DE602006006887D1 - Gasabfüllanlage - Google Patents

Gasabfüllanlage

Info

Publication number
DE602006006887D1
DE602006006887D1 DE602006006887T DE602006006887T DE602006006887D1 DE 602006006887 D1 DE602006006887 D1 DE 602006006887D1 DE 602006006887 T DE602006006887 T DE 602006006887T DE 602006006887 T DE602006006887 T DE 602006006887T DE 602006006887 D1 DE602006006887 D1 DE 602006006887D1
Authority
DE
Germany
Prior art keywords
gas
receiving vessel
directed
pressure
ramp rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006006887T
Other languages
English (en)
Inventor
Joseph Perry Cohen
David John Farese
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=37715460&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE602006006887(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Publication of DE602006006887D1 publication Critical patent/DE602006006887D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/002—Automated filling apparatus
    • F17C5/007—Automated filling apparatus for individual gas tanks or containers, e.g. in vehicles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • G05D16/204—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/012—Hydrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F17C2221/032—Hydrocarbons
    • F17C2221/033—Methane, e.g. natural gas, CNG, LNG, GNL, GNC, PLNG
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/036—Very high pressure (>80 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/036—Very high pressure, i.e. above 80 bars
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/032—Control means using computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0626—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/02—Improving properties related to fluid or fluid transfer
    • F17C2260/023—Avoiding overheating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/02—Improving properties related to fluid or fluid transfer
    • F17C2260/025—Reducing transfer time
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0134—Applications for fluid transport or storage placed above the ground
    • F17C2270/0139—Fuel stations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/01—Applications for fluid transport or storage
    • F17C2270/0165—Applications for fluid transport or storage on the road
    • F17C2270/0168—Applications for fluid transport or storage on the road by vehicles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Hydrogen, Water And Hydrids (AREA)
DE602006006887T 2005-10-10 2006-10-04 Gasabfüllanlage Active DE602006006887D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/247,561 US20070079892A1 (en) 2005-10-10 2005-10-10 Gas filling system

Publications (1)

Publication Number Publication Date
DE602006006887D1 true DE602006006887D1 (de) 2009-07-02

Family

ID=37715460

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006006887T Active DE602006006887D1 (de) 2005-10-10 2006-10-04 Gasabfüllanlage

Country Status (5)

Country Link
US (1) US20070079892A1 (de)
EP (1) EP1772663B1 (de)
AT (1) ATE431919T1 (de)
CA (1) CA2562003C (de)
DE (1) DE602006006887D1 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006013538B4 (de) * 2006-03-24 2015-03-05 B/E Aerospace Systems Gmbh Druckregelvorrichtung für ein Sauerstoffnotversorgungssystem in einem Flugzeug
US8020589B2 (en) * 2007-01-04 2011-09-20 Air Products And Chemicals, Inc. Hydrogen dispensing station and method of operating the same
DE102007012080A1 (de) * 2007-03-13 2008-09-18 Linde Ag Verfahren zum Befüllen eines Wasserstoff-Speicherbehälters
US8286670B2 (en) 2007-06-22 2012-10-16 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method for controlled filling of pressurized gas tanks
DE102007030106A1 (de) * 2007-06-28 2009-01-02 Intega Gmbh Verfahren und Vorrichtung zum Behandeln eines Halbleitersubstrats
FR2920858B1 (fr) * 2007-09-10 2009-11-27 Air Liquide Procede de remplissage de conteneur de gaz sous pression
US8365777B2 (en) * 2008-02-20 2013-02-05 Air Products And Chemicals, Inc. Compressor fill method and apparatus
US8874388B2 (en) * 2009-09-15 2014-10-28 On Site Gas Systems, Inc. Method and system for measuring a rate of flow of an output
US8783303B2 (en) 2010-04-21 2014-07-22 Ryan HARTY Method and system for tank refilling
US9347612B2 (en) 2010-04-21 2016-05-24 Honda Motor Co., Ltd. Method and system for tank refilling using active fueling speed control
US9212783B2 (en) 2010-04-21 2015-12-15 Honda Motor Co., Ltd. Method and system for tank refilling
US9605804B2 (en) 2010-04-21 2017-03-28 Honda Motor Co., Ltd. Method and system for tank refilling using active fueling speed control
US9347614B2 (en) 2010-04-21 2016-05-24 Honda Motor Co., Ltd. Method and system for tank refilling using active fueling speed control
CN102884359B (zh) * 2010-05-06 2014-07-30 丰田自动车株式会社 氢填充系统
US8973624B2 (en) 2011-01-27 2015-03-10 GM Global Technology Operations LLC Compressed hydrogen fueling control valve
US8418732B2 (en) 2011-07-06 2013-04-16 Air Products And Chemicals, Inc. Blending compressed gases
GB2493751A (en) * 2011-08-17 2013-02-20 Edwards Ltd Apparatus for cleaning a gas stream
JP5746962B2 (ja) * 2011-12-20 2015-07-08 株式会社神戸製鋼所 ガス供給方法およびガス供給装置
US9261238B2 (en) * 2012-07-06 2016-02-16 Air Products And Chemicals, Inc. Method for dispensing a gas
DE102012018109A1 (de) * 2012-09-04 2014-03-27 Linde Aktiengesellschaft Verfahren zur Durchführung eines Drucktests an einem Tank und Betankungseinrichtung
WO2014150320A1 (en) * 2013-03-15 2014-09-25 Honda Motor Co. Ltd. Improved method and system for tank refilling using active fueling speed control
US9586806B2 (en) * 2013-03-15 2017-03-07 Honda Motor Co., Ltd. Hydrogen fuel dispenser with pre-cooling circuit
US9279541B2 (en) 2013-04-22 2016-03-08 Air Products And Chemicals, Inc. Method and system for temperature-controlled gas dispensing
DE102013211765A1 (de) 2013-06-21 2014-12-24 Robert Bosch Gmbh Betankungsvorrichtung für ein fahrzeug, verfahren und fahrzeug
DE102013011052A1 (de) * 2013-07-02 2015-01-08 Linde Aktiengesellschaft Verfahren zum Ermitteln eines Wasserstofftankdrucks
US9823001B2 (en) * 2014-12-14 2017-11-21 Bosch Automotive Service Solutions Inc. Method and system for measuring volume of fluid drained from an air conditioning service unit
US10077998B2 (en) 2015-09-14 2018-09-18 Honda Motor Co., Ltd. Hydrogen fueling with integrity checks
CN108958305A (zh) * 2017-05-23 2018-12-07 北京航天计量测试技术研究所 一种8421编码可控流量高压气体压力精确控制结构
CN108318255A (zh) * 2017-12-21 2018-07-24 北方重工集团有限公司 一种压裂装备超高压试验场用双回路并联节流加载装置
DE102018100224A1 (de) * 2018-01-08 2019-07-11 Multivac Sepp Haggenmüller Se & Co. Kg Verpackungsmaschine mit Druckregelvorrichtung und Verfahren
JP7203858B2 (ja) * 2018-03-02 2023-01-13 エア・リキード・アドバンスド・テクノロジーズ・ユー．エス．・エルエルシー 燃料電池自動車のための移動式水素ディスペンサ
JP7096062B2 (ja) * 2018-04-27 2022-07-05 トキコシステムソリューションズ株式会社 ガス充填装置
DE102018114263A1 (de) * 2018-06-14 2019-12-19 Multivac Sepp Haggenmüller Se & Co. Kg Füllstandsunabhängiges begasen
JP6600430B1 (ja) * 2019-02-01 2019-10-30 岩谷産業株式会社 水素ガスディスペンサーの検査装置
US11492163B2 (en) * 2019-07-12 2022-11-08 Signode Industrial Group Llc Random case sealer
US11952159B2 (en) 2020-03-25 2024-04-09 Signode Industrial Group Llc Random case sealer
US11293595B2 (en) * 2020-04-01 2022-04-05 Mirae EHS-code Research Institute Hydrogen fueling system and method based on real-time communication information from CHSS for fuel cell
CA3185964A1 (en) 2020-07-13 2022-01-20 Darryl E. POLLICA Hydrogen fueling systems and methods
EP4116621A1 (de) * 2021-07-07 2023-01-11 TotalEnergies OneTech Durchflusssteuermagnetventilblock, zugehörige verdichtungseinheit, ausgabesystem und verfahren

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2725410C2 (de) * 1977-06-04 1983-09-01 Bodenseewerk Perkin-Elmer & Co GmbH, 7770 Überlingen Vorrichtung zur Steuerung einer Druckmittelströmung
US4275752A (en) * 1978-09-22 1981-06-30 Collier Nigel A Fluid flow apparatus and method
GB2129170B (en) * 1982-10-21 1986-09-24 Secr Defence Improvements in or relating to pressure controllers
CA1191233A (en) * 1982-12-10 1985-07-30 Donald P. Petro Flow regulating system
HU195346B (en) 1985-04-30 1988-04-28 Teta Tervezoe Es Tanacsado Mer Device for controlling use of gas
HUT54227A (en) * 1989-05-26 1991-01-28 Magyar Szenhidrogenipari Apparatus for controlling gas utilization
US5406988A (en) * 1993-12-01 1995-04-18 Pacific Cryogenics, Inc. Method and apparatus for dispensing compressed gas into a vehicle
US5826632A (en) * 1997-05-30 1998-10-27 The Boc Group, Inc. Dynamic gas cylinder filling process
US6210482B1 (en) * 1999-04-22 2001-04-03 Fujikin Incorporated Apparatus for feeding gases for use in semiconductor manufacturing
JP4490557B2 (ja) * 2000-06-09 2010-06-30 本田技研工業株式会社 水素急速充填方法
JP3604354B2 (ja) * 2001-06-13 2004-12-22 Ｓｍｃ株式会社 質量流量測定方法および質量流量制御装置
US6786245B1 (en) * 2003-02-21 2004-09-07 Air Products And Chemicals, Inc. Self-contained mobile fueling station
DE102004003213A1 (de) * 2004-01-22 2005-08-11 Gilbarco Gmbh & Co. Kg Gasbetankungsverfahren und Gasbetankungsvorrichtung mit Leckerkennungsfunktion

Also Published As

Publication number Publication date
CA2562003A1 (en) 2007-04-10
EP1772663A1 (de) 2007-04-11
ATE431919T1 (de) 2009-06-15
CA2562003C (en) 2009-12-22
US20070079892A1 (en) 2007-04-12
EP1772663B1 (de) 2009-05-20

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