SG11201407386YA - Conveyance system and temporary storage method of articles in conveyance system - Google Patents

Conveyance system and temporary storage method of articles in conveyance system

Info

Publication number
SG11201407386YA
SG11201407386YA SG11201407386YA SG11201407386YA SG11201407386YA SG 11201407386Y A SG11201407386Y A SG 11201407386YA SG 11201407386Y A SG11201407386Y A SG 11201407386YA SG 11201407386Y A SG11201407386Y A SG 11201407386YA SG 11201407386Y A SG11201407386Y A SG 11201407386YA
Authority
SG
Singapore
Prior art keywords
conveyance system
articles
temporary storage
storage method
conveyance
Prior art date
Application number
SG11201407386YA
Other languages
English (en)
Inventor
Tatsuji Ota
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201407386YA publication Critical patent/SG11201407386YA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG11201407386YA 2012-06-08 2013-04-22 Conveyance system and temporary storage method of articles in conveyance system SG11201407386YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012130513 2012-06-08
PCT/JP2013/061746 WO2013183376A1 (ja) 2012-06-08 2013-04-22 搬送システム及び搬送システムでの物品の一時保管方法

Publications (1)

Publication Number Publication Date
SG11201407386YA true SG11201407386YA (en) 2015-03-30

Family

ID=49711777

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201407386YA SG11201407386YA (en) 2012-06-08 2013-04-22 Conveyance system and temporary storage method of articles in conveyance system

Country Status (8)

Country Link
US (1) US9520313B2 (ko)
EP (1) EP2860136B1 (ko)
JP (1) JP5880991B2 (ko)
KR (1) KR101664238B1 (ko)
CN (1) CN104302562B (ko)
SG (1) SG11201407386YA (ko)
TW (1) TWI531514B (ko)
WO (1) WO2013183376A1 (ko)

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DE102014205230A1 (de) * 2014-02-28 2015-09-03 Siemens Aktiengesellschaft Lagereinrichtung
US9633879B2 (en) * 2014-05-14 2017-04-25 Murata Machinery, Ltd. Storage system in the ceiling space and storage method for goods thereby
WO2015194264A1 (ja) * 2014-06-19 2015-12-23 村田機械株式会社 キャリアの一時保管装置及び一時保管方法
WO2016031352A1 (ja) * 2014-08-26 2016-03-03 村田機械株式会社 仕分けシステムと仕分け方法
CN106573728B (zh) * 2014-09-10 2019-09-24 村田机械株式会社 临时保管系统、使用了它的输送系统和临时保管方法
JP6048686B2 (ja) * 2014-09-25 2016-12-21 村田機械株式会社 一時保管装置と搬送システム及び一時保管方法
SG11201706227SA (en) * 2015-03-26 2017-10-30 Murata Machinery Ltd Supporting device and supporting method for articles
US9698036B2 (en) * 2015-11-05 2017-07-04 Lam Research Corporation Stacked wafer cassette loading system
WO2017098804A1 (ja) * 2015-12-08 2017-06-15 村田機械株式会社 搬送システム
KR102062548B1 (ko) * 2015-12-08 2020-01-06 무라다기카이가부시끼가이샤 반송 시스템 및 반송 방법
JP6520797B2 (ja) * 2016-04-11 2019-05-29 株式会社ダイフク 物品搬送設備
JP6586936B2 (ja) * 2016-09-21 2019-10-09 株式会社ダイフク 物品搬送設備
JP6766584B2 (ja) * 2016-10-19 2020-10-14 株式会社ダイフク 物品搬送設備
US10672639B2 (en) * 2016-12-07 2020-06-02 Taiwan Semiconductor Manufacturing Co., Ltd. Method for automatic sending cassette pod
JP6844715B2 (ja) * 2017-11-02 2021-03-17 村田機械株式会社 天井搬送車システム及び天井搬送車システムでの物品の一時保管方法
EP3738906B1 (en) * 2018-01-10 2023-09-13 Murata Machinery, Ltd. Method for controlling conveyance system, conveyance system, and management apparatus
JP6897864B2 (ja) * 2018-03-22 2021-07-07 村田機械株式会社 ストッカシステム
EP3848769B1 (en) * 2018-09-04 2023-11-22 Murata Machinery, Ltd. Conveyance vehicle system
JP7349240B2 (ja) * 2018-10-05 2023-09-22 東京エレクトロン株式会社 基板倉庫及び基板検査方法
JP7095750B2 (ja) * 2018-11-06 2022-07-05 村田機械株式会社 天井吊下棚
KR102141197B1 (ko) * 2018-11-28 2020-08-04 세메스 주식회사 캐리어 버퍼 장치
SG11202106551XA (en) * 2018-12-26 2021-07-29 Murata Machinery Ltd Storage system
SG11202108086TA (en) * 2019-01-25 2021-08-30 Murata Machinery Ltd Storage system
WO2020153039A1 (ja) * 2019-01-25 2020-07-30 村田機械株式会社 保管システム
SG11202110216XA (en) * 2019-03-22 2021-10-28 Murata Machinery Ltd Transport vehicle system
JP7224728B2 (ja) 2019-04-23 2023-02-20 株式会社ディスコ 搬送システム
CN113727918B (zh) * 2019-05-13 2023-04-07 村田机械株式会社 高架输送车
KR102259283B1 (ko) * 2019-07-24 2021-06-01 세메스 주식회사 대상물 이송 장치
KR20220069713A (ko) 2020-11-20 2022-05-27 주식회사 정수이앤씨 물품 임시 보관장치 이를 이용한 물품 이송 시스템
JP7294309B2 (ja) * 2020-12-18 2023-06-20 株式会社ダイフク 物品搬送設備
KR20230023301A (ko) * 2021-08-10 2023-02-17 삼성전자주식회사 선반 이동 모듈을 갖는 스토리지 시스템

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JP3669057B2 (ja) * 1996-06-03 2005-07-06 アシスト シンコー株式会社 ストッカへの搬送システム
EP2790210A3 (en) * 2002-06-19 2014-12-31 Murata Machinery, Ltd. Automated material handling system
JP2005150129A (ja) * 2003-11-11 2005-06-09 Asyst Shinko Inc 移載装置及び移載システム
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム
JP2009062153A (ja) 2007-09-06 2009-03-26 Asyst Technologies Japan Inc 保管庫
TW200911654A (en) 2007-09-06 2009-03-16 Asyst Technologies Japan Inc Storage, transporting system and storage set
JP5228504B2 (ja) * 2008-01-24 2013-07-03 村田機械株式会社 保管庫及び入出庫方法
JP5217416B2 (ja) * 2007-12-25 2013-06-19 村田機械株式会社 保管庫及び入出庫方法
JP5256810B2 (ja) * 2008-03-24 2013-08-07 村田機械株式会社 保管庫装置及び保管庫付き搬送システム
JP5463758B2 (ja) * 2009-06-26 2014-04-09 村田機械株式会社 保管庫
TWI496732B (zh) 2009-07-31 2015-08-21 Murata Machinery Ltd 供工具利用之緩衝儲存和運輸裝置
JP5445015B2 (ja) * 2009-10-14 2014-03-19 シンフォニアテクノロジー株式会社 キャリア移載促進装置
JP5429570B2 (ja) 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
JP5477651B2 (ja) * 2010-08-04 2014-04-23 株式会社ダイフク 物品搬送設備
JP5382470B2 (ja) * 2010-11-04 2014-01-08 村田機械株式会社 搬送システム及び搬送方法
JP5648983B2 (ja) * 2010-11-04 2015-01-07 村田機械株式会社 搬送システム及び搬送方法
JP5229363B2 (ja) 2010-11-04 2013-07-03 村田機械株式会社 搬送システム及び搬送方法

Also Published As

Publication number Publication date
KR101664238B1 (ko) 2016-10-10
WO2013183376A1 (ja) 2013-12-12
US20150110585A1 (en) 2015-04-23
KR20150010962A (ko) 2015-01-29
JPWO2013183376A1 (ja) 2016-01-28
EP2860136A4 (en) 2016-01-06
TW201412617A (zh) 2014-04-01
JP5880991B2 (ja) 2016-03-09
CN104302562A (zh) 2015-01-21
CN104302562B (zh) 2016-09-07
EP2860136B1 (en) 2020-08-05
EP2860136A1 (en) 2015-04-15
TWI531514B (zh) 2016-05-01
US9520313B2 (en) 2016-12-13

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