SG11201803667RA - Systems and methods for region-adaptive defect detection - Google Patents

Systems and methods for region-adaptive defect detection

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Publication number
SG11201803667RA
SG11201803667RA SG11201803667RA SG11201803667RA SG11201803667RA SG 11201803667R A SG11201803667R A SG 11201803667RA SG 11201803667R A SG11201803667R A SG 11201803667RA SG 11201803667R A SG11201803667R A SG 11201803667RA SG 11201803667R A SG11201803667R A SG 11201803667RA
Authority
SG
Singapore
Prior art keywords
international
california
test image
image
region
Prior art date
Application number
SG11201803667RA
Inventor
Christopher Maher
Bjorn Brauer
Vijay Ramachandran
Laurent Karsenti
Eliezer Rosengaus
John Jordan
Roni Miller
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of SG11201803667RA publication Critical patent/SG11201803667RA/en

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/10—Segmentation; Edge detection
    • G06T7/11—Region-based segmentation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
    • G06V10/751—Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
    • G06V10/758—Involving statistics of pixels or of feature values, e.g. histogram matching
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/88—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20172—Image enhancement details
    • G06T2207/20182—Noise reduction or smoothing in the temporal domain; Spatio-temporal filtering
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 26 May 2017(26.05.2017) WIPOIPCT (10) International Publication Number WO 2017/087571 A1 (51) International Patent Classification: G06T 7/00 (2006.01) G01N 21/17 (2006.01) G01N21/88 (2006.01) (21) International Application Number: PCT/US2016/062355 (22) International Filing Date: 16 November 2016 (16.11.2016) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/257,025 18 November 2015 (18.11.2015) US 15/350,632 14 November 2016 (14.11.2016) US (71) Applicant: KLA-TENCOR CORPORATION [US/US]; Legal Department, One Technology Drive, Milpitas, Cali­ fornia 95035 (US). (72) Inventors: MAHER, Christopher; 407 Lawndale Aven­ ue, Campbell, California 95008 (US). BRAUER, Bjorn; 16698 NW Tucson Street, Beaverton, Oregon 97006 (US). RAMACHANDRAN, Vijay; 832 Duncardine Way, Sunnyvale, California 94087 (US). KARSENTI, Laurent; Haraz Street 16/1, 76086 Rehovot (IL). ROSENGAUS, Eliezer; 3704 Ortega Court, Palo Alto, California 94303 (US). JORDAN, John; 3397 Ivan Way, Mountain View, California 94040 (US). MILLER, Roni; Zamenhof 16, Tel Aviv, Rotem Littman, 17 Eshkol St., Hod Hasharon (IL). (74) Agents: MCANDREWS, Kevin et al.; KLA-Tencor Corp., Legal Department, One Technology Drive, Milpitas, California 95035 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, [Continued on next page] (54) Title: SYSTEMS AND METHODS FOR REGION-ADAPTIVE DEFECT DETECTION 100 1102 INSPECTION MEASUREMENT SUB-SYSTEM J 1 i i i t 104 SAMPLE 106 CONTROLLER 108 : i 1110 m PROCESSOR ' i i i : MEMORY e i 1 (57) : A defect detection meth­ od includes acquiring a reference im­ age; selecting a target region of the ref­ erence image; identifying, based on a matching metric, one or more compar­ ative regions of the reference image corresponding to the target region; ac­ quiring a test image; masking the test image with the target region of the ref­ erence image and the one or more com­ parative regions of the reference image; defining a defect threshold for the tar­ get region in the test image based on the one or more comparative regions in the test image; and determining whether the target region of the test image con­ tains a defect based on the defect threshold. WO 2017/087571 A1 TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3))
SG11201803667RA 2015-11-18 2016-11-16 Systems and methods for region-adaptive defect detection SG11201803667RA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562257025P 2015-11-18 2015-11-18
US15/350,632 US10535131B2 (en) 2015-11-18 2016-11-14 Systems and methods for region-adaptive defect detection
PCT/US2016/062355 WO2017087571A1 (en) 2015-11-18 2016-11-16 Systems and methods for region-adaptive defect detection

Publications (1)

Publication Number Publication Date
SG11201803667RA true SG11201803667RA (en) 2018-06-28

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Application Number Title Priority Date Filing Date
SG11201803667RA SG11201803667RA (en) 2015-11-18 2016-11-16 Systems and methods for region-adaptive defect detection

Country Status (8)

Country Link
US (1) US10535131B2 (en)
JP (1) JP6873129B2 (en)
KR (1) KR102445535B1 (en)
CN (1) CN108352063B (en)
IL (1) IL258804B (en)
SG (1) SG11201803667RA (en)
TW (1) TWI699521B (en)
WO (1) WO2017087571A1 (en)

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Also Published As

Publication number Publication date
KR102445535B1 (en) 2022-09-20
CN108352063B (en) 2022-03-25
US10535131B2 (en) 2020-01-14
IL258804B (en) 2021-04-29
US20170140516A1 (en) 2017-05-18
TWI699521B (en) 2020-07-21
JP6873129B2 (en) 2021-05-19
IL258804A (en) 2018-06-28
KR20180071404A (en) 2018-06-27
CN108352063A (en) 2018-07-31
TW201728892A (en) 2017-08-16
WO2017087571A1 (en) 2017-05-26
JP2019505089A (en) 2019-02-21

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