SG11201901407SA - Rail-guided trolley system, and rail-guided trolley - Google Patents

Rail-guided trolley system, and rail-guided trolley

Info

Publication number
SG11201901407SA
SG11201901407SA SG11201901407SA SG11201901407SA SG11201901407SA SG 11201901407S A SG11201901407S A SG 11201901407SA SG 11201901407S A SG11201901407S A SG 11201901407SA SG 11201901407S A SG11201901407S A SG 11201901407SA SG 11201901407S A SG11201901407S A SG 11201901407SA
Authority
SG
Singapore
Prior art keywords
rail
guided trolley
traveling
rails
traveling wheels
Prior art date
Application number
SG11201901407SA
Other languages
English (en)
Inventor
Yasuhisa Ito
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201901407SA publication Critical patent/SG11201901407SA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B61RAILWAYS
    • B61BRAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00Elevated railway systems with suspended vehicles
    • B61B3/02Elevated railway systems with suspended vehicles with self-propelled vehicles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • B65G1/0457Storage devices mechanical with suspended load carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733Overhead conveying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0297Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Transportation (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Toys (AREA)
SG11201901407SA 2016-08-26 2017-07-14 Rail-guided trolley system, and rail-guided trolley SG11201901407SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016165607 2016-08-26
PCT/JP2017/025739 WO2018037762A1 (ja) 2016-08-26 2017-07-14 有軌道台車システム、及び有軌道台車

Publications (1)

Publication Number Publication Date
SG11201901407SA true SG11201901407SA (en) 2019-03-28

Family

ID=61246537

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201901407SA SG11201901407SA (en) 2016-08-26 2017-07-14 Rail-guided trolley system, and rail-guided trolley

Country Status (9)

Country Link
US (1) US11476141B2 (de)
EP (1) EP3505416B1 (de)
JP (1) JP6665938B2 (de)
KR (1) KR102165190B1 (de)
CN (1) CN109641595B (de)
IL (1) IL264836B (de)
SG (1) SG11201901407SA (de)
TW (1) TWI708726B (de)
WO (1) WO2018037762A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
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EP3737622A1 (de) * 2018-01-09 2020-11-18 Autostore Technology AS Verschiebungsmechanismus für ein ferngesteuertes fahrzeug
SG11202100868PA (en) * 2018-08-09 2021-03-30 Murata Machinery Ltd Overhead traveling vehicle system
US20210387654A1 (en) * 2018-10-29 2021-12-16 Murata Machinery, Ltd. Traveling vehicle system
SG11202104305YA (en) * 2018-10-29 2021-05-28 Murata Machinery Ltd Ceiling conveyance vehicle and ceiling conveyance vehicle system
CN113165671B (zh) * 2018-11-28 2024-02-02 村田机械株式会社 行驶车系统
CN113874271B (zh) * 2019-05-22 2024-02-06 村田机械株式会社 行驶车系统及行驶车的控制方法
CN113841099B (zh) * 2019-05-22 2024-04-26 村田机械株式会社 行驶车系统及行驶车的控制方法
JP7036089B2 (ja) * 2019-07-03 2022-03-15 村田機械株式会社 搬送システム
CN114401910B (zh) 2019-09-18 2023-12-05 村田机械株式会社 输送系统以及保管部
CN114423692A (zh) 2019-09-18 2022-04-29 村田机械株式会社 行驶车系统
EP3812304A1 (de) * 2019-10-24 2021-04-28 LTW Intralogistics GmbH Vorrichtung zur wegmessung und/oder positionsbestimmung eines in einer logistikanlage eingesetzten fahrzeugs und kanalfahrzeuge
DE102020103303B3 (de) * 2020-02-10 2021-06-24 Deutsches Zentrum für Luft- und Raumfahrt e.V. Robotorsystem
JP7327660B2 (ja) * 2020-04-27 2023-08-16 村田機械株式会社 天井搬送車及び天井搬送システム
EP4155156A1 (de) * 2020-05-19 2023-03-29 Murata Machinery, Ltd. Überkopffördersystem
US20240059488A1 (en) 2021-01-05 2024-02-22 Murata Machinery, Ltd. Ceiling depository system
EP4227184A1 (de) 2021-01-05 2023-08-16 Murata Machinery, Ltd. Überkopf-lagersystem

Family Cites Families (23)

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JPH05116530A (ja) * 1991-07-19 1993-05-14 Iwatani Internatl Corp レール式搬送装置の方向切換装置
JPH08324772A (ja) * 1995-06-05 1996-12-10 Shin Meiwa Ind Co Ltd ワーク搬送装置
JPH10119764A (ja) * 1996-10-22 1998-05-12 Suehiro Giken Kk 台 車
JP2001334930A (ja) * 2000-05-29 2001-12-04 Sumitomo Heavy Ind Ltd 床面走行式台車
TWI233913B (en) * 2002-06-06 2005-06-11 Murata Machinery Ltd Automated guided vehicle system
JP2007246215A (ja) * 2006-03-15 2007-09-27 Murata Mach Ltd 搬送車
JP5180655B2 (ja) * 2007-10-22 2013-04-10 中洲電機株式会社 移動体の方向転換装置
JP5440870B2 (ja) * 2010-08-19 2014-03-12 株式会社ダイフク 物品搬送設備
JP5229363B2 (ja) 2010-11-04 2013-07-03 村田機械株式会社 搬送システム及び搬送方法
JP2012116648A (ja) 2010-12-03 2012-06-21 Yuzo Shimizu レール式クレーン
JP5630661B2 (ja) * 2011-12-19 2014-11-26 株式会社ダイフク 天井設置型の物品搬送設備
JP2013216301A (ja) * 2012-04-11 2013-10-24 Kyoei Kikai Kk 前後左右自在移動台車。
US20140069291A1 (en) * 2012-09-11 2014-03-13 Shenzhen China Star Optoelectronics Technology Co., Ltd Transmission system of LCD panel and automatic crane thereof
CN102826384B (zh) 2012-09-11 2016-03-23 深圳市华星光电技术有限公司 液晶面板的传输系统及其自动起重机
CN103159023B (zh) 2013-04-07 2015-06-10 普瑞特机械制造股份有限公司 一种能在垂直相交地轨上直行并转向的转运装置
KR101436905B1 (ko) 2013-04-30 2014-11-04 주식회사 에스에프에이 반송대차 및 이를 이용하는 반송시스템
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JP6172087B2 (ja) 2014-08-18 2017-08-02 マツダ株式会社 車両用電源制御装置
WO2016029205A1 (en) 2014-08-22 2016-02-25 Bec Companies, Inc. Overhead guide track systems for automated material handling
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WO2017150005A1 (ja) 2016-03-03 2017-09-08 村田機械株式会社 搬送システム

Also Published As

Publication number Publication date
KR20190032493A (ko) 2019-03-27
IL264836B (en) 2022-01-01
JPWO2018037762A1 (ja) 2019-06-20
JP6665938B2 (ja) 2020-03-13
EP3505416B1 (de) 2021-09-29
WO2018037762A1 (ja) 2018-03-01
KR102165190B1 (ko) 2020-10-12
EP3505416A4 (de) 2020-04-15
EP3505416A1 (de) 2019-07-03
CN109641595B (zh) 2021-09-21
US20190189488A1 (en) 2019-06-20
TWI708726B (zh) 2020-11-01
TW201806835A (zh) 2018-03-01
CN109641595A (zh) 2019-04-16
US11476141B2 (en) 2022-10-18

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