SG10201809273VA - Light wave separation lattices and methods of forming light wave separation lattices - Google Patents

Light wave separation lattices and methods of forming light wave separation lattices

Info

Publication number
SG10201809273VA
SG10201809273VA SG10201809273VA SG10201809273VA SG10201809273VA SG 10201809273V A SG10201809273V A SG 10201809273VA SG 10201809273V A SG10201809273V A SG 10201809273VA SG 10201809273V A SG10201809273V A SG 10201809273VA SG 10201809273V A SG10201809273V A SG 10201809273VA
Authority
SG
Singapore
Prior art keywords
layer
light wave
wave separation
refractive index
lattices
Prior art date
Application number
SG10201809273VA
Other languages
English (en)
Inventor
Daniel Lee Diehl
Yong Cao
Mingwei Zhu
Tai-Chou Papo Chen
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG10201809273VA publication Critical patent/SG10201809273VA/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)
SG10201809273VA 2014-04-11 2015-03-24 Light wave separation lattices and methods of forming light wave separation lattices SG10201809273VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201461978803P 2014-04-11 2014-04-11
US14/291,712 US9746678B2 (en) 2014-04-11 2014-05-30 Light wave separation lattices and methods of forming light wave separation lattices

Publications (1)

Publication Number Publication Date
SG10201809273VA true SG10201809273VA (en) 2018-11-29

Family

ID=54264973

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201809273VA SG10201809273VA (en) 2014-04-11 2015-03-24 Light wave separation lattices and methods of forming light wave separation lattices
SG11201607119UA SG11201607119UA (en) 2014-04-11 2015-03-24 Light wave separation lattices and methods of forming light wave separation lattices

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201607119UA SG11201607119UA (en) 2014-04-11 2015-03-24 Light wave separation lattices and methods of forming light wave separation lattices

Country Status (7)

Country Link
US (2) US9746678B2 (enExample)
EP (1) EP3129823A4 (enExample)
JP (1) JP2017516914A (enExample)
CN (1) CN106170730A (enExample)
SG (2) SG10201809273VA (enExample)
TW (2) TWI667501B (enExample)
WO (1) WO2015156991A1 (enExample)

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US20210319989A1 (en) * 2020-04-13 2021-10-14 Applied Materials, Inc. Methods and apparatus for processing a substrate
US12392945B2 (en) * 2020-04-28 2025-08-19 Viavi Solutions Inc. Induced transmission filter with hydrogenated silicon, silver, and silicon dioxide
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US12338527B2 (en) * 2021-09-03 2025-06-24 Applied Materials, Inc. Shutter disk for physical vapor deposition (PVD) chamber

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Also Published As

Publication number Publication date
US20180011331A1 (en) 2018-01-11
SG11201607119UA (en) 2016-10-28
TW201939074A (zh) 2019-10-01
US20150293363A1 (en) 2015-10-15
JP2017516914A (ja) 2017-06-22
TW201602650A (zh) 2016-01-16
TWI667501B (zh) 2019-08-01
EP3129823A1 (en) 2017-02-15
US9746678B2 (en) 2017-08-29
CN106170730A (zh) 2016-11-30
WO2015156991A1 (en) 2015-10-15
EP3129823A4 (en) 2017-11-22

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