SG10201801948WA - System for testing an integrated circuit of a device and its method of use - Google Patents

System for testing an integrated circuit of a device and its method of use

Info

Publication number
SG10201801948WA
SG10201801948WA SG10201801948WA SG10201801948WA SG10201801948WA SG 10201801948W A SG10201801948W A SG 10201801948WA SG 10201801948W A SG10201801948W A SG 10201801948WA SG 10201801948W A SG10201801948W A SG 10201801948WA SG 10201801948W A SG10201801948W A SG 10201801948WA
Authority
SG
Singapore
Prior art keywords
testing
integrated circuit
integrated
circuit
Prior art date
Application number
SG10201801948WA
Inventor
Scott E Lindsey
Junyje Yeh
Jovan Jovanovic
Seang P Malathong
Original Assignee
Aehr Test Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aehr Test Systems filed Critical Aehr Test Systems
Publication of SG10201801948WA publication Critical patent/SG10201801948WA/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0441Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416Connectors, terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0491Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06705Apparatus for holding or moving single probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
SG10201801948WA 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use SG10201801948WA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/411,233 US8030957B2 (en) 2009-03-25 2009-03-25 System for testing an integrated circuit of a device and its method of use

Publications (1)

Publication Number Publication Date
SG10201801948WA true SG10201801948WA (en) 2018-04-27

Family

ID=42781520

Family Applications (5)

Application Number Title Priority Date Filing Date
SG10201400838PA SG10201400838PA (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use
SG2011068228A SG174890A1 (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use
SG10202108629YA SG10202108629YA (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use
SG10201801948WA SG10201801948WA (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use
SG10201912223SA SG10201912223SA (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use

Family Applications Before (3)

Application Number Title Priority Date Filing Date
SG10201400838PA SG10201400838PA (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use
SG2011068228A SG174890A1 (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use
SG10202108629YA SG10202108629YA (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201912223SA SG10201912223SA (en) 2009-03-25 2010-03-25 System for testing an integrated circuit of a device and its method of use

Country Status (5)

Country Link
US (8) US8030957B2 (en)
EP (1) EP2411819A1 (en)
JP (4) JP5635586B2 (en)
SG (5) SG10201400838PA (en)
WO (1) WO2010111526A1 (en)

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