SE7808751L - BATTERY-POWERED IONIZATION ROCKER UNIT - Google Patents

BATTERY-POWERED IONIZATION ROCKER UNIT

Info

Publication number
SE7808751L
SE7808751L SE7808751A SE7808751A SE7808751L SE 7808751 L SE7808751 L SE 7808751L SE 7808751 A SE7808751 A SE 7808751A SE 7808751 A SE7808751 A SE 7808751A SE 7808751 L SE7808751 L SE 7808751L
Authority
SE
Sweden
Prior art keywords
region
wiring layer
film
diffused
type
Prior art date
Application number
SE7808751A
Other languages
Swedish (sv)
Inventor
T Arima
Original Assignee
Hochiki Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochiki Co filed Critical Hochiki Co
Publication of SE7808751L publication Critical patent/SE7808751L/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G01R19/16533—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application
    • G01R19/16538—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application in AC or DC supplies
    • G01R19/16542—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application in AC or DC supplies for batteries
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/11—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means using an ionisation chamber for detecting smoke or gas

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:A thin part which deforms by fluid pressure is provided to a semiconductor single-crystal substrate and when an electrode wiring layer is fitted after a diffused resistance layer is formed there, the width of the wiring layer is made narrower than that of the resistance layer so as to reduce hysteresis against the temperature variation of an offset voltage, thereby obtaining high performance. CONSTITUTION:At the center part of N type Si substrate 11, thick diaphragm 12 is formed, masking with SiO2 film 141 is done except P type diffused-resistance formation region 13, and BSG film 142 is adhered to the entire surface. Through a heat treatment, B in film 142 is diffused to form P type region 13 in the region of diaphragm 12 and then, the entire surface is covered with PSG film 143. Afterward, those stacked films on region 13 are provided with a contact hole, Al electrode wiring layer 151 and 152 are provided, and protection with PSG film 144 is done. In this constitution, the width of wiring layer 151 and 152 is made narrower than that of region 13. Consequently, the precision of pressure conversion improves remarkably.
SE7808751A 1977-09-16 1978-08-18 BATTERY-POWERED IONIZATION ROCKER UNIT SE7808751L (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11131277A JPS5444883A (en) 1977-09-16 1977-09-16 Semiconductor pressure converter

Publications (1)

Publication Number Publication Date
SE7808751L true SE7808751L (en) 1979-02-20

Family

ID=14558024

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7808751A SE7808751L (en) 1977-09-16 1978-08-18 BATTERY-POWERED IONIZATION ROCKER UNIT

Country Status (2)

Country Link
JP (1) JPS5444883A (en)
SE (1) SE7808751L (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02110027U (en) * 1989-02-10 1990-09-03
JP2827718B2 (en) * 1992-07-15 1998-11-25 株式会社デンソー Semiconductor acceleration sensor
US6056888A (en) * 1999-04-19 2000-05-02 Motorola, Inc. Electronic component and method of manufacture

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549174B2 (en) * 1971-09-27 1980-12-10
JPS51143380A (en) * 1975-06-04 1976-12-09 Hitachi Ltd Semiconductor pressure converter

Also Published As

Publication number Publication date
JPS5444883A (en) 1979-04-09
JPS6124836B2 (en) 1986-06-12

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