SG11201704068YA - Etching method and etching apparatus for silicon dioxide substrate - Google Patents
Etching method and etching apparatus for silicon dioxide substrateInfo
- Publication number
- SG11201704068YA SG11201704068YA SG11201704068YA SG11201704068YA SG11201704068YA SG 11201704068Y A SG11201704068Y A SG 11201704068YA SG 11201704068Y A SG11201704068Y A SG 11201704068YA SG 11201704068Y A SG11201704068Y A SG 11201704068YA SG 11201704068Y A SG11201704068Y A SG 11201704068YA
- Authority
- SG
- Singapore
- Prior art keywords
- etching
- silicon dioxide
- dioxide substrate
- etching method
- etching apparatus
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410742698.4A CN105719965A (en) | 2014-12-04 | 2014-12-04 | Method and device for etching silicon dioxide substrate |
PCT/CN2015/096128 WO2016086841A1 (en) | 2014-12-04 | 2015-12-01 | Etching method and etching apparatus for silicon dioxide substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201704068YA true SG11201704068YA (en) | 2017-06-29 |
Family
ID=56091024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201704068YA SG11201704068YA (en) | 2014-12-04 | 2015-12-01 | Etching method and etching apparatus for silicon dioxide substrate |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6423534B2 (en) |
KR (1) | KR102082803B1 (en) |
CN (1) | CN105719965A (en) |
SG (1) | SG11201704068YA (en) |
WO (1) | WO2016086841A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019102483A (en) * | 2017-11-28 | 2019-06-24 | 東京エレクトロン株式会社 | Etching method and etching apparatus |
US11171011B2 (en) * | 2018-08-21 | 2021-11-09 | Lam Research Corporation | Method for etching an etch layer |
TW202117847A (en) | 2019-07-17 | 2021-05-01 | 美商得昇科技股份有限公司 | Processing of workpiece using deposition process and etch process |
JP7382578B2 (en) | 2019-12-27 | 2023-11-17 | パナソニックIpマネジメント株式会社 | Plasma processing method and device chip manufacturing method |
CN111952169A (en) * | 2020-08-21 | 2020-11-17 | 北京北方华创微电子装备有限公司 | Polyimide etching method |
CN113451126B (en) * | 2021-07-07 | 2024-02-27 | 北京北方华创微电子装备有限公司 | Wafer etching method |
CN114685057A (en) * | 2022-03-30 | 2022-07-01 | 广东佛智芯微电子技术研究有限公司 | Nano metal induced etching method for glass substrate |
CN114664649B (en) * | 2022-05-19 | 2022-09-20 | 浙江大学杭州国际科创中心 | Optimization method of silicon carbide high depth-to-width ratio groove etching process |
CN117092881A (en) * | 2023-08-29 | 2023-11-21 | 上海铭锟半导体有限公司 | Preparation method of nano-imprinting master plate |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0612767B2 (en) * | 1984-01-25 | 1994-02-16 | 株式会社日立製作所 | Groove and etching method thereof |
JP3208596B2 (en) * | 1992-04-01 | 2001-09-17 | ソニー株式会社 | Dry etching method |
DE4241045C1 (en) * | 1992-12-05 | 1994-05-26 | Bosch Gmbh Robert | Process for anisotropic etching of silicon |
JPH09232281A (en) * | 1996-02-26 | 1997-09-05 | Sony Corp | Dry-etching treatment method |
JP4153606B2 (en) * | 1998-10-22 | 2008-09-24 | 東京エレクトロン株式会社 | Plasma etching method and plasma etching apparatus |
JP2000156367A (en) * | 1998-11-19 | 2000-06-06 | Sony Corp | Dry etching method |
JP2000164571A (en) * | 1998-11-27 | 2000-06-16 | Sony Corp | Method for forming contact hole and plasma etching method |
JP4221859B2 (en) * | 1999-02-12 | 2009-02-12 | 株式会社デンソー | Manufacturing method of semiconductor device |
KR100327346B1 (en) * | 1999-07-20 | 2002-03-06 | 윤종용 | Plasma etching method using selective polymer deposition and method for forming contact hole using the plasma etching method |
JP2002110647A (en) * | 2000-09-29 | 2002-04-12 | Hitachi Ltd | Manufacturing method of semiconductor integrated circuit device |
JP3773785B2 (en) * | 2000-11-24 | 2006-05-10 | 株式会社東芝 | Manufacturing method of semiconductor device |
US7169695B2 (en) * | 2002-10-11 | 2007-01-30 | Lam Research Corporation | Method for forming a dual damascene structure |
GB0401622D0 (en) * | 2004-01-26 | 2004-02-25 | Oxford Instr Plasma Technology | Plasma etching process |
US7273815B2 (en) * | 2005-08-18 | 2007-09-25 | Lam Research Corporation | Etch features with reduced line edge roughness |
EP1804281B1 (en) * | 2005-12-28 | 2011-12-14 | STMicroelectronics Srl | Process for digging a deep trench in a semiconductor body and semiconductor body so obtained |
EP1816674A1 (en) * | 2006-02-01 | 2007-08-08 | Alcatel Lucent | Anisotropic etching method |
JP2008244224A (en) * | 2007-03-28 | 2008-10-09 | Sumitomo Precision Prod Co Ltd | Plasma treatment apparatus |
WO2008153674A1 (en) * | 2007-06-09 | 2008-12-18 | Boris Kobrin | Method and apparatus for anisotropic etching |
CN101800175B (en) * | 2010-02-11 | 2011-07-20 | 中微半导体设备(上海)有限公司 | Plasma etching method of silicon-containing insulating layer |
JP5981106B2 (en) * | 2011-07-12 | 2016-08-31 | 東京エレクトロン株式会社 | Plasma etching method |
CN103700621B (en) * | 2013-12-27 | 2016-06-01 | 华进半导体封装先导技术研发中心有限公司 | The lithographic method of the vertical glass through hole of a kind of high aspect ratio |
GB201611652D0 (en) * | 2016-07-04 | 2016-08-17 | Spts Technologies Ltd | Method of detecting a condition |
-
2014
- 2014-12-04 CN CN201410742698.4A patent/CN105719965A/en active Pending
-
2015
- 2015-12-01 JP JP2017528933A patent/JP6423534B2/en active Active
- 2015-12-01 SG SG11201704068YA patent/SG11201704068YA/en unknown
- 2015-12-01 WO PCT/CN2015/096128 patent/WO2016086841A1/en active Application Filing
- 2015-12-01 KR KR1020177018336A patent/KR102082803B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN105719965A (en) | 2016-06-29 |
WO2016086841A1 (en) | 2016-06-09 |
JP6423534B2 (en) | 2018-11-14 |
JP2017536701A (en) | 2017-12-07 |
KR20170092645A (en) | 2017-08-11 |
KR102082803B1 (en) | 2020-02-28 |
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