SG160272A1 - Relaxation of a strained material layer with application of a stiffener - Google Patents
Relaxation of a strained material layer with application of a stiffenerInfo
- Publication number
- SG160272A1 SG160272A1 SG200905146-7A SG2009051467A SG160272A1 SG 160272 A1 SG160272 A1 SG 160272A1 SG 2009051467 A SG2009051467 A SG 2009051467A SG 160272 A1 SG160272 A1 SG 160272A1
- Authority
- SG
- Singapore
- Prior art keywords
- layer
- stiffener
- application
- reflow
- partially relaxed
- Prior art date
Links
- 239000000463 material Substances 0.000 title abstract 5
- 239000003351 stiffener Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000009477 glass transition Effects 0.000 abstract 1
- 230000005693 optoelectronics Effects 0.000 abstract 1
- 230000000750 progressive effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
- H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02488—Insulating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0805532A FR2936903B1 (fr) | 2008-10-07 | 2008-10-07 | Relaxation d'une couche de materiau contraint avec application d'un raidisseur |
Publications (1)
Publication Number | Publication Date |
---|---|
SG160272A1 true SG160272A1 (en) | 2010-04-29 |
Family
ID=40622166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200905146-7A SG160272A1 (en) | 2008-10-07 | 2009-07-31 | Relaxation of a strained material layer with application of a stiffener |
Country Status (8)
Country | Link |
---|---|
US (1) | US8067298B2 (zh) |
JP (1) | JP2010093233A (zh) |
KR (1) | KR20100039216A (zh) |
CN (1) | CN101714505B (zh) |
DE (1) | DE102009036412A1 (zh) |
FR (1) | FR2936903B1 (zh) |
SG (1) | SG160272A1 (zh) |
TW (1) | TW201021127A (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2329517A1 (en) * | 2008-09-24 | 2011-06-08 | S.O.I.Tec Silicon on Insulator Technologies | Methods of forming relaxed layers of semiconductor materials, semiconductor structures, devices and engineered substrates including same |
US8637383B2 (en) | 2010-12-23 | 2014-01-28 | Soitec | Strain relaxation using metal materials and related structures |
JP5907730B2 (ja) | 2008-10-30 | 2016-04-26 | エス・オー・アイ・テック・シリコン・オン・インシュレーター・テクノロジーズ | 低減した格子ひずみを備えた半導体材料、同様に包含する半導体構造体、デバイス、および、加工された基板を製造する方法 |
US8105852B2 (en) * | 2010-01-15 | 2012-01-31 | Koninklijke Philips Electronics N.V. | Method of forming a composite substrate and growing a III-V light emitting device over the composite substrate |
JP5696543B2 (ja) * | 2011-03-17 | 2015-04-08 | セイコーエプソン株式会社 | 半導体基板の製造方法 |
FR2973157B1 (fr) * | 2011-03-25 | 2014-03-14 | Soitec Silicon On Insulator | Procédé de réalisation d'ilots de matériau contraint au moins partiellement relaxe |
CN104094419A (zh) * | 2012-01-31 | 2014-10-08 | 索泰克公司 | 具有电荷载流子的改进分布的光敏器件及其形成方法 |
US8471243B1 (en) | 2012-01-31 | 2013-06-25 | Soitec | Photoactive devices with improved distribution of charge carriers, and methods of forming same |
FR2992466A1 (fr) | 2012-06-22 | 2013-12-27 | Soitec Silicon On Insulator | Procede de realisation de contact pour led et structure resultante |
FR3063571B1 (fr) * | 2017-03-01 | 2021-04-30 | Soitec Silicon On Insulator | Procede de fabrication d'un substrat donneur pour la formation de dispositifs optoelectroniques, collection de substrats issus de ce procede |
FR3064108B1 (fr) | 2017-03-17 | 2022-12-30 | Soitec Silicon On Insulator | Substrat de croissance pour la formation de dispositifs optoelectroniques, procede de fabrication d'un tel susbstrat, et utilisation du susbtrat notamment dans le domaine des micro-ecrans d'affichage |
FR3079070B1 (fr) | 2018-03-13 | 2020-02-28 | Soitec | Procede de fabrication d'une pluralite d'ilots semi-conducteurs cristallins presentant une variete de parametres de maille |
FR3079071B1 (fr) | 2018-03-13 | 2020-02-28 | Soitec | Procede de fabrication d'une pluralite d'ilots semi-conducteurs cristallins prensentant une variete de parametres de maille |
EP4033531B1 (fr) | 2017-03-17 | 2023-08-02 | Soitec | Procédé de fabrication d'une pluralité d'îlots semiconducteurs cristallins |
FR3075833B1 (fr) * | 2017-12-22 | 2022-05-20 | Commissariat Energie Atomique | Procede permettant d'obtention d'une couche de nitrure |
GB2586862B (en) * | 2019-09-06 | 2021-12-15 | Plessey Semiconductors Ltd | LED precursor incorporating strain relaxing structure |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3478005B2 (ja) * | 1996-06-10 | 2003-12-10 | ソニー株式会社 | 窒化物系化合物半導体のエッチング方法および半導体装置の製造方法 |
JPH10321533A (ja) * | 1997-05-22 | 1998-12-04 | Tokin Corp | ウェーハの製造方法、及び半導体装置 |
JP3274674B2 (ja) * | 2000-05-16 | 2002-04-15 | 士郎 酒井 | 窒化ガリウム系化合物半導体の製造方法 |
JP2001313259A (ja) * | 2000-04-28 | 2001-11-09 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体基板の製造方法及び半導体素子 |
JP2002261075A (ja) * | 2001-03-02 | 2002-09-13 | Gakushuin School Corp | 窒化ガリウム部材の気相エッチング方法 |
JP2003017790A (ja) * | 2001-07-03 | 2003-01-17 | Matsushita Electric Ind Co Ltd | 窒化物系半導体素子及び製造方法 |
JP2004104056A (ja) * | 2002-09-09 | 2004-04-02 | Hosiden Corp | 窒化ガリウム系半導体発光素子 |
FR2851847B1 (fr) * | 2003-02-28 | 2005-10-14 | Soitec Silicon On Insulator | Relaxation d'une couche mince apres transfert |
FR2851848B1 (fr) * | 2003-02-28 | 2005-07-08 | Soitec Silicon On Insulator | Relaxation a haute temperature d'une couche mince apres transfert |
US20040192067A1 (en) * | 2003-02-28 | 2004-09-30 | Bruno Ghyselen | Method for forming a relaxed or pseudo-relaxed useful layer on a substrate |
US7018909B2 (en) * | 2003-02-28 | 2006-03-28 | S.O.I.Tec Silicon On Insulator Technologies S.A. | Forming structures that include a relaxed or pseudo-relaxed layer on a substrate |
US7261777B2 (en) * | 2003-06-06 | 2007-08-28 | S.O.I.Tec Silicon On Insulator Technologies | Method for fabricating an epitaxial substrate |
EP1484794A1 (en) * | 2003-06-06 | 2004-12-08 | S.O.I. Tec Silicon on Insulator Technologies S.A. | A method for fabricating a carrier substrate |
JP4218597B2 (ja) * | 2003-08-08 | 2009-02-04 | 住友電気工業株式会社 | 半導体発光素子の製造方法 |
JP4055763B2 (ja) * | 2004-09-30 | 2008-03-05 | 豊田合成株式会社 | 窒化ガリウム系化合物半導体及び半導体基板 |
EP1681712A1 (en) * | 2005-01-13 | 2006-07-19 | S.O.I. Tec Silicon on Insulator Technologies S.A. | Method of producing substrates for optoelectronic applications |
JP5095244B2 (ja) * | 2006-03-20 | 2012-12-12 | 株式会社半導体エネルギー研究所 | マイクロマシン、およびその作製方法 |
JP5003033B2 (ja) * | 2006-06-30 | 2012-08-15 | 住友電気工業株式会社 | GaN薄膜貼り合わせ基板およびその製造方法、ならびにGaN系半導体デバイスおよびその製造方法 |
-
2008
- 2008-10-07 FR FR0805532A patent/FR2936903B1/fr active Active
-
2009
- 2009-07-31 SG SG200905146-7A patent/SG160272A1/en unknown
- 2009-08-04 JP JP2009181621A patent/JP2010093233A/ja not_active Ceased
- 2009-08-06 DE DE102009036412A patent/DE102009036412A1/de not_active Withdrawn
- 2009-08-20 KR KR1020090077169A patent/KR20100039216A/ko active IP Right Grant
- 2009-08-31 TW TW098129269A patent/TW201021127A/zh unknown
- 2009-09-07 CN CN200910172880.XA patent/CN101714505B/zh active Active
- 2009-10-06 US US12/574,142 patent/US8067298B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
FR2936903A1 (fr) | 2010-04-09 |
KR20100039216A (ko) | 2010-04-15 |
US20100087049A1 (en) | 2010-04-08 |
CN101714505B (zh) | 2014-05-28 |
FR2936903B1 (fr) | 2011-01-14 |
TW201021127A (en) | 2010-06-01 |
CN101714505A (zh) | 2010-05-26 |
US8067298B2 (en) | 2011-11-29 |
DE102009036412A1 (de) | 2010-04-15 |
JP2010093233A (ja) | 2010-04-22 |
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