SG11201900286PA - Pellicle frame and pellicle - Google Patents

Pellicle frame and pellicle

Info

Publication number
SG11201900286PA
SG11201900286PA SG11201900286PA SG11201900286PA SG11201900286PA SG 11201900286P A SG11201900286P A SG 11201900286PA SG 11201900286P A SG11201900286P A SG 11201900286PA SG 11201900286P A SG11201900286P A SG 11201900286PA SG 11201900286P A SG11201900286P A SG 11201900286PA
Authority
SG
Singapore
Prior art keywords
pellicle
frame
phase
aluminum alloy
anodized film
Prior art date
Application number
SG11201900286PA
Other languages
English (en)
Inventor
Yoshihiro Taguchi
Kazuo Kohmura
Daiki Taneichi
Original Assignee
Nippon Light Metal Co
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Light Metal Co, Mitsui Chemicals Inc filed Critical Nippon Light Metal Co
Publication of SG11201900286PA publication Critical patent/SG11201900286PA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0408—Light metal alloys
    • C22C1/0416—Aluminium-based alloys
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/14—Producing integrally coloured layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/20—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by extruding
    • B22F2003/208—Warm or hot extruding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
SG11201900286PA 2016-07-12 2017-06-30 Pellicle frame and pellicle SG11201900286PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016137647 2016-07-12
PCT/JP2017/024171 WO2018012323A1 (ja) 2016-07-12 2017-06-30 ペリクル枠及びペリクル

Publications (1)

Publication Number Publication Date
SG11201900286PA true SG11201900286PA (en) 2019-02-27

Family

ID=60952033

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201900286PA SG11201900286PA (en) 2016-07-12 2017-06-30 Pellicle frame and pellicle

Country Status (8)

Country Link
US (1) US10955740B2 (de)
EP (1) EP3486722A4 (de)
JP (1) JP6288599B1 (de)
KR (1) KR102337616B1 (de)
CN (1) CN109416505B (de)
SG (1) SG11201900286PA (de)
TW (1) TWI724199B (de)
WO (1) WO2018012323A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7139133B2 (ja) 2018-04-03 2022-09-20 信越化学工業株式会社 ペリクルフレーム、ペリクル、及びペリクルフレームの製造方法
JP7330245B2 (ja) * 2018-04-03 2023-08-21 信越化学工業株式会社 ペリクルフレーム、ペリクル、ペリクル付フォトマスク、露光方法、及び半導体デバイスの製造方法
JP2023137538A (ja) * 2022-03-18 2023-09-29 東洋アルミニウム株式会社 アルミニウム合金箔、及びその製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3777987B2 (ja) * 2000-01-25 2006-05-24 日本軽金属株式会社 ペリクル枠およびペリクル枠の製造方法
JP5481106B2 (ja) * 2009-06-24 2014-04-23 信越化学工業株式会社 ペリクルフレーム及びリソグラフィ用ペリクル
JP4889778B2 (ja) * 2009-10-02 2012-03-07 信越化学工業株式会社 ペリクルの製造方法及びリソグラフィ用ペリクル
JP2011105982A (ja) * 2009-11-16 2011-06-02 Nissan Motor Co Ltd アルミニウム合金およびその製造方法
KR101241426B1 (ko) * 2009-11-20 2013-03-11 한국생산기술연구원 알루미늄 합금의 제조방법
CA2721761C (en) * 2009-11-20 2016-04-19 Korea Institute Of Industrial Technology Aluminum alloy and manufacturing method thereof
JP5741561B2 (ja) * 2012-12-04 2015-07-01 日本軽金属株式会社 ペリクル枠及びその製造方法
CN105659163B (zh) * 2013-10-23 2020-02-07 日本轻金属株式会社 光罩护膜框及其制造方法
TWI592742B (zh) * 2013-10-28 2017-07-21 Nippon Light Metal Co Film frame and method of making the same
JP6446177B2 (ja) 2014-01-10 2018-12-26 旭化成株式会社 ペリクル枠体及びペリクル
CN104775062B (zh) * 2015-04-21 2017-02-22 宝山钢铁股份有限公司 一种高强度铝合金材料、铝合金板及其制造方法
CN104775059B (zh) * 2015-04-21 2017-03-22 宝山钢铁股份有限公司 具有长时间自然时效稳定性的Al‑Mg‑Si系铝合金材料、铝合金板及其制造方法

Also Published As

Publication number Publication date
EP3486722A4 (de) 2020-03-11
JP6288599B1 (ja) 2018-03-07
KR20190028470A (ko) 2019-03-18
CN109416505B (zh) 2022-04-08
CN109416505A (zh) 2019-03-01
KR102337616B1 (ko) 2021-12-08
US20190235377A1 (en) 2019-08-01
EP3486722A1 (de) 2019-05-22
TW201821626A (zh) 2018-06-16
WO2018012323A1 (ja) 2018-01-18
TWI724199B (zh) 2021-04-11
US10955740B2 (en) 2021-03-23
JPWO2018012323A1 (ja) 2018-07-12

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