SG11201500802TA - Abrasive articles with precisely shaped features and method of making thereof - Google Patents

Abrasive articles with precisely shaped features and method of making thereof

Info

Publication number
SG11201500802TA
SG11201500802TA SG11201500802TA SG11201500802TA SG11201500802TA SG 11201500802T A SG11201500802T A SG 11201500802TA SG 11201500802T A SG11201500802T A SG 11201500802TA SG 11201500802T A SG11201500802T A SG 11201500802TA SG 11201500802T A SG11201500802T A SG 11201500802TA
Authority
SG
Singapore
Prior art keywords
making
abrasive articles
precisely shaped
shaped features
precisely
Prior art date
Application number
SG11201500802TA
Other languages
English (en)
Inventor
Duy K Lehuu
Noah O Shanti
Junqing Xie
Kathryn R Bretscher
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of SG11201500802TA publication Critical patent/SG11201500802TA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/18—Wheels of special form

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
SG11201500802TA 2012-08-02 2013-07-31 Abrasive articles with precisely shaped features and method of making thereof SG11201500802TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261678666P 2012-08-02 2012-08-02
PCT/US2013/052834 WO2014022465A1 (en) 2012-08-02 2013-07-31 Abrasive articles with precisely shaped features and method of making thereof

Publications (1)

Publication Number Publication Date
SG11201500802TA true SG11201500802TA (en) 2015-04-29

Family

ID=50028491

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201500802TA SG11201500802TA (en) 2012-08-02 2013-07-31 Abrasive articles with precisely shaped features and method of making thereof

Country Status (8)

Country Link
US (2) US10710211B2 (de)
EP (1) EP2879838B1 (de)
JP (1) JP6715006B2 (de)
KR (1) KR102089383B1 (de)
CN (1) CN104736299A (de)
SG (1) SG11201500802TA (de)
TW (1) TWI695756B (de)
WO (1) WO2014022465A1 (de)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2013135445A (ru) 2010-12-31 2015-02-10 Сэнт-Гобэн Керамикс Энд Пластикс, Инк. Абразивное изделие (варианты) и способ его формования
US8840694B2 (en) 2011-06-30 2014-09-23 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
US8986409B2 (en) 2011-06-30 2015-03-24 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particles of silicon nitride
CN103826802B (zh) 2011-09-26 2018-06-12 圣戈本陶瓷及塑料股份有限公司 包括磨料颗粒材料的磨料制品，使用磨料颗粒材料的涂布磨料及其形成方法
KR20140106713A (ko) 2011-12-30 2014-09-03 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성방법
JP5903502B2 (ja) 2011-12-30 2016-04-13 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド 成形研磨粒子を備える粒子材料
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
AU2013207946B2 (en) 2012-01-10 2016-07-07 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having complex shapes and methods of forming same
US9242346B2 (en) 2012-03-30 2016-01-26 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
EP4302955A3 (de) 2012-05-23 2024-04-17 Saint-Gobain Ceramics & Plastics, Inc. Geformte schleifpartikel und verfahren zur herstellung davon
EP2866977B8 (de) 2012-06-29 2023-01-18 Saint-Gobain Ceramics & Plastics, Inc. Schleifpartikel mit besonderen formen und verfahren zur formung solcher partikel
WO2014022453A1 (en) 2012-08-02 2014-02-06 3M Innovative Properties Company Abrasive element precursor with precisely shaped features and method of making thereof
CA2887561C (en) 2012-10-15 2019-01-15 Saint-Gobain Abrasives, Inc. Abrasive particles having particular shapes and methods of forming such particles
CN104994995B (zh) 2012-12-31 2018-12-14 圣戈本陶瓷及塑料股份有限公司 颗粒材料及其形成方法
US9457453B2 (en) 2013-03-29 2016-10-04 Saint-Gobain Abrasives, Inc./Saint-Gobain Abrasifs Abrasive particles having particular shapes and methods of forming such particles
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
CN111978921A (zh) 2013-09-30 2020-11-24 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
US9566689B2 (en) 2013-12-31 2017-02-14 Saint-Gobain Abrasives, Inc. Abrasive article including shaped abrasive particles
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
EP3131706B8 (de) 2014-04-14 2024-01-10 Saint-Gobain Ceramics & Plastics, Inc. Schleifartikel mit geformten schleifpartikeln
US9803119B2 (en) 2014-04-14 2017-10-31 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US9902045B2 (en) 2014-05-30 2018-02-27 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
TW201600242A (zh) * 2014-06-18 2016-01-01 Kinik Co 拋光墊修整器
US20160144477A1 (en) * 2014-11-21 2016-05-26 Diane Scott Coated compressive subpad for chemical mechanical polishing
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
JP6453666B2 (ja) * 2015-02-20 2019-01-16 東芝メモリ株式会社 研磨パッドドレッサの作製方法
CN107636109A (zh) 2015-03-31 2018-01-26 圣戈班磨料磨具有限公司 固定磨料制品和其形成方法
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
CA2988012C (en) 2015-06-11 2021-06-29 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
AT517693B1 (de) * 2015-11-11 2017-04-15 Zkw Group Gmbh Konverter für Leuchtvorrichtungen
EP3455320A4 (de) 2016-05-10 2019-11-20 Saint-Gobain Ceramics&Plastics, Inc. Schleifpartikel und verfahren zur formung davon
US11718774B2 (en) 2016-05-10 2023-08-08 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles and methods of forming same
TWI621502B (zh) * 2016-08-18 2018-04-21 中國砂輪企業股份有限公司 Double chemical mechanical polishing trimming system and method thereof
WO2018064642A1 (en) 2016-09-29 2018-04-05 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
WO2018116122A1 (en) * 2016-12-21 2018-06-28 3M Innovative Properties Company Pad conditioner with spacer and wafer planarization system
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN106938408A (zh) * 2017-03-24 2017-07-11 苏州国量量具科技有限公司 量块的生产方法
CN106956170A (zh) * 2017-03-24 2017-07-18 苏州国量量具科技有限公司 量块的加工方法
US10865148B2 (en) 2017-06-21 2020-12-15 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
US20200172780A1 (en) * 2017-07-11 2020-06-04 3M Innovative Properties Company Abrasive articles including conformable coatings and polishing system therefrom
CN114633207A (zh) * 2017-11-03 2022-06-17 绍兴自远磨具有限公司 一种钻石减薄垫及其制造方法
US20190351527A1 (en) * 2018-05-17 2019-11-21 Entegris, Inc. Conditioner for chemical-mechanical-planarization pad and related methods
KR102304965B1 (ko) * 2019-10-30 2021-09-24 에스케이씨솔믹스 주식회사 연마패드, 이의 제조방법, 및 이를 이용한 반도체 소자의 제조방법
CN114867582A (zh) 2019-12-27 2022-08-05 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
CN114746215A (zh) * 2020-01-06 2022-07-12 圣戈班磨料磨具有限公司 磨料制品及其使用方法
KR102237326B1 (ko) * 2020-06-19 2021-04-07 에스케이씨솔믹스 주식회사 연마패드, 이의 제조방법 및 이를 이용한 반도체 소자의 제조방법
US11759909B2 (en) * 2020-06-19 2023-09-19 Sk Enpulse Co., Ltd. Polishing pad, preparation method thereof and method for preparing semiconductor device using same
KR102237311B1 (ko) * 2020-06-19 2021-04-07 에스케이씨솔믹스 주식회사 연마패드, 이의 제조방법 및 이를 이용한 반도체 소자의 제조방법
KR102237316B1 (ko) * 2020-06-19 2021-04-07 에스케이씨솔믹스 주식회사 연마패드, 이의 제조방법 및 이를 이용한 반도체 소자의 제조방법
KR102237321B1 (ko) * 2020-06-19 2021-04-07 에스케이씨솔믹스 주식회사 연마패드, 이의 제조방법 및 이를 이용한 반도체 소자의 제조방법
WO2023055649A1 (en) * 2021-09-29 2023-04-06 Entegris, Inc. Double-sided pad conditioner
CN116619246B (zh) * 2023-07-24 2023-11-10 北京寰宇晶科科技有限公司 一种具有金刚石柱状晶簇的cmp抛光垫修整器及其制备方法

Family Cites Families (76)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2152392A (en) * 1937-01-26 1939-03-28 Carborundum Co Abrasive article and method of manufacturing the same
KR910002578B1 (ko) * 1988-01-19 1991-04-27 닙폰 가이시 카부시키카이샤 고밀도 SiC 소결체의 제조방법
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5197249A (en) * 1991-02-07 1993-03-30 Wiand Ronald C Diamond tool with non-abrasive segments
JP2642573B2 (ja) * 1991-12-27 1997-08-20 日本碍子株式会社 ＳｉＣ質焼結体
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
CA2170989A1 (en) 1993-09-13 1995-03-23 Timothy L. Hoopman Abrasive article, method of manufacture of same, method of using same for finishing, and a production tool
US5453312A (en) 1993-10-29 1995-09-26 Minnesota Mining And Manufacturing Company Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface
JP3261687B2 (ja) 1994-06-09 2002-03-04 日本電信電話株式会社 パッドコンディショナー及びその製造方法
JP2974047B2 (ja) * 1995-03-15 1999-11-08 三和研磨工業株式会社 円形取付部を備えた砥石チップ嵌込式研磨板
US5692950A (en) 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
US6021559A (en) 1996-11-01 2000-02-08 3M Innovative Properties Company Methods of making a cube corner article master mold
US6368198B1 (en) 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US6214078B1 (en) 1997-11-25 2001-04-10 Ferro Corporation High temperature ceramic filter
US6364749B1 (en) 1999-09-02 2002-04-02 Micron Technology, Inc. CMP polishing pad with hydrophilic surfaces for enhanced wetting
KR100387954B1 (ko) * 1999-10-12 2003-06-19 (주) 휴네텍 연마패드용 컨디셔너와 이의 제조방법
TW467802B (en) 1999-10-12 2001-12-11 Hunatech Co Ltd Conditioner for polishing pad and method for manufacturing the same
US8062098B2 (en) * 2000-11-17 2011-11-22 Duescher Wayne O High speed flat lapping platen
US6632127B1 (en) 2001-03-07 2003-10-14 Jerry W. Zimmer Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same
JP2003103464A (ja) 2001-09-28 2003-04-08 Mitsubishi Materials Corp ダイヤモンドコーティングドレッサー
US6642127B2 (en) 2001-10-19 2003-11-04 Applied Materials, Inc. Method for dicing a semiconductor wafer
US20030109204A1 (en) 2001-12-06 2003-06-12 Kinik Company Fixed abrasive CMP pad dresser and associated methods
JP2004001152A (ja) * 2002-06-03 2004-01-08 Tokyo Seimitsu Co Ltd ドレッサ、ドレッシング方法、研磨装置、及び研磨方法
JP4216025B2 (ja) * 2002-09-09 2009-01-28 株式会社リード 研磨布用ドレッサー及びそれを用いた研磨布のドレッシング方法
WO2004062851A1 (ja) 2003-01-15 2004-07-29 Mitsubishi Materials Corporation 軟質材加工用切削工具
US7089081B2 (en) 2003-01-31 2006-08-08 3M Innovative Properties Company Modeling an abrasive process to achieve controlled material removal
US20050025973A1 (en) 2003-07-25 2005-02-03 Slutz David E. CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
US7066795B2 (en) * 2004-10-12 2006-06-27 Applied Materials, Inc. Polishing pad conditioner with shaped abrasive patterns and channels
US8622787B2 (en) 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8398466B2 (en) 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US9138862B2 (en) * 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
CN101693353A (zh) * 2005-08-25 2010-04-14 石塚博 具有烧结体研磨部的工具及其制造方法
TW200726582A (en) 2005-10-04 2007-07-16 Mitsubishi Materials Corp Rotary tool for processing flexible materials
JP4624293B2 (ja) * 2006-03-31 2011-02-02 株式会社ノリタケスーパーアブレーシブ Ｃｍｐパッドコンディショナー
US7410413B2 (en) 2006-04-27 2008-08-12 3M Innovative Properties Company Structured abrasive article and method of making and using the same
US20080153398A1 (en) 2006-11-16 2008-06-26 Chien-Min Sung Cmp pad conditioners and associated methods
US8083820B2 (en) * 2006-12-22 2011-12-27 3M Innovative Properties Company Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same
US7993185B2 (en) * 2007-01-17 2011-08-09 Russell Gelfuso Device for smoothing the surfaces of hard or soft materials
US20080233845A1 (en) * 2007-03-21 2008-09-25 3M Innovative Properties Company Abrasive articles, rotationally reciprocating tools, and methods
US8323072B1 (en) * 2007-03-21 2012-12-04 3M Innovative Properties Company Method of polishing transparent armor
KR20090013369A (ko) 2007-08-01 2009-02-05 주식회사 세라코리 연마입자 탈락이 방지되는 연마재
WO2009043058A2 (en) 2007-09-28 2009-04-02 Chien-Min Sung Cmp pad conditioners with mosaic abrasive segments and associated methods
CN101903131B (zh) 2007-11-13 2013-01-02 宋健民 Cmp垫修整器
US20090123795A1 (en) 2007-11-13 2009-05-14 Chuah P E Christopher J Condensate drainage subsystem for an electrochemical cell system
US8382557B2 (en) 2007-11-14 2013-02-26 Saint-Gobain Abrasives, Inc. Chemical mechanical planarization pad conditioner and methods of forming thereof
US8080073B2 (en) 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
EP2240298A4 (de) * 2007-12-31 2014-04-30 3M Innovative Properties Co Plasmabehandelte sschleifartikel und verfahren zu ihrer herstellung
US20090224370A1 (en) 2008-03-10 2009-09-10 Slutz David E Non-planar cvd diamond-coated cmp pad conditioner and method for manufacturing
KR100887979B1 (ko) 2008-03-28 2009-03-09 주식회사 세라코리 연마패드용 컨디셔닝 디스크
JP2010047691A (ja) * 2008-08-21 2010-03-04 Amical:Kk 着色ゴムチップ及び着色ゴムチップの製造方法
KR101020870B1 (ko) 2008-09-22 2011-03-09 프리시젼다이아몬드 주식회사 다이아몬드 막이 코팅된 ｃｍｐ 컨디셔너 및 그 제조방법
EP2174751B1 (de) 2008-10-10 2014-07-23 Center for Abrasives and Refractories Research & Development C.A.R.R.D. GmbH Schleifkornagglomerate, Verfahren zu ihrer Herstellung sowie ihre Verwendung zur Herstellung von Schleifmitteln
JP2010125567A (ja) * 2008-11-28 2010-06-10 Mitsubishi Materials Corp Ｃｍｐパッドコンディショナー
WO2010063647A1 (en) 2008-12-03 2010-06-10 Struers A/S Abrasive disc
EP2370232B1 (de) 2008-12-17 2015-04-08 3M Innovative Properties Company Geformte schleifkörper mit nuten
KR101293517B1 (ko) * 2009-03-24 2013-08-07 생-고벵 아브라시프 화학적 기계적 평탄화 패드 컨디셔너로 사용되는 연마 공구
JP2010221386A (ja) 2009-03-25 2010-10-07 Mitsubishi Materials Corp 基材被覆膜、基材被覆膜の製造方法およびｃｍｐパッドコンディショナー
US8801497B2 (en) * 2009-04-30 2014-08-12 Rdc Holdings, Llc Array of abrasive members with resilient support
JP5422262B2 (ja) * 2009-06-01 2014-02-19 ニッタ・ハース株式会社 研磨パッドのコンディショナー
MY155563A (en) 2009-06-02 2015-10-30 Saint Gobain Abrasives Inc Corrosion-resistant cmp conditioning tools and methods for making and using same
CN102612734A (zh) 2009-09-01 2012-07-25 圣戈班磨料磨具有限公司 化学机械抛光修整器
JP2011161584A (ja) 2010-02-12 2011-08-25 Shingijutsu Kaihatsu Kk 研磨工具
KR101091030B1 (ko) 2010-04-08 2011-12-09 이화다이아몬드공업 주식회사 감소된 마찰력을 갖는 패드 컨디셔너 제조방법
US20120171935A1 (en) 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
US9132526B2 (en) * 2011-03-07 2015-09-15 Entegris, Inc. Chemical mechanical planarization conditioner
US20130065490A1 (en) * 2011-09-12 2013-03-14 3M Innovative Properties Company Method of refurbishing vinyl composition tile
AU2013207946B2 (en) 2012-01-10 2016-07-07 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having complex shapes and methods of forming same
TW201350267A (zh) * 2012-05-04 2013-12-16 Saint Gobain Abrasives Inc 用於同雙側化學機械平坦化墊修整器一起使用之工具
EP2879836B1 (de) 2012-08-02 2019-11-13 3M Innovative Properties Company Schleifelement mit formgenauen Merkmalen, daraus hergestellte Schleifartikel und Herstellungsverfahren dafür
WO2014022453A1 (en) 2012-08-02 2014-02-06 3M Innovative Properties Company Abrasive element precursor with precisely shaped features and method of making thereof
TWI530361B (zh) * 2012-11-07 2016-04-21 中國砂輪企業股份有限公司 化學機械研磨修整器及其製法
TWI511841B (zh) * 2013-03-15 2015-12-11 Kinik Co 貼合式化學機械硏磨修整器及其製法
CN203390712U (zh) * 2013-04-08 2014-01-15 宋健民 化学机械研磨修整器
TWI546159B (zh) * 2014-04-11 2016-08-21 中國砂輪企業股份有限公司 可控制研磨深度之化學機械研磨修整器
TWI616278B (zh) * 2015-02-16 2018-03-01 China Grinding Wheel Corp 化學機械研磨修整器

Also Published As

Publication number Publication date
US11697185B2 (en) 2023-07-11
EP2879838A4 (de) 2016-05-25
US20200298370A1 (en) 2020-09-24
KR20150038331A (ko) 2015-04-08
JP2015524358A (ja) 2015-08-24
US10710211B2 (en) 2020-07-14
JP6715006B2 (ja) 2020-07-01
TWI695756B (zh) 2020-06-11
US20150209932A1 (en) 2015-07-30
TW201410389A (zh) 2014-03-16
CN104736299A (zh) 2015-06-24
WO2014022465A1 (en) 2014-02-06
EP2879838B1 (de) 2023-09-13
KR102089383B1 (ko) 2020-03-16
EP2879838A1 (de) 2015-06-10

Similar Documents

Publication Publication Date Title
SG11201500802TA (en) Abrasive articles with precisely shaped features and method of making thereof
EP2866975A4 (de) Schleifartikel und verfahren zu seiner herstellung
SG11201500713PA (en) Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof
EP2726247A4 (de) Schleifartikel und herstellungsverfahren dafür
EP2866972A4 (de) Schleifartikel und verfahren zu seiner herstellung
SG11201400630WA (en) Abrasive article and method of forming
EP2834040A4 (de) Schleifpartikel, verfahren zur herstellung der schleifpartikel und schleifartikel
GB2503537B (en) Apparatus and methods for additive-layer manufacturing of an article
SG11201500800XA (en) Abrasive element precursor with precisely shaped features and method of making thereof
EP2932496A4 (de) Glas und verfahren zur herstellung von glasartikeln
ZA201305403B (en) Abrasive article and method of forming
EP2680802A4 (de) Saugfähiger artikel und herstellungsverfahren dafür
PL2852473T3 (pl) Ukształtowane cząstki ścierne i sposoby ich formowania
EP2802436A4 (de) Schleifpartikel mit komplexen formen und herstellungsverfahren dafür
EP2986416A4 (de) Schleifartikel und verfahren zur herstellung
EP2866977A4 (de) Schleifpartikel mit besonderen formen und verfahren zur formung solcher partikel
PL2847245T3 (pl) Sposób wytwarzania powlekanych wyrobów i powlekane wyroby
EP2809193A4 (de) Rfid-abgeschirmte artikel und verfahren dafür
IL233381A0 (en) Grinding tools and a method for their production
IL231998B (en) Bottled product and method for its production
SG11201405941QA (en) Article and method of making the same
EP2919983A4 (de) Artikel mit faserverstärkten polymeren und verfahren zur verwendung davon
EP2791964A4 (de) Druckvorrichtung und verfahren zur herstellung eines artikels
TWI561344B (en) Structured abrasive articles and method of manufacturing the same
EP2798034A4 (de) Gebundener schleifartikel und verfahren zu seiner formung