SE0601048L - Reducering av skräp vid röntgenkällor baserade på elektronbombardemang - Google Patents

Reducering av skräp vid röntgenkällor baserade på elektronbombardemang

Info

Publication number
SE0601048L
SE0601048L SE0601048A SE0601048A SE0601048L SE 0601048 L SE0601048 L SE 0601048L SE 0601048 A SE0601048 A SE 0601048A SE 0601048 A SE0601048 A SE 0601048A SE 0601048 L SE0601048 L SE 0601048L
Authority
SE
Sweden
Prior art keywords
target jet
debris
reduction
electron beam
ray sources
Prior art date
Application number
SE0601048A
Other languages
English (en)
Swedish (sv)
Other versions
SE530094C2 (sv
Inventor
Hans M Hertz
Mikael Otendal
Tomi Tuohimaa
Original Assignee
Jettec Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jettec Ab filed Critical Jettec Ab
Priority to SE0601048A priority Critical patent/SE530094C2/sv
Priority to PCT/SE2007/000448 priority patent/WO2007133144A1/en
Priority to US12/227,230 priority patent/US8170179B2/en
Priority to EP07748112.5A priority patent/EP2016608B1/en
Priority to CN2007800263170A priority patent/CN101490790B/zh
Priority to KR1020087030022A priority patent/KR101380847B1/ko
Priority to JP2009509487A priority patent/JP5220728B2/ja
Publication of SE0601048L publication Critical patent/SE0601048L/xx
Publication of SE530094C2 publication Critical patent/SE530094C2/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/009—Auxiliary arrangements not involved in the plasma generation
    • H05G2/0094—Reduction, prevention or protection from contamination; Cleaning
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
    • G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
SE0601048A 2006-05-11 2006-05-11 Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans SE530094C2 (sv)

Priority Applications (7)

Application Number Priority Date Filing Date Title
SE0601048A SE530094C2 (sv) 2006-05-11 2006-05-11 Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans
PCT/SE2007/000448 WO2007133144A1 (en) 2006-05-11 2007-05-08 Debris reduction in electron-impact x-ray sources
US12/227,230 US8170179B2 (en) 2006-05-11 2007-05-08 Debris reduction in electron-impact X-ray sources
EP07748112.5A EP2016608B1 (en) 2006-05-11 2007-05-08 Method and system of debris reduction in electron-impact x-ray sources
CN2007800263170A CN101490790B (zh) 2006-05-11 2007-05-08 用于产生x射线辐射的方法和系统
KR1020087030022A KR101380847B1 (ko) 2006-05-11 2007-05-08 전자 충돌 ｘ선 소스에서 ｘ선 복사를 발생시키는 방법 및 시스템
JP2009509487A JP5220728B2 (ja) 2006-05-11 2007-05-08 電子衝突ｘ線源のデブリ低減

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0601048A SE530094C2 (sv) 2006-05-11 2006-05-11 Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans

Publications (2)

Publication Number Publication Date
SE0601048L true SE0601048L (sv) 2007-11-12
SE530094C2 SE530094C2 (sv) 2008-02-26

Family

ID=38694151

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0601048A SE530094C2 (sv) 2006-05-11 2006-05-11 Metod för alstring av röntgenstrålning genom elektronbestrålning av en flytande substans

Country Status (7)

Country Link
US (1) US8170179B2 (xx)
EP (1) EP2016608B1 (xx)
JP (1) JP5220728B2 (xx)
KR (1) KR101380847B1 (xx)
CN (1) CN101490790B (xx)
SE (1) SE530094C2 (xx)
WO (1) WO2007133144A1 (xx)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102293061B (zh) * 2009-01-26 2014-05-07 伊克斯拉姆公司 X-射线窗口
CN104022004B (zh) * 2009-01-26 2016-09-21 伊克斯拉姆公司 X-射线窗口
EP2656369B8 (en) 2010-12-22 2016-09-21 Excillum AB Aligning and focusing an electron beam in an x-ray source
US20140161233A1 (en) * 2012-12-06 2014-06-12 Bruker Axs Gmbh X-ray apparatus with deflectable electron beam
EP2956954B1 (en) * 2013-02-13 2017-03-15 Koninklijke Philips N.V. Multiple x-ray beam tube
JP2015025759A (ja) * 2013-07-26 2015-02-05 Hoya株式会社 基板検査方法、基板製造方法および基板検査装置
JP5889968B2 (ja) * 2014-07-11 2016-03-22 エクシルム・エービーＥｘｃｉｌｌｕｍ ＡＢ Ｘ線窓
JP2017522697A (ja) 2014-07-17 2017-08-10 シーメンス アクチエンゲゼルシヤフトＳｉｅｍｅｎｓ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ Ｘ線管用の流体インジェクタおよび液体金属噴射により液体陽極を提供する方法
CN106455285A (zh) * 2016-11-14 2017-02-22 上海联影医疗科技有限公司 一种靶组件以及具有该靶组件的加速器
RU2706713C1 (ru) * 2019-04-26 2019-11-20 Общество С Ограниченной Ответственностью "Эуф Лабс" Источник коротковолнового излучения высокой яркости
EP3525556A1 (en) * 2018-02-09 2019-08-14 Excillum AB A method for protecting an x-ray source, and an x-ray source
US10910188B2 (en) 2018-07-25 2021-02-02 Varian Medical Systems, Inc. Radiation anode target systems and methods
KR102895880B1 (ko) * 2021-09-10 2025-12-03 경희대학교 산학협력단 전자빔 및 액적 기반 극자외선 광원 장치

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL88347C (xx) * 1951-08-18
US4953191A (en) * 1989-07-24 1990-08-28 The United States Of America As Represented By The United States Department Of Energy High intensity x-ray source using liquid gallium target
US5052034A (en) * 1989-10-30 1991-09-24 Siemens Aktiengesellschaft X-ray generator
JP3602356B2 (ja) * 1998-12-02 2004-12-15 三菱電機株式会社 電磁波発生装置
DE19905802A1 (de) * 1999-02-12 2000-08-17 Philips Corp Intellectual Pty Röntgenröhre
JP2003518252A (ja) * 1999-12-20 2003-06-03 エフ イー アイ エレクトロン オプティクス ビー ヴィ 軟ｘ線のｘ線源を有するｘ線顕微鏡
EP1305984B1 (en) * 2000-07-28 2010-11-24 Jettec AB Method and apparatus for generating x-ray radiation
US6711233B2 (en) * 2000-07-28 2004-03-23 Jettec Ab Method and apparatus for generating X-ray or EUV radiation
US6760406B2 (en) * 2000-10-13 2004-07-06 Jettec Ab Method and apparatus for generating X-ray or EUV radiation
DE10050811A1 (de) * 2000-10-13 2002-04-18 Philips Corp Intellectual Pty Elektronenstrahltransparentes Fenster
DE10062928A1 (de) 2000-12-16 2002-06-20 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
WO2003077277A1 (en) * 2002-03-08 2003-09-18 Koninklijke Philips Electronics N.V. A device for generating x-rays having a liquid metal anode
CN100366129C (zh) * 2002-05-13 2008-01-30 杰特克公司 用于产生辐射的方法和装置
SE523503C2 (sv) * 2002-07-23 2004-04-27 Jettec Ab Kapillärrör
JP2004213993A (ja) * 2002-12-27 2004-07-29 Toyota Macs Inc 軟ｘ線光源装置
DE10306668B4 (de) * 2003-02-13 2009-12-10 Xtreme Technologies Gmbh Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas
DE10326279A1 (de) * 2003-06-11 2005-01-05 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Plasma-basierte Erzeugung von Röntgenstrahlung mit einem schichtförmigen Targetmaterial
DE102004005241B4 (de) * 2004-01-30 2006-03-02 Xtreme Technologies Gmbh Verfahren und Einrichtung zur plasmabasierten Erzeugung weicher Röntgenstrahlung
DE102004015590B4 (de) * 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul

Also Published As

Publication number Publication date
JP5220728B2 (ja) 2013-06-26
KR20090024143A (ko) 2009-03-06
US20090141864A1 (en) 2009-06-04
CN101490790A (zh) 2009-07-22
US8170179B2 (en) 2012-05-01
EP2016608A4 (en) 2014-06-18
JP2009537062A (ja) 2009-10-22
WO2007133144A1 (en) 2007-11-22
KR101380847B1 (ko) 2014-04-04
EP2016608A1 (en) 2009-01-21
EP2016608B1 (en) 2016-08-17
CN101490790B (zh) 2012-05-09
SE530094C2 (sv) 2008-02-26

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