TW200613700A - Method and system for flow measurement and validation of a mass flow controller - Google Patents

Method and system for flow measurement and validation of a mass flow controller

Info

Publication number
TW200613700A
TW200613700A TW094123260A TW94123260A TW200613700A TW 200613700 A TW200613700 A TW 200613700A TW 094123260 A TW094123260 A TW 094123260A TW 94123260 A TW94123260 A TW 94123260A TW 200613700 A TW200613700 A TW 200613700A
Authority
TW
Taiwan
Prior art keywords
flow
validation
mass flow
flow controller
mass
Prior art date
Application number
TW094123260A
Other languages
Chinese (zh)
Other versions
TWI278606B (en
Inventor
Stuart A Tison
Sandeep Sukumaran
James Barker
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/887,591 external-priority patent/US7412986B2/en
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Publication of TW200613700A publication Critical patent/TW200613700A/en
Application granted granted Critical
Publication of TWI278606B publication Critical patent/TWI278606B/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs

Abstract

Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.
TW094123260A 2004-07-09 2005-07-08 Method and system for flow measurement and validation of a mass flow controller TWI278606B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/887,591 US7412986B2 (en) 2004-07-09 2004-07-09 Method and system for flow measurement and validation of a mass flow controller
US10/946,031 US7424895B2 (en) 2004-07-09 2004-09-21 Method and system for flow measurement and validation of a mass flow controller

Publications (2)

Publication Number Publication Date
TW200613700A true TW200613700A (en) 2006-05-01
TWI278606B TWI278606B (en) 2007-04-11

Family

ID=35839722

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094123260A TWI278606B (en) 2004-07-09 2005-07-08 Method and system for flow measurement and validation of a mass flow controller

Country Status (4)

Country Link
EP (1) EP1797489A4 (en)
JP (1) JP2008506116A (en)
TW (1) TWI278606B (en)
WO (1) WO2006017116A2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI416619B (en) * 2006-11-17 2013-11-21 Lam Res Corp Methods for performing actual flow verification
TWI463287B (en) * 2007-12-27 2014-12-01 Horiba Stec Co Flow rate ratio control device
TWI561948B (en) * 2012-09-25 2016-12-11 Mks Instr Inc Method and apparatus for self verification of pressured based mass flow controllers

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7757554B2 (en) 2005-03-25 2010-07-20 Mks Instruments, Inc. High accuracy mass flow verifier with multiple inlets
US7474968B2 (en) * 2005-03-25 2009-01-06 Mks Instruments, Inc. Critical flow based mass flow verifier
US7891228B2 (en) * 2008-11-18 2011-02-22 Mks Instruments, Inc. Dual-mode mass flow verification and mass flow delivery system and method
JP5442413B2 (en) * 2009-12-03 2014-03-12 ルネサスエレクトロニクス株式会社 Semiconductor manufacturing apparatus and flow rate control apparatus
GB201108854D0 (en) * 2011-05-26 2011-07-06 Spp Process Technology Systems Uk Ltd Mass flow controller monitoring

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3363461A (en) * 1965-05-26 1968-01-16 Peerless Paint & Varnish Corp Method for measuring flow
US4146051A (en) * 1976-01-10 1979-03-27 Lucas Industries Limited Fluid flow control system
EP0547617B1 (en) * 1991-12-18 1996-07-10 Pierre Delajoud Mass flow meter and method
US5684245A (en) * 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
WO2002033361A2 (en) * 2000-10-13 2002-04-25 Mks Instruments, Inc. Apparatus and method for maintaining a constant pressure drop across a gas metering unit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI416619B (en) * 2006-11-17 2013-11-21 Lam Res Corp Methods for performing actual flow verification
TWI463287B (en) * 2007-12-27 2014-12-01 Horiba Stec Co Flow rate ratio control device
TWI561948B (en) * 2012-09-25 2016-12-11 Mks Instr Inc Method and apparatus for self verification of pressured based mass flow controllers
US10031005B2 (en) 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers

Also Published As

Publication number Publication date
WO2006017116A2 (en) 2006-02-16
TWI278606B (en) 2007-04-11
EP1797489A4 (en) 2008-07-30
EP1797489A2 (en) 2007-06-20
WO2006017116A3 (en) 2007-03-01
JP2008506116A (en) 2008-02-28

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees