SG11202003883RA - Substrate storage container - Google Patents
Substrate storage containerInfo
- Publication number
- SG11202003883RA SG11202003883RA SG11202003883RA SG11202003883RA SG11202003883RA SG 11202003883R A SG11202003883R A SG 11202003883RA SG 11202003883R A SG11202003883R A SG 11202003883RA SG 11202003883R A SG11202003883R A SG 11202003883RA SG 11202003883R A SG11202003883R A SG 11202003883RA
- Authority
- SG
- Singapore
- Prior art keywords
- storage container
- substrate storage
- substrate
- container
- storage
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017219818 | 2017-11-15 | ||
| PCT/JP2018/034524 WO2019097832A1 (ja) | 2017-11-15 | 2018-09-18 | 基板収納容器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11202003883RA true SG11202003883RA (en) | 2020-05-28 |
Family
ID=66538625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11202003883RA SG11202003883RA (en) | 2017-11-15 | 2018-09-18 | Substrate storage container |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11227781B2 (ko) |
| JP (1) | JP6578551B1 (ko) |
| KR (1) | KR102477834B1 (ko) |
| CN (1) | CN111247632B (ko) |
| DE (1) | DE112018005852B4 (ko) |
| SG (1) | SG11202003883RA (ko) |
| TW (1) | TWI774869B (ko) |
| WO (1) | WO2019097832A1 (ko) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102585052B1 (ko) * | 2018-10-29 | 2023-10-06 | 미라이얼 가부시키가이샤 | 기판 수납 용기의 성형 방법, 금형 및 기판 수납 용기 |
| JP6805400B2 (ja) * | 2020-03-31 | 2020-12-23 | ミライアル株式会社 | 基板収納容器 |
| USD954769S1 (en) * | 2020-06-02 | 2022-06-14 | Applied Materials, Inc. | Enclosure system shelf |
| JP7388712B2 (ja) * | 2020-07-22 | 2023-11-29 | 信越ポリマー株式会社 | 収納容器の製造方法 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH672584A5 (ko) * | 1987-07-03 | 1989-12-15 | Nestle Sa | |
| US5520014A (en) * | 1992-09-18 | 1996-05-28 | Laugier; Michael T. | Freezer box |
| US5769266A (en) * | 1994-01-28 | 1998-06-23 | Berry Sterling Corporation | Large drink container to fit vehicle cup holders |
| JP3709958B2 (ja) | 1998-01-26 | 2005-10-26 | 三菱マテリアル株式会社 | 板状部材収納容器及びその内箱構造、及び内箱成形用の射出成形金型 |
| TW448120B (en) * | 1999-11-26 | 2001-08-01 | Takeuchi Press | Metal container with thread |
| JP4330761B2 (ja) | 2000-04-17 | 2009-09-16 | 信越ポリマー株式会社 | ウェーハ輸送容器のサポート具 |
| US6761041B2 (en) * | 2002-09-06 | 2004-07-13 | Henry Roth | Thermal energy storage system |
| JP4667769B2 (ja) * | 2004-06-11 | 2011-04-13 | 信越ポリマー株式会社 | 基板収納容器 |
| EP2022730B1 (en) * | 2006-05-29 | 2013-08-14 | Shin-Etsu Polymer Co. Ltd. | Substrate container |
| JP2007332271A (ja) | 2006-06-15 | 2007-12-27 | Miraial Kk | 高分子成形製品 |
| AU2009248076B2 (en) * | 2008-05-16 | 2014-05-22 | Essity Hygiene And Health Aktiebolag | Two-component injection moulded dispenser part |
| US9370888B2 (en) * | 2008-05-16 | 2016-06-21 | Sca Hygiene Products Ab | Method of making a dispenser or a part thereof |
| JP2011018771A (ja) | 2009-07-09 | 2011-01-27 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
| JP5374640B2 (ja) * | 2010-04-20 | 2013-12-25 | ミライアル株式会社 | 基板収納容器 |
| JP5993560B2 (ja) | 2010-10-06 | 2016-09-14 | ゴールド工業株式会社 | 樹脂成形品、及び樹脂成形品の製造方法 |
| TWI431712B (zh) | 2011-09-20 | 2014-03-21 | Gudeng Prec Ind Co Ltd | 大型前開式晶圓盒 |
| JP5881436B2 (ja) | 2012-01-27 | 2016-03-09 | 信越ポリマー株式会社 | 基板収納容器 |
| CN103479016A (zh) * | 2012-06-11 | 2014-01-01 | 鸿富锦精密工业（深圳）有限公司 | 箱体 |
| TWI645492B (zh) * | 2013-06-18 | 2018-12-21 | 恩特葛瑞斯股份有限公司 | 具有重量壓載器的前開式晶圓容置盒 |
| KR102098790B1 (ko) * | 2013-06-19 | 2020-04-08 | 미라이얼 가부시키가이샤 | 기판수납용기 |
| USD766040S1 (en) * | 2014-11-17 | 2016-09-13 | Rastal Gmbh & Co. Kg | Glass |
| JP6577130B2 (ja) * | 2015-07-13 | 2019-09-18 | インテグリス・インコーポレーテッド | 収納部が強化された基板容器 |
| JP6701493B2 (ja) * | 2016-07-25 | 2020-05-27 | 信越ポリマー株式会社 | 容器本体の製造方法 |
-
2018
- 2018-09-18 JP JP2018567765A patent/JP6578551B1/ja active Active
- 2018-09-18 WO PCT/JP2018/034524 patent/WO2019097832A1/ja active Application Filing
- 2018-09-18 DE DE112018005852.2T patent/DE112018005852B4/de active Active
- 2018-09-18 SG SG11202003883RA patent/SG11202003883RA/en unknown
- 2018-09-18 KR KR1020207011623A patent/KR102477834B1/ko active IP Right Grant
- 2018-09-18 CN CN201880068270.2A patent/CN111247632B/zh active Active
- 2018-09-18 US US16/763,994 patent/US11227781B2/en active Active
- 2018-11-01 TW TW107138864A patent/TWI774869B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| CN111247632A (zh) | 2020-06-05 |
| JPWO2019097832A1 (ja) | 2019-11-21 |
| JP6578551B1 (ja) | 2019-09-25 |
| TW201932383A (zh) | 2019-08-16 |
| KR102477834B1 (ko) | 2022-12-16 |
| TWI774869B (zh) | 2022-08-21 |
| US11227781B2 (en) | 2022-01-18 |
| DE112018005852T5 (de) | 2020-08-13 |
| KR20200085273A (ko) | 2020-07-14 |
| US20200279761A1 (en) | 2020-09-03 |
| DE112018005852B4 (de) | 2024-01-18 |
| WO2019097832A1 (ja) | 2019-05-23 |
| CN111247632B (zh) | 2023-11-14 |
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