201781676U/zh not_active Expired - Lifetime
- 2010-01-22 TW TW099201343U patent/TWM396561U/zh not_active IP Right Cessation
- 2010-05-11 JP JP2010003065U patent/JP3161173U/ja not_active Expired - Lifetime
- 2010-10-12 FR FR1058302A patent/FR2951317B1/fr active Active
- 2010-10-13 DE DE202010014257U patent/DE202010014257U1/de not_active Expired - Lifetime
- 2010-10-13 US US12/903,412 patent/US9245716B2/en active Active
- 2010-10-13 SG SG201007631-3A patent/SG170697A1/en unknown
-
2015
- 2015-12-09 US US14/964,103 patent/US10262834B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
FR2951317A1 (fr) | 2011-04-15 |
US9245716B2 (en) | 2016-01-26 |
US10262834B2 (en) | 2019-04-16 |
KR20110003902U (ko) | 2011-04-20 |
JP3161173U (ja) | 2010-07-22 |
JP3160877U (ja) | 2010-07-15 |
FR2951317B1 (fr) | 2023-11-24 |
US20110083809A1 (en) | 2011-04-14 |
CN201781676U (zh) | 2011-03-30 |
TWM396561U (en) | 2011-01-11 |
US20160086776A1 (en) | 2016-03-24 |
KR200464037Y1 (ko) | 2012-12-07 |
DE202010014257U1 (de) | 2011-03-17 |
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