SG149738A1 - System and method for flow monitoring and control - Google Patents

System and method for flow monitoring and control

Info

Publication number
SG149738A1
SG149738A1 SG200705756-5A SG2007057565A SG149738A1 SG 149738 A1 SG149738 A1 SG 149738A1 SG 2007057565 A SG2007057565 A SG 2007057565A SG 149738 A1 SG149738 A1 SG 149738A1
Authority
SG
Singapore
Prior art keywords
flow
pressure
valve
control
loss element
Prior art date
Application number
SG200705756-5A
Other languages
English (en)
Inventor
Craig L Brodeur
Marc Laverdiere
Robert F Mcloughlin
Karl J Niermeyer
Jieh-Hwa Shyu
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG149738A1 publication Critical patent/SG149738A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
SG200705756-5A 2004-02-12 2005-02-09 System and method for flow monitoring and control SG149738A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/777,300 US6973375B2 (en) 2004-02-12 2004-02-12 System and method for flow monitoring and control

Publications (1)

Publication Number Publication Date
SG149738A1 true SG149738A1 (en) 2009-02-27

Family

ID=34837957

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200705756-5A SG149738A1 (en) 2004-02-12 2005-02-09 System and method for flow monitoring and control
SG200705754-0A SG145614A1 (en) 2004-02-12 2005-02-09 System and method for flow monitoring and control

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG200705754-0A SG145614A1 (en) 2004-02-12 2005-02-09 System and method for flow monitoring and control

Country Status (8)

Country Link
US (2) US6973375B2 (ko)
EP (1) EP1716516A4 (ko)
JP (3) JP2007522587A (ko)
KR (2) KR101323503B1 (ko)
CN (1) CN1918575A (ko)
SG (2) SG149738A1 (ko)
TW (1) TWI361341B (ko)
WO (1) WO2005081169A1 (ko)

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Also Published As

Publication number Publication date
JP2007522587A (ja) 2007-08-09
US7610117B2 (en) 2009-10-27
JP2013058251A (ja) 2013-03-28
KR101362601B1 (ko) 2014-02-12
US20060052904A1 (en) 2006-03-09
KR101323503B1 (ko) 2013-10-31
CN1918575A (zh) 2007-02-21
KR20120081221A (ko) 2012-07-18
EP1716516A4 (en) 2008-05-21
US20050182524A1 (en) 2005-08-18
SG145614A1 (en) 2008-09-29
TWI361341B (en) 2012-04-01
EP1716516A1 (en) 2006-11-02
JP5186530B2 (ja) 2013-04-17
US6973375B2 (en) 2005-12-06
WO2005081169A1 (en) 2005-09-01
KR20060135740A (ko) 2006-12-29
JP2010176707A (ja) 2010-08-12
TW200600990A (en) 2006-01-01
JP5613748B2 (ja) 2014-10-29

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