SE468179B - Elektrokemisk maetelektrod och foerfarande foer framstaellning av maetelektroden - Google Patents
Elektrokemisk maetelektrod och foerfarande foer framstaellning av maetelektrodenInfo
- Publication number
- SE468179B SE468179B SE9001663A SE9001663A SE468179B SE 468179 B SE468179 B SE 468179B SE 9001663 A SE9001663 A SE 9001663A SE 9001663 A SE9001663 A SE 9001663A SE 468179 B SE468179 B SE 468179B
- Authority
- SE
- Sweden
- Prior art keywords
- layer
- measuring electrode
- electrically conductive
- insulating material
- slot
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 title claims description 10
- 239000011810 insulating material Substances 0.000 claims abstract description 22
- 239000004020 conductor Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 8
- 239000012777 electrically insulating material Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 4
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920001721 polyimide Polymers 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- 239000012808 vapor phase Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 239000010410 layer Substances 0.000 description 32
- 239000007788 liquid Substances 0.000 description 13
- 238000004377 microelectronic Methods 0.000 description 8
- 239000000523 sample Substances 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000013019 agitation Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000012488 sample solution Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004832 voltammetry Methods 0.000 description 2
- DKNPRRRKHAEUMW-UHFFFAOYSA-N Iodine aqueous Chemical compound [K+].I[I-]I DKNPRRRKHAEUMW-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000000970 chrono-amperometry Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000840 electrochemical analysis Methods 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Hybrid Cells (AREA)
- Inert Electrodes (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9001663A SE468179B (sv) | 1990-05-09 | 1990-05-09 | Elektrokemisk maetelektrod och foerfarande foer framstaellning av maetelektroden |
| EP91909607A EP0527888B1 (de) | 1990-05-09 | 1991-04-30 | Elektrochemische messelektrode |
| DE69118527T DE69118527D1 (de) | 1990-05-09 | 1991-04-30 | Elektrochemische messelektrode |
| JP91508978A JPH05506934A (ja) | 1990-05-09 | 1991-04-30 | 電気化学測定電極 |
| AT91909607T ATE136366T1 (de) | 1990-05-09 | 1991-04-30 | Elektrochemische messelektrode |
| PCT/SE1991/000310 WO1991017431A1 (en) | 1990-05-09 | 1991-04-30 | Electrochemical measuring electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9001663A SE468179B (sv) | 1990-05-09 | 1990-05-09 | Elektrokemisk maetelektrod och foerfarande foer framstaellning av maetelektroden |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| SE9001663D0 SE9001663D0 (sv) | 1990-05-09 |
| SE9001663L SE9001663L (sv) | 1991-11-10 |
| SE468179B true SE468179B (sv) | 1992-11-16 |
Family
ID=20379423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE9001663A SE468179B (sv) | 1990-05-09 | 1990-05-09 | Elektrokemisk maetelektrod och foerfarande foer framstaellning av maetelektroden |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP0527888B1 (de) |
| JP (1) | JPH05506934A (de) |
| AT (1) | ATE136366T1 (de) |
| DE (1) | DE69118527D1 (de) |
| SE (1) | SE468179B (de) |
| WO (1) | WO1991017431A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006030224A1 (de) * | 2006-06-30 | 2008-01-03 | Imi Intelligent Medical Implants Ag | Vorrichtung und Verfahren zum Überprüfen der Dichtigkeit von Feuchtigkeitsbarrieren für Implantate |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4401548A (en) * | 1981-02-12 | 1983-08-30 | Corning Glass Works | Reference electrode with internal diffusion barrier |
| EP0266432B1 (de) * | 1986-04-22 | 1992-01-15 | Toray Industries, Inc. | Mikroelektrode für elektrochemische analyse |
-
1990
- 1990-05-09 SE SE9001663A patent/SE468179B/sv unknown
-
1991
- 1991-04-30 DE DE69118527T patent/DE69118527D1/de not_active Expired - Lifetime
- 1991-04-30 AT AT91909607T patent/ATE136366T1/de not_active IP Right Cessation
- 1991-04-30 WO PCT/SE1991/000310 patent/WO1991017431A1/en not_active Ceased
- 1991-04-30 JP JP91508978A patent/JPH05506934A/ja active Pending
- 1991-04-30 EP EP91909607A patent/EP0527888B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05506934A (ja) | 1993-10-07 |
| SE9001663L (sv) | 1991-11-10 |
| EP0527888B1 (de) | 1996-04-03 |
| DE69118527D1 (de) | 1996-05-09 |
| WO1991017431A1 (en) | 1991-11-14 |
| SE9001663D0 (sv) | 1990-05-09 |
| EP0527888A1 (de) | 1993-02-24 |
| ATE136366T1 (de) | 1996-04-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NAL | Patent in force |
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