SG109461A1 - System and method for determining stray light in a thermal processing system - Google Patents

System and method for determining stray light in a thermal processing system

Info

Publication number
SG109461A1
SG109461A1 SG200105019A SG200105019A SG109461A1 SG 109461 A1 SG109461 A1 SG 109461A1 SG 200105019 A SG200105019 A SG 200105019A SG 200105019 A SG200105019 A SG 200105019A SG 109461 A1 SG109461 A1 SG 109461A1
Authority
SG
Singapore
Prior art keywords
stray light
thermal processing
processing system
determining stray
determining
Prior art date
Application number
SG200105019A
Other languages
English (en)
Inventor
Shajii Aji
Paul Hebb Jeffrey
Original Assignee
Axcelis Tech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axcelis Tech Inc filed Critical Axcelis Tech Inc
Publication of SG109461A1 publication Critical patent/SG109461A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/02—Removable lids or covers
    • B65D43/0202—Removable lids or covers without integral tamper element
    • B65D43/0204—Removable lids or covers without integral tamper element secured by snapping over beads or projections
    • B65D43/021—Removable lids or covers without integral tamper element secured by snapping over beads or projections only on the inside, or a part turned to the inside, of the mouth
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/50—Containers, packaging elements or packages, specially adapted for particular articles or materials for living organisms, articles or materials sensitive to changes of environment or atmospheric conditions, e.g. land animals, birds, fish, water plants, non-aquatic plants, flower bulbs, cut flowers or foliage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Zoology (AREA)
  • Evolutionary Biology (AREA)
  • Toxicology (AREA)
  • Marine Sciences & Fisheries (AREA)
  • Radiation Pyrometers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
SG200105019A 1999-03-29 2000-03-28 System and method for determining stray light in a thermal processing system SG109461A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/280,308 US6183127B1 (en) 1999-03-29 1999-03-29 System and method for the real time determination of the in situ emissivity of a workpiece during processing

Publications (1)

Publication Number Publication Date
SG109461A1 true SG109461A1 (en) 2005-03-30

Family

ID=23072533

Family Applications (2)

Application Number Title Priority Date Filing Date
SG200105019A SG109461A1 (en) 1999-03-29 2000-03-28 System and method for determining stray light in a thermal processing system
SG200001799A SG101933A1 (en) 1999-03-29 2000-03-28 System and method for the real time determination of the in situ emissivity of a workplace during processing

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG200001799A SG101933A1 (en) 1999-03-29 2000-03-28 System and method for the real time determination of the in situ emissivity of a workplace during processing

Country Status (8)

Country Link
US (2) US6183127B1 (nl)
EP (1) EP1041619B1 (nl)
JP (1) JP4736007B2 (nl)
KR (1) KR100483903B1 (nl)
CN (1) CN1311226C (nl)
DE (1) DE60040253D1 (nl)
SG (2) SG109461A1 (nl)
TW (1) TW452910B (nl)

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US6461036B1 (en) * 1999-03-29 2002-10-08 Axcelis Technologies, Inc. System and method for determining stray light in a thermal processing system
AU3455300A (en) * 1999-03-30 2000-10-16 Tokyo Electron Limited Temperature measuring system
US6303411B1 (en) * 1999-05-03 2001-10-16 Vortek Industries Ltd. Spatially resolved temperature measurement and irradiance control
US6594446B2 (en) * 2000-12-04 2003-07-15 Vortek Industries Ltd. Heat-treating methods and systems
US6840671B2 (en) 2001-04-09 2005-01-11 William R. Barron, Jr. System and method for non-contact temperature sensing
US20060190211A1 (en) * 2001-07-23 2006-08-24 Schietinger Charles W In-situ wafer parameter measurement method employing a hot susceptor as radiation source for reflectance measurement
US20030036877A1 (en) * 2001-07-23 2003-02-20 Schietinger Charles W. In-situ wafer parameter measurement method employing a hot susceptor as a reflected light source
US6753506B2 (en) 2001-08-23 2004-06-22 Axcelis Technologies System and method of fast ambient switching for rapid thermal processing
AU2002341370A1 (en) * 2001-10-15 2003-04-28 Bezalel Urban Fire hazard prevention system
KR101067902B1 (ko) * 2001-12-26 2011-09-27 맷슨 테크날러지 캐나다 인코퍼레이티드 온도 측정 및 열처리 방법과 시스템
JP2004020337A (ja) * 2002-06-14 2004-01-22 Komatsu Ltd 温度測定装置
US6695886B1 (en) 2002-08-22 2004-02-24 Axcelis Technologies, Inc. Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool
US6768084B2 (en) 2002-09-30 2004-07-27 Axcelis Technologies, Inc. Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile
KR100512005B1 (ko) * 2002-11-28 2005-09-02 삼성전자주식회사 이온주입된 웨이퍼의 오염 탐지 방법 및 장치
US9627244B2 (en) 2002-12-20 2017-04-18 Mattson Technology, Inc. Methods and systems for supporting a workpiece and for heat-treating the workpiece
US6971793B2 (en) * 2003-03-21 2005-12-06 Asm Assembly Automation Ltd. Test handler temperature monitoring system
JP4618705B2 (ja) * 2003-09-18 2011-01-26 大日本スクリーン製造株式会社 熱処理装置
US20080090309A1 (en) * 2003-10-27 2008-04-17 Ranish Joseph M Controlled annealing method
US7127367B2 (en) 2003-10-27 2006-10-24 Applied Materials, Inc. Tailored temperature uniformity
US8536492B2 (en) * 2003-10-27 2013-09-17 Applied Materials, Inc. Processing multilayer semiconductors with multiple heat sources
US6855916B1 (en) 2003-12-10 2005-02-15 Axcelis Technologies, Inc. Wafer temperature trajectory control method for high temperature ramp rate applications using dynamic predictive thermal modeling
JP5630935B2 (ja) * 2003-12-19 2014-11-26 マトソン テクノロジー、インコーポレイテッド 工作物の熱誘起運動を抑制する機器及び装置
TWI255921B (en) * 2004-03-26 2006-06-01 Terry B J Kuo Biochip analyzing system and method thereof
US20050275880A1 (en) * 2004-06-09 2005-12-15 Roland Korst Apparatus and method for controlling and managing an RFID printer system
JP2006005148A (ja) * 2004-06-17 2006-01-05 Sharp Corp 半導体薄膜の製造方法および製造装置
US7205231B2 (en) * 2004-10-29 2007-04-17 Axcelis Technologies, Inc. Method for in-situ uniformity optimization in a rapid thermal processing system
US7275861B2 (en) * 2005-01-31 2007-10-02 Veeco Instruments Inc. Calibration wafer and method of calibrating in situ temperatures
JP5967859B2 (ja) * 2006-11-15 2016-08-10 マトソン テクノロジー、インコーポレイテッド 熱処理中の被加工物を支持するシステムおよび方法
US8222574B2 (en) * 2007-01-15 2012-07-17 Applied Materials, Inc. Temperature measurement and control of wafer support in thermal processing chamber
JP4263761B1 (ja) * 2008-01-17 2009-05-13 トヨタ自動車株式会社 減圧式加熱装置とその加熱方法および電子製品の製造方法
JP5718809B2 (ja) 2008-05-16 2015-05-13 マトソン テクノロジー、インコーポレイテッド 加工品の破壊を防止する方法および装置
US8111978B2 (en) * 2008-07-11 2012-02-07 Applied Materials, Inc. Rapid thermal processing chamber with shower head
WO2012009636A1 (en) * 2010-07-15 2012-01-19 Despatch Industries Limited Partnership Firing furnace configuration for thermal processing system
DE102011116243B4 (de) * 2011-10-17 2014-04-17 Centrotherm Photovoltaics Ag Vorrichtung zum Bestimmen der Temperatur eines Substrats
TWI628730B (zh) * 2011-11-10 2018-07-01 應用材料股份有限公司 透過雷射繞射測量3d半導體結構之溫度的設備及方法
CN103898449B (zh) * 2012-12-27 2017-06-06 北京北方微电子基地设备工艺研究中心有限责任公司 用于调节托盘温度的腔室及半导体加工设备
CN104726837B (zh) * 2013-12-18 2018-05-25 北京北方华创微电子装备有限公司 反应腔室及等离子体加工设备
JP6295674B2 (ja) * 2014-01-20 2018-03-20 ウシオ電機株式会社 熱処理装置およびランプ制御方法
JP6164097B2 (ja) * 2014-01-20 2017-07-19 ウシオ電機株式会社 熱処理装置
CN114927395B (zh) * 2022-04-24 2023-05-19 电子科技大学 一种实时控制NEA GaN电子源反射率的方法

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EP0490290A1 (en) * 1990-12-07 1992-06-17 AG Processing Technologies, Inc. Calibration for bichannel radiation detection
US5308161A (en) * 1993-02-11 1994-05-03 Quantum Logic Corporation Pyrometer apparatus for use in rapid thermal processing of semiconductor wafers
US5597237A (en) * 1995-05-30 1997-01-28 Quantum Logic Corp Apparatus for measuring the emissivity of a semiconductor wafer
US5738440A (en) * 1994-12-23 1998-04-14 International Business Machines Corp. Combined emissivity and radiance measurement for the determination of the temperature of a radiant object
US5823681A (en) * 1994-08-02 1998-10-20 C.I. Systems (Israel) Ltd. Multipoint temperature monitoring apparatus for semiconductor wafers during processing
DE19737802A1 (de) * 1997-08-29 1999-03-11 Steag Ast Elektronik Gmbh Verfahren und Vorrichtung zum thermischen Behandeln von Substraten

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Publication number Priority date Publication date Assignee Title
US4919542A (en) * 1988-04-27 1990-04-24 Ag Processing Technologies, Inc. Emissivity correction apparatus and method
EP0490290A1 (en) * 1990-12-07 1992-06-17 AG Processing Technologies, Inc. Calibration for bichannel radiation detection
US5308161A (en) * 1993-02-11 1994-05-03 Quantum Logic Corporation Pyrometer apparatus for use in rapid thermal processing of semiconductor wafers
US5823681A (en) * 1994-08-02 1998-10-20 C.I. Systems (Israel) Ltd. Multipoint temperature monitoring apparatus for semiconductor wafers during processing
US5738440A (en) * 1994-12-23 1998-04-14 International Business Machines Corp. Combined emissivity and radiance measurement for the determination of the temperature of a radiant object
US5597237A (en) * 1995-05-30 1997-01-28 Quantum Logic Corp Apparatus for measuring the emissivity of a semiconductor wafer
DE19737802A1 (de) * 1997-08-29 1999-03-11 Steag Ast Elektronik Gmbh Verfahren und Vorrichtung zum thermischen Behandeln von Substraten

Also Published As

Publication number Publication date
JP4736007B2 (ja) 2011-07-27
US6375348B1 (en) 2002-04-23
SG101933A1 (en) 2004-02-27
EP1041619A2 (en) 2000-10-04
US6183127B1 (en) 2001-02-06
EP1041619A3 (en) 2003-01-15
KR100483903B1 (ko) 2005-04-15
TW452910B (en) 2001-09-01
CN1272556A (zh) 2000-11-08
KR20000071502A (ko) 2000-11-25
DE60040253D1 (de) 2008-10-30
CN1311226C (zh) 2007-04-18
EP1041619B1 (en) 2008-09-17
JP2000323544A (ja) 2000-11-24

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