SE7613531L - Sett att framstella en elektrod for halvledaranordning - Google Patents
Sett att framstella en elektrod for halvledaranordningInfo
- Publication number
- SE7613531L SE7613531L SE7613531A SE7613531A SE7613531L SE 7613531 L SE7613531 L SE 7613531L SE 7613531 A SE7613531 A SE 7613531A SE 7613531 A SE7613531 A SE 7613531A SE 7613531 L SE7613531 L SE 7613531L
- Authority
- SE
- Sweden
- Prior art keywords
- electrode
- producing
- semiconductor device
- nickel
- atomic percent
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
- 229910001252 Pd alloy Inorganic materials 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- BSIDXUHWUKTRQL-UHFFFAOYSA-N nickel palladium Chemical compound [Ni].[Pd] BSIDXUHWUKTRQL-UHFFFAOYSA-N 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50144169A JPS5267961A (en) | 1975-12-03 | 1975-12-03 | Electrode formation of semiconductor unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE7613531L true SE7613531L (sv) | 1977-06-04 |
Family
ID=15355793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7613531A SE7613531L (sv) | 1975-12-03 | 1976-12-02 | Sett att framstella en elektrod for halvledaranordning |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4224115A ( ) |
| JP (1) | JPS5267961A ( ) |
| DE (1) | DE2654476C3 ( ) |
| SE (1) | SE7613531L ( ) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4316209A (en) * | 1979-08-31 | 1982-02-16 | International Business Machines Corporation | Metal/silicon contact and methods of fabrication thereof |
| US4350994A (en) * | 1979-10-04 | 1982-09-21 | Wisconsin Alumni Research Foundation | Semiconductor device having an amorphous metal layer contact |
| JP3403263B2 (ja) * | 1994-11-14 | 2003-05-06 | 臼井国際産業株式会社 | 加工性・耐食性の均一性に優れた耐熱・耐食性めっき鋼材 |
| JP3223829B2 (ja) * | 1997-01-29 | 2001-10-29 | 新光電気工業株式会社 | 電気ニッケルめっき浴又は電気ニッケル合金めっき浴及びそれを用いためっき方法 |
| US7262434B2 (en) * | 2002-03-28 | 2007-08-28 | Rohm Co., Ltd. | Semiconductor device with a silicon carbide substrate and ohmic metal layer |
| US7749877B2 (en) * | 2006-03-07 | 2010-07-06 | Siliconix Technology C. V. | Process for forming Schottky rectifier with PtNi silicide Schottky barrier |
| US7701031B2 (en) * | 2006-04-07 | 2010-04-20 | United Microelectronics Corp. | Integrated circuit structure and manufacturing method thereof |
| US20110147225A1 (en) | 2007-07-20 | 2011-06-23 | Rohm And Haas Electronic Materials Llc | High speed method for plating palladium and palladium alloys |
| CN101348928B (zh) * | 2007-07-20 | 2012-07-04 | 罗门哈斯电子材料有限公司 | 镀钯及镀钯合金之高速方法 |
| CN105244317B (zh) * | 2014-07-09 | 2018-11-20 | 中芯国际集成电路制造(上海)有限公司 | 一种硅化镍后形成工艺 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1098182A (en) * | 1963-12-27 | 1968-01-10 | Ibm | Electrolyte or electroless plating process |
| JPS4733176B1 ( ) * | 1967-01-11 | 1972-08-23 | ||
| GB1207093A (en) * | 1968-04-05 | 1970-09-30 | Matsushita Electronics Corp | Improvements in or relating to schottky barrier semiconductor devices |
| FR2058385A1 (en) * | 1969-08-20 | 1971-05-28 | Ibm | Diode with schottky barrier |
| US3699408A (en) * | 1970-01-23 | 1972-10-17 | Nippon Electric Co | Gallium-arsenide schottky barrier type semiconductor device |
| JPS4733178U ( ) * | 1971-05-14 | 1972-12-13 | ||
| JPS5117870B2 ( ) * | 1973-12-01 | 1976-06-05 | ||
| US3932880A (en) * | 1974-11-26 | 1976-01-13 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device with Schottky barrier |
-
1975
- 1975-12-03 JP JP50144169A patent/JPS5267961A/ja active Pending
-
1976
- 1976-12-01 DE DE2654476A patent/DE2654476C3/de not_active Expired
- 1976-12-02 SE SE7613531A patent/SE7613531L/ not_active Application Discontinuation
-
1978
- 1978-06-26 US US05/919,308 patent/US4224115A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2654476A1 (de) | 1977-06-23 |
| DE2654476B2 (de) | 1978-11-09 |
| DE2654476C3 (de) | 1982-02-18 |
| US4224115A (en) | 1980-09-23 |
| JPS5267961A (en) | 1977-06-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NAV | Patent application has lapsed |
Ref document number: 7613531-8 |