WO2008146877A1 - 防振装置、防振装置の制御方法、及び露光装置 - Google Patents

防振装置、防振装置の制御方法、及び露光装置 Download PDF

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Publication number
WO2008146877A1
WO2008146877A1 PCT/JP2008/059902 JP2008059902W WO2008146877A1 WO 2008146877 A1 WO2008146877 A1 WO 2008146877A1 JP 2008059902 W JP2008059902 W JP 2008059902W WO 2008146877 A1 WO2008146877 A1 WO 2008146877A1
Authority
WO
WIPO (PCT)
Prior art keywords
vibration control
control equipment
air
damper
vibration
Prior art date
Application number
PCT/JP2008/059902
Other languages
English (en)
French (fr)
Inventor
Masato Takahashi
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of WO2008146877A1 publication Critical patent/WO2008146877A1/ja

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Toxicology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • General Physics & Mathematics (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

　気体ダンパを用いて、高い応答速度で高精度に防振を行うことができる能動型の防振装置である。圧縮空気源から供給される空気によって、設置面上に構造物を支持するエアダンパ（４３）を有する防振装置であって、圧縮空気源から供給される空気の流量を制御してエアダンパ（４３）に供給するサーボバルブ（４７）と、エアダンパ（４３）から構造物に付与される位置を計測する位置センサ（４９）と、位置センサ（４９）の計測値に基づいてサーボバルブ（４７）における空気の流量を制御する防振台制御系（４８）とを備える。
PCT/JP2008/059902 2007-05-31 2008-05-29 防振装置、防振装置の制御方法、及び露光装置 WO2008146877A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-144864 2007-05-31
JP2007144864 2007-05-31

Publications (1)

Publication Number Publication Date
WO2008146877A1 true WO2008146877A1 (ja) 2008-12-04

Family

ID=40075110

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059902 WO2008146877A1 (ja) 2007-05-31 2008-05-29 防振装置、防振装置の制御方法、及び露光装置

Country Status (3)

Country Link
US (1) US20080309910A1 (ja)
TW (1) TW200907196A (ja)
WO (1) WO2008146877A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010016369A (ja) * 2008-06-18 2010-01-21 Asml Netherlands Bv メトロロジーフレーム用のフィードフォワード圧力パルス補償を有するリソグラフィ装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5641878B2 (ja) * 2010-10-29 2014-12-17 キヤノン株式会社 振動制御装置、リソグラフィー装置、および、物品の製造方法
US8485579B2 (en) * 2011-03-17 2013-07-16 Western Digital (Fremont), Llc Vacuum pickup assemblies for picking up articles and minimizing contamination thereof
US9022444B1 (en) 2013-05-20 2015-05-05 Western Digital Technologies, Inc. Vacuum nozzle having back-pressure release hole
JP6367382B2 (ja) * 2014-06-19 2018-08-01 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置、対象物位置決めシステムおよびデバイス製造方法
FR3052209B1 (fr) * 2016-06-02 2018-06-01 Airbus Helicopters Resonateur, et aeronef muni de ce resonateur
CN107781350B (zh) * 2016-08-31 2019-05-31 上海微电子装备（集团）股份有限公司 减振器气动控制装置及其控制方法以及减振器
JP6556196B2 (ja) * 2017-07-27 2019-08-07 倉敷化工株式会社 アクティブ除振装置
CN112041749A (zh) * 2018-04-25 2020-12-04 Asml荷兰有限公司 气动支撑装置和具备气动支撑装置的光刻设备
US11346966B2 (en) * 2020-06-23 2022-05-31 Dennis Keith Reust System and method to transfer inertial mass
US11276470B2 (en) * 2020-07-17 2022-03-15 Micron Technology, Inc. Bitline driver isolation from page buffer circuitry in memory device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0886329A (ja) * 1994-09-19 1996-04-02 Meiritsu Seiki Kk 制振装置
JP2005172135A (ja) * 2003-12-11 2005-06-30 Canon Inc 除振マウント装置
JP2006070928A (ja) * 2004-08-31 2006-03-16 Nikon Corp 防振装置の制御方法及び露光方法
JP2006250291A (ja) * 2005-03-11 2006-09-21 Tokyo Univ Of Agriculture & Technology 防振装置
JP2007107604A (ja) * 2005-10-13 2007-04-26 Rikogaku Shinkokai 除振装置および除振方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5794509A (en) * 1995-06-06 1998-08-18 Raytheon Company Proportional pneumatic fin actuator system without feedback control
US6523695B1 (en) * 2000-09-15 2003-02-25 Nikon Corporation Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0886329A (ja) * 1994-09-19 1996-04-02 Meiritsu Seiki Kk 制振装置
JP2005172135A (ja) * 2003-12-11 2005-06-30 Canon Inc 除振マウント装置
JP2006070928A (ja) * 2004-08-31 2006-03-16 Nikon Corp 防振装置の制御方法及び露光方法
JP2006250291A (ja) * 2005-03-11 2006-09-21 Tokyo Univ Of Agriculture & Technology 防振装置
JP2007107604A (ja) * 2005-10-13 2007-04-26 Rikogaku Shinkokai 除振装置および除振方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010016369A (ja) * 2008-06-18 2010-01-21 Asml Netherlands Bv メトロロジーフレーム用のフィードフォワード圧力パルス補償を有するリソグラフィ装置

Also Published As

Publication number Publication date
TW200907196A (en) 2009-02-16
US20080309910A1 (en) 2008-12-18

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