SG11201803667RA - Systems and methods for region-adaptive defect detection - Google Patents

Systems and methods for region-adaptive defect detection

Info

Publication number
SG11201803667RA
SG11201803667RA SG11201803667RA SG11201803667RA SG11201803667RA SG 11201803667R A SG11201803667R A SG 11201803667RA SG 11201803667R A SG11201803667R A SG 11201803667RA SG 11201803667R A SG11201803667R A SG 11201803667RA SG 11201803667R A SG11201803667R A SG 11201803667RA
Authority
SG
Singapore
Prior art keywords
international
california
test image
image
region
Prior art date
Application number
SG11201803667RA
Other languages
English (en)
Inventor
Christopher Maher
Bjorn Brauer
Vijay Ramachandran
Laurent Karsenti
Eliezer Rosengaus
John Jordan
Roni Miller
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of SG11201803667RA publication Critical patent/SG11201803667RA/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/10—Segmentation; Edge detection
    • G06T7/11—Region-based segmentation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
    • G06V10/751—Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
    • G06V10/758—Involving statistics of pixels or of feature values, e.g. histogram matching
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/88—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20172—Image enhancement details
    • G06T2207/20182—Noise reduction or smoothing in the temporal domain; Spatio-temporal filtering
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Multimedia (AREA)
  • Artificial Intelligence (AREA)
  • Software Systems (AREA)
  • Medical Informatics (AREA)
  • Evolutionary Computation (AREA)
  • Databases & Information Systems (AREA)
  • Computing Systems (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Quality & Reliability (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Analysis (AREA)
  • Peptides Or Proteins (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
SG11201803667RA 2015-11-18 2016-11-16 Systems and methods for region-adaptive defect detection SG11201803667RA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562257025P 2015-11-18 2015-11-18
US15/350,632 US10535131B2 (en) 2015-11-18 2016-11-14 Systems and methods for region-adaptive defect detection
PCT/US2016/062355 WO2017087571A1 (en) 2015-11-18 2016-11-16 Systems and methods for region-adaptive defect detection

Publications (1)

Publication Number Publication Date
SG11201803667RA true SG11201803667RA (en) 2018-06-28

Family

ID=58690746

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201803667RA SG11201803667RA (en) 2015-11-18 2016-11-16 Systems and methods for region-adaptive defect detection

Country Status (8)

Country Link
US (1) US10535131B2 (ja)
JP (1) JP6873129B2 (ja)
KR (1) KR102445535B1 (ja)
CN (1) CN108352063B (ja)
IL (1) IL258804B (ja)
SG (1) SG11201803667RA (ja)
TW (1) TWI699521B (ja)
WO (1) WO2017087571A1 (ja)

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US11120546B2 (en) * 2019-09-24 2021-09-14 Kla Corporation Unsupervised learning-based reference selection for enhanced defect inspection sensitivity
US11416982B2 (en) 2019-10-01 2022-08-16 KLA Corp. Controlling a process for inspection of a specimen
US11127136B2 (en) * 2019-12-05 2021-09-21 Kla Corporation System and method for defining flexible regions on a sample during inspection
US11328435B2 (en) * 2020-06-08 2022-05-10 KLA Corp. Image alignment setup for specimens with intra- and inter-specimen variations using unsupervised learning and adaptive database generation methods
CN111986159B (zh) * 2020-07-24 2024-02-27 苏州威华智能装备有限公司 太阳能电池片的电极缺陷检测方法、设备及存储介质
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US11854184B2 (en) * 2021-01-14 2023-12-26 Applied Materials Israel Ltd. Determination of defects and/or edge roughness in a specimen based on a reference image
CN113283279B (zh) * 2021-01-25 2024-01-19 广东技术师范大学 一种基于深度学习的视频中多目标跟踪方法及装置
CN112819778B (zh) * 2021-01-28 2022-04-12 中国空气动力研究与发展中心超高速空气动力研究所 一种航天材料损伤检测图像多目标全像素分割方法
US11922619B2 (en) 2022-03-31 2024-03-05 Kla Corporation Context-based defect inspection
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CN115876823B (zh) * 2023-01-19 2023-07-14 合肥晶合集成电路股份有限公司 薄膜缺陷的检测方法、薄膜缺陷的检测装置及检测系统
CN116152257B (zh) * 2023-04-22 2023-06-27 拓普思传感器(太仓)有限公司 应用于传感器的检测信息优化方法、服务器及介质

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Also Published As

Publication number Publication date
CN108352063B (zh) 2022-03-25
JP6873129B2 (ja) 2021-05-19
JP2019505089A (ja) 2019-02-21
IL258804B (en) 2021-04-29
CN108352063A (zh) 2018-07-31
IL258804A (en) 2018-06-28
KR20180071404A (ko) 2018-06-27
TW201728892A (zh) 2017-08-16
US10535131B2 (en) 2020-01-14
TWI699521B (zh) 2020-07-21
KR102445535B1 (ko) 2022-09-20
US20170140516A1 (en) 2017-05-18
WO2017087571A1 (en) 2017-05-26

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