SG120897A1 - Lithographic projection apparatus, device manufacturing method and device manufactured thereby - Google Patents

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Info

Publication number
SG120897A1
SG120897A1 SG200206978A SG200206978A SG120897A1 SG 120897 A1 SG120897 A1 SG 120897A1 SG 200206978 A SG200206978 A SG 200206978A SG 200206978 A SG200206978 A SG 200206978A SG 120897 A1 SG120897 A1 SG 120897A1
Authority
SG
Singapore
Prior art keywords
space
projection apparatus
lithographic projection
molecular oxygen
technique
Prior art date
Application number
SG200206978A
Other languages
English (en)
Inventor
Van Willem Schaik
Bastiaan Matthias Mertens
Hans Meiling
Norbertus Benedictus Koster
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of SG120897A1 publication Critical patent/SG120897A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70933—Purge, e.g. exchanging fluid or gas to remove pollutants

Landscapes

  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Lenses (AREA)
SG200206978A 2001-11-19 2002-11-15 Lithographic projection apparatus, device manufacturing method and device manufactured thereby SG120897A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/988,391 US6828569B2 (en) 2001-11-19 2001-11-19 Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Publications (1)

Publication Number Publication Date
SG120897A1 true SG120897A1 (en) 2006-04-26

Family

ID=25534075

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200206978A SG120897A1 (en) 2001-11-19 2002-11-15 Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Country Status (8)

Country Link
US (2) US6828569B2 (fr)
EP (1) EP1312984B1 (fr)
JP (1) JP4194831B2 (fr)
KR (1) KR100767829B1 (fr)
CN (1) CN1322545C (fr)
DE (1) DE60218802T2 (fr)
SG (1) SG120897A1 (fr)
TW (1) TWI266960B (fr)

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ITTO20020787A1 (it) * 2002-09-10 2004-03-11 St Microelectronics Srl Macchina di impiantazione ionica perfezionata, relativo
US7189291B2 (en) * 2003-06-02 2007-03-13 Entegris, Inc. Method for the removal of airborne molecular contaminants using oxygen gas mixtures
US7384149B2 (en) 2003-07-21 2008-06-10 Asml Netherlands B.V. Lithographic projection apparatus, gas purging method and device manufacturing method and purge gas supply system
US20060285091A1 (en) * 2003-07-21 2006-12-21 Parekh Bipin S Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
US7476491B2 (en) 2004-09-15 2009-01-13 Asml Netherlands B.V. Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby
US20060119811A1 (en) * 2004-12-07 2006-06-08 Asml Netherlands B.V. Radiation exposure apparatus comprising a gas flushing system
CN101095084A (zh) * 2004-12-14 2007-12-26 拉多韦有限公司 形成用于光刻转印的准直uv光线的方法和设备
DE102005031792A1 (de) * 2005-07-07 2007-01-11 Carl Zeiss Smt Ag Verfahren zur Entfernung von Kontamination von optischen Elementen, insbesondere von Oberflächen optischer Elemente sowie ein optisches System oder Teilsystem hierfür
CN101263590B (zh) * 2005-08-03 2010-05-19 恩特格林斯公司 传送容器
US7986395B2 (en) * 2005-10-24 2011-07-26 Taiwan Semiconductor Manufacturing Company, Ltd. Immersion lithography apparatus and methods
KR100739424B1 (ko) * 2005-10-28 2007-07-13 삼성전기주식회사 비활성 기체 주입을 이용한 노광 장치 및 인쇄회로 기판의 제조 방법
US7405417B2 (en) * 2005-12-20 2008-07-29 Asml Netherlands B.V. Lithographic apparatus having a monitoring device for detecting contamination
US8507879B2 (en) * 2006-06-08 2013-08-13 Xei Scientific, Inc. Oxidative cleaning method and apparatus for electron microscopes using UV excitation in an oxygen radical source
US20070284541A1 (en) * 2006-06-08 2007-12-13 Vane Ronald A Oxidative cleaning method and apparatus for electron microscopes using UV excitation in a oxygen radical source
US8564759B2 (en) * 2006-06-29 2013-10-22 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for immersion lithography
JP4802937B2 (ja) * 2006-08-24 2011-10-26 大日本印刷株式会社 フォトマスクの洗浄方法
KR100817066B1 (ko) * 2006-10-11 2008-03-27 삼성전자주식회사 기판 노광 및 광학요소 세정을 인시츄로 수행할 수 있는극자외선 노광장치 및 그에 구비된 광학요소의 세정방법
JP2008277585A (ja) * 2007-04-27 2008-11-13 Canon Inc 露光装置の洗浄装置及び露光装置
NL1036769A1 (nl) * 2008-04-23 2009-10-26 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, cleaning system and method for cleaning a patterning device.
US8394203B2 (en) * 2008-10-02 2013-03-12 Molecular Imprints, Inc. In-situ cleaning of an imprint lithography tool
DE102009045008A1 (de) * 2008-10-15 2010-04-29 Carl Zeiss Smt Ag EUV-Lithographievorrichtung und Verfahren zum Bearbeiten einer Maske
US8633459B2 (en) * 2011-03-02 2014-01-21 Cymer, Llc Systems and methods for optics cleaning in an EUV light source
JP2013080810A (ja) * 2011-10-04 2013-05-02 Lasertec Corp Ｅｕｖマスク検査装置及びｅｕｖマスク検査方法
JP6034598B2 (ja) * 2012-05-31 2016-11-30 ギガフォトン株式会社 Ｅｕｖ光生成装置の洗浄方法
KR102427325B1 (ko) 2015-06-03 2022-08-01 삼성전자주식회사 노광 장치 및 노광 장치 세정 방법
DE102016216266A1 (de) 2016-08-30 2017-08-31 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zur Reinigung eines Objekts
DE102017114216A1 (de) * 2017-06-27 2018-04-19 Asml Netherlands B.V. Anordnung zur Kontaminationsreduzierung in einem optischen System, insbesondere in einer mikrolithographischen Projektionsbelichtungsanlage
CN112204472B (zh) * 2018-05-28 2024-10-11 Asml荷兰有限公司 光刻设备
KR20220025748A (ko) * 2019-07-01 2022-03-03 에이에스엠엘 네델란즈 비.브이. 패터닝 디바이스와 기타 기판의 표면 처리를 위한 표면 처리 장치 및 방법
CN113031391B (zh) * 2021-03-05 2023-06-30 中国科学院光电技术研究所 一种简易紫外纳米压印光刻装置

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Also Published As

Publication number Publication date
TW200407680A (en) 2004-05-16
DE60218802T2 (de) 2007-12-06
EP1312984B1 (fr) 2007-03-14
US6828569B2 (en) 2004-12-07
JP2003234287A (ja) 2003-08-22
EP1312984A2 (fr) 2003-05-21
US20050112508A1 (en) 2005-05-26
EP1312984A3 (fr) 2005-05-25
CN1474234A (zh) 2004-02-11
JP4194831B2 (ja) 2008-12-10
KR100767829B1 (ko) 2007-10-17
KR20030075136A (ko) 2003-09-22
US20030096193A1 (en) 2003-05-22
DE60218802D1 (de) 2007-04-26
CN1322545C (zh) 2007-06-20
US7115886B2 (en) 2006-10-03
TWI266960B (en) 2006-11-21

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