SG10201505061WA - Treatment device for transport and storage boxes - Google Patents

Treatment device for transport and storage boxes

Info

Publication number
SG10201505061WA
SG10201505061WA SG10201505061WA SG10201505061WA SG10201505061WA SG 10201505061W A SG10201505061W A SG 10201505061WA SG 10201505061W A SG10201505061W A SG 10201505061WA SG 10201505061W A SG10201505061W A SG 10201505061WA SG 10201505061W A SG10201505061W A SG 10201505061WA
Authority
SG
Singapore
Prior art keywords
transport
treatment device
storage boxes
boxes
storage
Prior art date
Application number
SG10201505061WA
Other languages
English (en)
Inventor
Sylvain Rioufrays
Erwan Godot
Arnaud Favre
Original Assignee
Adixen Vacuum Products
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adixen Vacuum Products filed Critical Adixen Vacuum Products
Publication of SG10201505061WA publication Critical patent/SG10201505061WA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/0821—Handling or manipulating containers, e.g. moving or rotating containers in cleaning devices, conveying to or from cleaning devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/42—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough
    • B08B9/44—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough the means being for loading or unloading the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Warehouses Or Storage Devices (AREA)
SG10201505061WA 2010-06-29 2011-06-27 Treatment device for transport and storage boxes SG10201505061WA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1055187A FR2961946B1 (fr) 2010-06-29 2010-06-29 Dispositif de traitement pour boites de transport et de stockage

Publications (1)

Publication Number Publication Date
SG10201505061WA true SG10201505061WA (en) 2015-07-30

Family

ID=42701989

Family Applications (2)

Application Number Title Priority Date Filing Date
SG2012091625A SG186713A1 (en) 2010-06-29 2011-06-27 Treatment device for transport and storage boxes
SG10201505061WA SG10201505061WA (en) 2010-06-29 2011-06-27 Treatment device for transport and storage boxes

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG2012091625A SG186713A1 (en) 2010-06-29 2011-06-27 Treatment device for transport and storage boxes

Country Status (9)

Country Link
US (1) US9403196B2 (ko)
EP (1) EP2588392A1 (ko)
JP (1) JP5814362B2 (ko)
KR (1) KR20130095198A (ko)
CN (1) CN102985344B (ko)
FR (1) FR2961946B1 (ko)
SG (2) SG186713A1 (ko)
TW (1) TWI533948B (ko)
WO (1) WO2012000950A1 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2954583B1 (fr) 2009-12-18 2017-11-24 Alcatel Lucent Procede et dispositif de pilotage de fabrication de semi conducteurs par mesure de contamination
FR2999015B1 (fr) * 2012-11-30 2014-12-12 Adixen Vacuum Products Station et procede de mesure de la contamination en particules d'une enceinte de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs
JP6237686B2 (ja) * 2015-04-06 2017-11-29 京セラドキュメントソリューションズ株式会社 電子機器及び画像形成装置
KR101695948B1 (ko) * 2015-06-26 2017-01-13 주식회사 테라세미콘 기판처리 시스템
JP6572854B2 (ja) * 2016-09-09 2019-09-11 株式会社ダイフク 容器収納設備
JP7234527B2 (ja) * 2018-07-30 2023-03-08 Tdk株式会社 センサー内蔵フィルタ構造体及びウエハ収容容器
US11365896B2 (en) * 2019-11-05 2022-06-21 Kenneth Edwin Bobko Negative pressure wall box
NO346963B1 (en) 2021-08-23 2023-03-20 Autostore Tech As Disinfection station for a storage container
CN114251774B (zh) * 2021-12-15 2023-12-08 浙江托马仕电器有限公司 一种离子风空气净化器

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3250038A (en) * 1963-02-18 1966-05-10 Kota Products Inc Window structure
US5284412A (en) * 1990-08-17 1994-02-08 Tokyo Electron Sagami Limited Stock unit for storing carriers
JP2971184B2 (ja) * 1991-06-28 1999-11-02 中部電力株式会社 空気再生機
ATE129361T1 (de) * 1992-08-04 1995-11-15 Ibm Fertigungsstrasse architektur mit vollautomatisierten und rechnergesteuerten fördereinrichtungen geeignet für abdichtbaren tragbaren unter druck stehenden behältern.
DE4237767A1 (de) 1992-11-09 1994-05-11 Siemens Ag Verfahren und Vorrichtung zum Reinigen von Bauteiloberflächen, insbesondere von mit Partikeln kontaminierten hochreinen Oberflächen von für die Elektronikfertigung bestimmten Bauteilen, wie Masken, Wafern od. dgl.
JP2741156B2 (ja) 1993-09-17 1998-04-15 東京エレクトロン株式会社 マルチチャンバー処理装置のクリーニング方法
US5616208A (en) * 1993-09-17 1997-04-01 Tokyo Electron Limited Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus
US5827118A (en) * 1996-08-28 1998-10-27 Seh America, Inc. Clean storage unit air flow system
US5879458A (en) 1996-09-13 1999-03-09 Semifab Incorporated Molecular contamination control system
US6287023B1 (en) 1997-09-22 2001-09-11 Tokyo Electron Limited Processing apparatus and method
JPH11168135A (ja) * 1997-12-03 1999-06-22 Toshiba Corp 基板保管装置および基板保管方法
US6168672B1 (en) * 1998-03-06 2001-01-02 Applied Materials Inc. Method and apparatus for automatically performing cleaning processes in a semiconductor wafer processing system
JPH11274282A (ja) 1998-03-23 1999-10-08 Toshiba Corp 基板収納容器、基板収納容器清浄化装置、基板収納容器清浄化方法および基板処理装置
US6193601B1 (en) 1998-11-10 2001-02-27 Sandia Corporation Module bay with directed flow
DE19922936B4 (de) * 1999-05-19 2004-04-29 Infineon Technologies Ag Anlage zur Bearbeitung von Wafern
DE19941399A1 (de) 1999-08-31 2001-04-19 Infineon Technologies Ag Reinigung von Stencilmasken mit Hilfe einer durch Maskenöffnungen hindurchtretenden Gasströmung
US6791661B2 (en) 1999-12-09 2004-09-14 Nikon Corporation Gas replacement method and apparatus, and exposure method and apparatus
US6346986B1 (en) 2000-03-14 2002-02-12 Wafertech, Inc. Non-intrusive pellicle height measurement system
JP2001267200A (ja) 2000-03-14 2001-09-28 Nikon Corp ガス置換方法及び装置、並びに露光方法及び装置
TW522460B (en) 2000-03-30 2003-03-01 Nikon Corp Exposure apparatus, exposure method, and device manufacturing method
WO2002015255A1 (en) 2000-08-11 2002-02-21 Chem Trace Corporation System and method for cleaning semiconductor fabrication equipment parts
US6710845B2 (en) 2000-12-29 2004-03-23 Intel Corporation Purging gas from a photolithography enclosure between a mask protective device and a patterned mask
JP2002372777A (ja) 2001-06-18 2002-12-26 Canon Inc ガス置換方法および露光装置
SE0102438D0 (sv) 2001-07-05 2001-07-05 Astrazeneca Ab New compounds
US20040023419A1 (en) 2001-09-24 2004-02-05 Extraction Systems, Inc System and method for monitoring contamination
WO2003034475A1 (fr) 2001-10-10 2003-04-24 Nikon Corporation Procede et dispositif de substitution de gaz, dispositif de protection de masque, masque, ainsi que procede et dispositif d'exposition
JP4006235B2 (ja) 2002-02-05 2007-11-14 キヤノン株式会社 不活性ガス置換方法及び装置、レチクル保管庫、レチクル検査装置、レチクル搬送ボックス、デバイスの製造方法
JP4355488B2 (ja) 2002-05-13 2009-11-04 富士通株式会社 分子汚染監視システム
KR100679591B1 (ko) 2003-04-28 2007-02-07 티디케이가부시기가이샤 퍼지 장치 및 퍼지 방법
JP2005093697A (ja) 2003-09-17 2005-04-07 Canon Inc 面位置検出装置及び方法、露光装置並びに収差補正方法
US7218983B2 (en) 2003-11-06 2007-05-15 Applied Materials, Inc. Method and apparatus for integrating large and small lot electronic device fabrication facilities
JP2005256983A (ja) 2004-03-12 2005-09-22 Shin Etsu Polymer Co Ltd 基板収納容器
CN100500526C (zh) * 2004-12-28 2009-06-17 友达光电股份有限公司 卡匣仓储系统
FR2883412B1 (fr) 2005-03-18 2007-05-04 Alcatel Sa Procede et dispositif pour le controle de la contamination des plaquettes de substrat
KR100719373B1 (ko) 2005-08-11 2007-05-17 삼성전자주식회사 반도체 노광 설비 및 펠리클 검사 방법
US7577487B2 (en) 2005-09-14 2009-08-18 Applied Materials, Inc. Methods and apparatus for a band to band transfer module
US20070062561A1 (en) 2005-09-19 2007-03-22 International Business Machines Corporation Method And Apparatus For Testing Particulate Contamination In Wafer Carriers
JP2007123673A (ja) * 2005-10-31 2007-05-17 Asyst Shinko Inc 物品収納用容器の防振機構
US8308418B2 (en) 2006-05-09 2012-11-13 Taiwan Semiconductor Manufacturing Co., Ltd. High efficiency buffer stocker
FR2901546B1 (fr) 2006-05-24 2010-10-15 Cit Alcatel Procede et dispositif de depollution d'environnement confine
FR2908674A1 (fr) 2007-01-29 2008-05-23 Alcatel Sa Dispositif de nettoyage et de depollution d'un objet a environnement confine non etanche limite par une paroi a membrane souple
WO2008144670A1 (en) * 2007-05-18 2008-11-27 Brooks Automation, Inc. Load lock fast pump vent
FR2920046A1 (fr) 2007-08-13 2009-02-20 Alcatel Lucent Sas Procede de post-traitement d'un support de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs, et station de post-traitement pour la mise en oeuvre d'un tel procede
US20090162170A1 (en) * 2007-12-19 2009-06-25 Asm Japan K.K. Tandem type semiconductor-processing apparatus
US20100021273A1 (en) * 2008-07-28 2010-01-28 Applied Materials, Inc. Concrete vacuum chamber
JP5517182B2 (ja) * 2008-08-08 2014-06-11 村田機械株式会社 保管庫システム
FR2954583B1 (fr) 2009-12-18 2017-11-24 Alcatel Lucent Procede et dispositif de pilotage de fabrication de semi conducteurs par mesure de contamination
FR2964334B1 (fr) 2010-09-08 2012-09-14 Alcatel Lucent Procede et dispositif de depollution d'un photomasque pellicule

Also Published As

Publication number Publication date
JP2013539200A (ja) 2013-10-17
SG186713A1 (en) 2013-02-28
US20130097802A1 (en) 2013-04-25
FR2961946A1 (fr) 2011-12-30
JP5814362B2 (ja) 2015-11-17
CN102985344B (zh) 2015-08-12
TWI533948B (zh) 2016-05-21
TW201221233A (en) 2012-06-01
KR20130095198A (ko) 2013-08-27
FR2961946B1 (fr) 2012-08-03
WO2012000950A1 (fr) 2012-01-05
US9403196B2 (en) 2016-08-02
EP2588392A1 (fr) 2013-05-08
CN102985344A (zh) 2013-03-20

Similar Documents

Publication Publication Date Title
GB2485011B (en) Storage device
HK1181364A1 (en) Rotating device for receiving and handling goods
SI2523864T1 (sl) Naprava za transport predmetov
GB201103429D0 (en) Improved waste storage device and cassette
SG10201505061WA (en) Treatment device for transport and storage boxes
HK1189263A1 (zh) 高效的存儲和輸送裝置與系統
PL2655156T3 (pl) Urządzenie transportowe
PL388808A1 (pl) Urządzenie magazynująco-transportowe dla podłużnych elementów prętopodobnych
GB2489648B (en) Storage apparatus
EP2780855A4 (en) PROCESS AND MEMORY DEVICE FOR CONTENT PROTECTION
PL2558378T3 (pl) Pojemnik transportowy
ZA201302796B (en) Transport and presentation box
EP2544414A4 (en) METHOD AND DEVICE FOR STORING ROUTING TABLE INPUT
PL2433880T3 (pl) Pojemnik do transportu i magazynowania cieczy
PL2426067T3 (pl) Pojemnik do transportu i magazynowania cieczy
ZA201302797B (en) Transport and presentation box
PL2423137T3 (pl) Urządzenie przenośnikowe
GB2488577B (en) Storage and sanitation device
PL393600A1 (pl) Kontener transportowo-magazynowy
EP2544092A4 (en) STORAGE DEVICE
EP2544084A4 (en) STORAGE DEVICE
PL2447191T3 (pl) Urządzenie transportowe dla kontenerów
EP2601116A4 (en) TRANSPORT CONTAINER
SI2415681T1 (sl) Skladiščna in transportna priprava
ZA201208716B (en) Device and method for storing products