SG11202113133RA - Photomask blank, method for producing photomask, and photomask - Google Patents
Photomask blank, method for producing photomask, and photomaskInfo
- Publication number
- SG11202113133RA SG11202113133RA SG11202113133RA SG11202113133RA SG11202113133RA SG 11202113133R A SG11202113133R A SG 11202113133RA SG 11202113133R A SG11202113133R A SG 11202113133RA SG 11202113133R A SG11202113133R A SG 11202113133RA SG 11202113133R A SG11202113133R A SG 11202113133RA
- Authority
- SG
- Singapore
- Prior art keywords
- photomask
- producing
- blank
- photomask blank
- producing photomask
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/58—Absorbers, e.g. of opaque materials having two or more different absorber layers, e.g. stacked multilayer absorbers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/80—Etching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Silver Salt Photography Or Processing Solution Therefor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019102162A JP7044095B2 (ja) | 2019-05-31 | 2019-05-31 | フォトマスクブランク、フォトマスクの製造方法及びフォトマスク |
PCT/JP2020/017009 WO2020241116A1 (ja) | 2019-05-31 | 2020-04-20 | フォトマスクブランク、フォトマスクの製造方法及びフォトマスク |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202113133RA true SG11202113133RA (en) | 2021-12-30 |
Family
ID=73552332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202113133RA SG11202113133RA (en) | 2019-05-31 | 2020-04-20 | Photomask blank, method for producing photomask, and photomask |
Country Status (8)
Country | Link |
---|---|
US (1) | US11971653B2 (ja) |
EP (1) | EP3979001A4 (ja) |
JP (1) | JP7044095B2 (ja) |
KR (1) | KR102598715B1 (ja) |
CN (1) | CN113874784A (ja) |
SG (1) | SG11202113133RA (ja) |
TW (1) | TWI824153B (ja) |
WO (1) | WO2020241116A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023156717A (ja) * | 2022-04-13 | 2023-10-25 | 信越化学工業株式会社 | 反射型フォトマスクブランク、反射型フォトマスクの製造方法、及び反射型フォトマスク |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60182439A (ja) * | 1984-02-29 | 1985-09-18 | Konishiroku Photo Ind Co Ltd | クロムマスク素材 |
JP2983020B1 (ja) | 1998-12-18 | 1999-11-29 | ホーヤ株式会社 | ハーフトーン型位相シフトマスクブランク及びハーフトーン型位相シフトマスク |
JP3956103B2 (ja) * | 2002-02-26 | 2007-08-08 | 信越化学工業株式会社 | フォトマスクブランク、フォトマスク及びフォトマスクブランクの評価方法 |
JP2002287330A (ja) * | 2002-03-01 | 2002-10-03 | Shin Etsu Chem Co Ltd | フォトマスク用ブランクス及びフォトマスク |
JP2004053663A (ja) * | 2002-07-16 | 2004-02-19 | Shin Etsu Chem Co Ltd | フォトマスクブランク、フォトマスク及びフォトマスクブランクの選定方法 |
JPWO2009123166A1 (ja) * | 2008-03-31 | 2011-07-28 | Hoya株式会社 | フォトマスクブランクおよびその製造方法 |
TWI446103B (zh) | 2008-09-30 | 2014-07-21 | Hoya Corp | A mask substrate, a photomask and a method of manufacturing the same, and a method of manufacturing the semiconductor element |
JP5464186B2 (ja) * | 2011-09-07 | 2014-04-09 | 信越化学工業株式会社 | フォトマスクブランク、フォトマスク及びその製造方法 |
JP6279858B2 (ja) * | 2013-09-03 | 2018-02-14 | Hoya株式会社 | マスクブランクの製造方法および転写用マスクの製造方法 |
JP6292581B2 (ja) | 2014-03-30 | 2018-03-14 | Hoya株式会社 | マスクブランク、転写用マスクの製造方法及び半導体装置の製造方法 |
US10018905B2 (en) * | 2015-04-06 | 2018-07-10 | S & S Tech Co., Ltd | Phase shift blankmask and photomask |
JP6341166B2 (ja) * | 2015-09-03 | 2018-06-13 | 信越化学工業株式会社 | フォトマスクブランク |
JP6632950B2 (ja) * | 2016-09-21 | 2020-01-22 | Hoya株式会社 | フォトマスクブランク、フォトマスクブランクの製造方法、及びそれらを用いたフォトマスクの製造方法、並びに表示装置の製造方法 |
JP6812236B2 (ja) * | 2016-12-27 | 2021-01-13 | Hoya株式会社 | 位相シフトマスクブランク及びこれを用いた位相シフトマスクの製造方法、並びに表示装置の製造方法 |
JP6819546B2 (ja) * | 2017-11-13 | 2021-01-27 | 信越化学工業株式会社 | フォトマスクブランク、及びフォトマスクの製造方法 |
-
2019
- 2019-05-31 JP JP2019102162A patent/JP7044095B2/ja active Active
-
2020
- 2020-04-20 KR KR1020217042786A patent/KR102598715B1/ko active IP Right Grant
- 2020-04-20 WO PCT/JP2020/017009 patent/WO2020241116A1/ja unknown
- 2020-04-20 US US17/614,808 patent/US11971653B2/en active Active
- 2020-04-20 CN CN202080039879.4A patent/CN113874784A/zh active Pending
- 2020-04-20 SG SG11202113133RA patent/SG11202113133RA/en unknown
- 2020-04-20 EP EP20814579.7A patent/EP3979001A4/en active Pending
- 2020-05-27 TW TW109117623A patent/TWI824153B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP7044095B2 (ja) | 2022-03-30 |
US20220229358A1 (en) | 2022-07-21 |
CN113874784A (zh) | 2021-12-31 |
US11971653B2 (en) | 2024-04-30 |
TW202105045A (zh) | 2021-02-01 |
EP3979001A1 (en) | 2022-04-06 |
JP2020197566A (ja) | 2020-12-10 |
TWI824153B (zh) | 2023-12-01 |
KR102598715B1 (ko) | 2023-11-07 |
EP3979001A4 (en) | 2023-06-07 |
WO2020241116A1 (ja) | 2020-12-03 |
KR20220013572A (ko) | 2022-02-04 |
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