SG11201900286PA - Pellicle frame and pellicle - Google Patents

Pellicle frame and pellicle

Info

Publication number
SG11201900286PA
SG11201900286PA SG11201900286PA SG11201900286PA SG11201900286PA SG 11201900286P A SG11201900286P A SG 11201900286PA SG 11201900286P A SG11201900286P A SG 11201900286PA SG 11201900286P A SG11201900286P A SG 11201900286PA SG 11201900286P A SG11201900286P A SG 11201900286PA
Authority
SG
Singapore
Prior art keywords
pellicle
frame
phase
aluminum alloy
anodized film
Prior art date
Application number
SG11201900286PA
Inventor
Yoshihiro Taguchi
Kazuo Kohmura
Daiki Taneichi
Original Assignee
Nippon Light Metal Co
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Light Metal Co, Mitsui Chemicals Inc filed Critical Nippon Light Metal Co
Publication of SG11201900286PA publication Critical patent/SG11201900286PA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0408—Light metal alloys
    • C22C1/0416—Aluminium-based alloys
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/14—Producing integrally coloured layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/20—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by extruding
    • B22F2003/208—Warm or hot extruding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The present invention provides; a pellicle frame which can effectively inhibit distortion of the photo mask (8) caused by mounting the pellicle (1), and which does not have a complex shape, and a pellicle which uses said pellicle frame are provided, and a manufacturing method of a blackened pellicle frame is also provided which can reduce the defect of the surface flickering under concentrated light and which facilitates inspection of the foreign matter adhesion prior to use. The present invention relates to a pellicle frame with an anodized film on a surface of an aluminum alloy frame, characterized in that: the aluminum alloy frame comprises an aluminum alloy which contains Ca: 5.0 to 10.0% by mass with the remainder aluminum and unavoidable impurities are contained, and has an area (volume) ratio of an Al 4Ca phase, which is a dispersed phase, is greater than or equal to 25%, and a crystal structure of a part of the Al 4Ca phase is monoclinic; wherein the Al 4Ca phase dispersed in the anodized film is anodized, and the anodized film is stained with a black dye.
SG11201900286PA 2016-07-12 2017-06-30 Pellicle frame and pellicle SG11201900286PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016137647 2016-07-12
PCT/JP2017/024171 WO2018012323A1 (en) 2016-07-12 2017-06-30 Pellicle frame and pellicle

Publications (1)

Publication Number Publication Date
SG11201900286PA true SG11201900286PA (en) 2019-02-27

Family

ID=60952033

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201900286PA SG11201900286PA (en) 2016-07-12 2017-06-30 Pellicle frame and pellicle

Country Status (8)

Country Link
US (1) US10955740B2 (en)
EP (1) EP3486722A4 (en)
JP (1) JP6288599B1 (en)
KR (1) KR102337616B1 (en)
CN (1) CN109416505B (en)
SG (1) SG11201900286PA (en)
TW (1) TWI724199B (en)
WO (1) WO2018012323A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7139133B2 (en) * 2018-04-03 2022-09-20 信越化学工業株式会社 Pellicle frame, pellicle, and method for manufacturing pellicle frame
JP7330245B2 (en) * 2018-04-03 2023-08-21 信越化学工業株式会社 Pellicle frame, pellicle, photomask with pellicle, exposure method, and semiconductor device manufacturing method
JP2023137538A (en) * 2022-03-18 2023-09-29 東洋アルミニウム株式会社 Aluminum alloy foil, and production method thereof

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3777987B2 (en) * 2000-01-25 2006-05-24 日本軽金属株式会社 Pellicle frame and method for manufacturing pellicle frame
JP5481106B2 (en) * 2009-06-24 2014-04-23 信越化学工業株式会社 Pellicle frame and lithography pellicle
JP4889778B2 (en) * 2009-10-02 2012-03-07 信越化学工業株式会社 Pellicle manufacturing method and lithography pellicle
JP2011105982A (en) 2009-11-16 2011-06-02 Nissan Motor Co Ltd Aluminum alloy and method for producing the same
KR101199912B1 (en) * 2009-11-20 2012-11-09 한국생산기술연구원 method of manufacturing aluminium alloy
CA2721761C (en) * 2009-11-20 2016-04-19 Korea Institute Of Industrial Technology Aluminum alloy and manufacturing method thereof
JP5741561B2 (en) * 2012-12-04 2015-07-01 日本軽金属株式会社 Pellicle frame and manufacturing method thereof
CN105659163B (en) * 2013-10-23 2020-02-07 日本轻金属株式会社 Photomask mask frame and manufacturing method thereof
TWI592742B (en) * 2013-10-28 2017-07-21 Nippon Light Metal Co Film frame and method of making the same
JP6446177B2 (en) 2014-01-10 2018-12-26 旭化成株式会社 Pellicle frame and pellicle
CN104775062B (en) * 2015-04-21 2017-02-22 宝山钢铁股份有限公司 High-strength aluminum-alloy material, aluminum-alloy plate and manufacturing method thereof
CN104775059B (en) * 2015-04-21 2017-03-22 宝山钢铁股份有限公司 Al-Mg-Si series aluminum-alloy material with long-time natural aging stability, aluminum-alloy plate and manufacturing method thereof

Also Published As

Publication number Publication date
US10955740B2 (en) 2021-03-23
TWI724199B (en) 2021-04-11
CN109416505A (en) 2019-03-01
KR20190028470A (en) 2019-03-18
KR102337616B1 (en) 2021-12-08
WO2018012323A1 (en) 2018-01-18
EP3486722A4 (en) 2020-03-11
EP3486722A1 (en) 2019-05-22
TW201821626A (en) 2018-06-16
JPWO2018012323A1 (en) 2018-07-12
CN109416505B (en) 2022-04-08
US20190235377A1 (en) 2019-08-01
JP6288599B1 (en) 2018-03-07

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