SG128646A1 - Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processing tape winding body - Google Patents

Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processing tape winding body

Info

Publication number
SG128646A1
SG128646A1 SG200604375A SG200604375A SG128646A1 SG 128646 A1 SG128646 A1 SG 128646A1 SG 200604375 A SG200604375 A SG 200604375A SG 200604375 A SG200604375 A SG 200604375A SG 128646 A1 SG128646 A1 SG 128646A1
Authority
SG
Singapore
Prior art keywords
semiconductor wafer
wafer processing
processing tape
winding body
tape
Prior art date
Application number
SG200604375A
Other languages
English (en)
Inventor
Takeshi Segawa
Koichi Yamaguchi
Yuichi Iwakata
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of SG128646A1 publication Critical patent/SG128646A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Wire Bonding (AREA)
SG200604375A 2005-06-29 2006-06-27 Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processing tape winding body SG128646A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005190388A JP4541237B2 (ja) 2005-06-29 2005-06-29 半導体ウエハ処理テープ巻装体およびそれを用いた半導体ウエハ処理テープ貼着装置ならびに半導体ウエハ加工処理装置

Publications (1)

Publication Number Publication Date
SG128646A1 true SG128646A1 (en) 2007-01-30

Family

ID=36888336

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200604375A SG128646A1 (en) 2005-06-29 2006-06-27 Semiconductor wafer processing tape winding body, semiconductor wafer processing tape sticking apparatus and semiconductor wafer processing apparatus that use the semiconductor wafer processing tape winding body

Country Status (9)

Country Link
US (1) US8392011B2 (ja)
JP (1) JP4541237B2 (ja)
KR (1) KR101269290B1 (ja)
CN (1) CN1892982B (ja)
DE (1) DE102006029961B4 (ja)
GB (1) GB2428136B (ja)
MY (1) MY143974A (ja)
SG (1) SG128646A1 (ja)
TW (1) TWI408738B (ja)

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JP5690615B2 (ja) * 2011-03-03 2015-03-25 リンテック株式会社 リングフレーム、及び工程管理システム
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JP6105312B2 (ja) 2013-02-13 2017-03-29 リンテック株式会社 支持装置及びデータ管理方法
JP6740444B2 (ja) * 2017-02-20 2020-08-12 株式会社Ｆｕｊｉ スプライシングテープ管理システム
JP2020198408A (ja) * 2019-06-05 2020-12-10 株式会社ディスコ テープユニット及びテープ貼り機
JP7351703B2 (ja) * 2019-10-09 2023-09-27 株式会社ディスコ テープマウンタ
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Also Published As

Publication number Publication date
JP4541237B2 (ja) 2010-09-08
CN1892982B (zh) 2012-06-27
US8392011B2 (en) 2013-03-05
CN1892982A (zh) 2007-01-10
GB0612953D0 (en) 2006-08-09
KR101269290B1 (ko) 2013-05-29
JP2007012807A (ja) 2007-01-18
KR20070001808A (ko) 2007-01-04
MY143974A (en) 2011-07-29
GB2428136B (en) 2009-09-23
DE102006029961B4 (de) 2022-02-17
TWI408738B (zh) 2013-09-11
TW200707566A (en) 2007-02-16
GB2428136A (en) 2007-01-17
DE102006029961A1 (de) 2007-07-05
US20070162175A1 (en) 2007-07-12

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