SE0300375D0 - Piezoelectric resonator - Google Patents

Piezoelectric resonator

Info

Publication number
SE0300375D0
SE0300375D0 SE0300375A SE0300375A SE0300375D0 SE 0300375 D0 SE0300375 D0 SE 0300375D0 SE 0300375 A SE0300375 A SE 0300375A SE 0300375 A SE0300375 A SE 0300375A SE 0300375 D0 SE0300375 D0 SE 0300375D0
Authority
SE
Sweden
Prior art keywords
electrode
sensing chamber
resonator
piezoelectric resonator
analyte
Prior art date
Application number
SE0300375A
Other languages
English (en)
Swedish (sv)
Inventor
Teodor Aastrup
Jan Smith
Henrik Anderson
Original Assignee
Attana Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Attana Ab filed Critical Attana Ab
Priority to SE0300375A priority Critical patent/SE0300375D0/xx
Publication of SE0300375D0 publication Critical patent/SE0300375D0/xx
Priority to CN200480004174XA priority patent/CN1751234B/zh
Priority to US10/542,616 priority patent/US20060107733A1/en
Priority to PCT/SE2004/000175 priority patent/WO2004072622A1/fr
Priority to EP04710140.7A priority patent/EP1592958B1/fr
Priority to JP2006502797A priority patent/JP4977458B2/ja
Priority to JP2010129348A priority patent/JP5090500B2/ja
Priority to US13/329,894 priority patent/US9762204B2/en

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/13Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G01N11/16Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/036Analysing fluids by measuring frequency or resonance of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/222Constructional or flow details for analysing fluids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
    • G01N9/002Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02818Density, viscosity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0421Longitudinal waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0422Shear waves, transverse waves, horizontally polarised waves
SE0300375A 2003-02-12 2003-02-12 Piezoelectric resonator SE0300375D0 (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
SE0300375A SE0300375D0 (sv) 2003-02-12 2003-02-12 Piezoelectric resonator
CN200480004174XA CN1751234B (zh) 2003-02-12 2004-02-11 压电谐振器
US10/542,616 US20060107733A1 (en) 2003-02-12 2004-02-11 Piezoelectric resonator
PCT/SE2004/000175 WO2004072622A1 (fr) 2003-02-12 2004-02-11 Resonateur piezo-electrique
EP04710140.7A EP1592958B1 (fr) 2003-02-12 2004-02-11 Resonateur piezo-electrique
JP2006502797A JP4977458B2 (ja) 2003-02-12 2004-02-11 圧電共振器
JP2010129348A JP5090500B2 (ja) 2003-02-12 2010-06-04 圧電共振器
US13/329,894 US9762204B2 (en) 2003-02-12 2011-12-19 Piezoelectric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0300375A SE0300375D0 (sv) 2003-02-12 2003-02-12 Piezoelectric resonator

Publications (1)

Publication Number Publication Date
SE0300375D0 true SE0300375D0 (sv) 2003-02-12

Family

ID=20290382

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0300375A SE0300375D0 (sv) 2003-02-12 2003-02-12 Piezoelectric resonator

Country Status (6)

Country Link
US (2) US20060107733A1 (fr)
EP (1) EP1592958B1 (fr)
JP (2) JP4977458B2 (fr)
CN (1) CN1751234B (fr)
SE (1) SE0300375D0 (fr)
WO (1) WO2004072622A1 (fr)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7159463B2 (en) * 2001-06-20 2007-01-09 M.S. Tech Ltd. Sensitive and selective method and device for the detection of trace amounts of a substance
ITVR20040149A1 (it) * 2004-09-22 2004-12-22 Sanitaria Scaligera Spa Sistema di monitoraggio rapido del gruppo sanguigno e per la rivelazione di reazioni immunoematologiche
US7568377B2 (en) * 2005-07-28 2009-08-04 University Of South Florida High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection
DE102005043036B4 (de) * 2005-09-09 2011-03-24 Siemens Ag Vorrichtung zur Ermittlung der viskosen Eigenschaften einer Flüssigkeit
US20080169730A1 (en) * 2007-01-11 2008-07-17 Romi Mayder Inverted mesa quartz crystal time base reference for automatic test equipment
GB0708346D0 (en) * 2007-04-30 2007-06-06 Attana Ab Sensor
JP5040019B2 (ja) * 2007-06-15 2012-10-03 セイコーインスツル株式会社 マイクロリアクター及びマイクロリアクターシステム
AT504918B1 (de) * 2007-10-19 2008-09-15 Univ Linz Vorrichtung zum bestimmen der viskosität einer flüssigkeit
WO2009075665A2 (fr) * 2007-11-28 2009-06-18 Sierra Sensors Gmbh Montage de capteur côté sec pour assemblage de puce de capteur
US7802466B2 (en) * 2007-11-28 2010-09-28 Sierra Sensors Gmbh Oscillating sensor and fluid sample analysis using an oscillating sensor
GB0803257D0 (en) * 2008-02-22 2008-04-02 Univ Leeds Apparatus for inspection of a fliuid and method
JP2009281786A (ja) * 2008-05-20 2009-12-03 Nippon Dempa Kogyo Co Ltd 圧電センサ及び感知装置
ES2333088B2 (es) * 2009-06-23 2011-02-07 Universidad Politecnica De Valencia Metodo y dispositivo de nanogravimetria en medios fluidos basado en resonadores piezoelectricos.
DK2630479T3 (da) 2010-10-20 2020-07-20 Qorvo Us Inc Anordning og fremgangsmåde til måling af bindingskinetik og koncentration med en resonanssensor
US9105835B2 (en) * 2010-12-10 2015-08-11 Mitsubishi Electric Corporation Air-coupled ultrasonic sensor
JP5435243B2 (ja) * 2011-02-14 2014-03-05 セイコーエプソン株式会社 振動子及び電子機器
CN109520889B (zh) * 2012-01-16 2022-04-05 仪宝科技公司 用于测量流体物理性能的方法、装置、和系统
JP5404970B1 (ja) * 2012-03-26 2014-02-05 京セラ株式会社 圧電振動部品および携帯端末
CN104541148B (zh) * 2012-08-10 2018-06-05 富士通株式会社 Qcm传感器及其制造方法
WO2014123519A1 (fr) 2013-02-06 2014-08-14 Empire Technology Development Llc Dispositifs, systèmes et procédés de détection de substances odorantes
US9128010B2 (en) * 2013-03-14 2015-09-08 Ecolab Usa Inc. Device and methods of using a piezoelectric microbalance sensor
WO2014171927A1 (fr) * 2013-04-16 2014-10-23 Empire Technology Development Llc Films à structures graduelles
JP2014219338A (ja) * 2013-05-10 2014-11-20 京セラクリスタルデバイス株式会社 振動粘度計
US10352800B2 (en) 2016-06-03 2019-07-16 Mks Instruments, Inc. Micromachined bulk acoustic wave resonator pressure sensor
KR102628485B1 (ko) * 2016-06-28 2024-01-24 삼성디스플레이 주식회사 증착 모니터링을 위한 수정 진동자 센서
WO2018041327A1 (fr) * 2016-08-29 2018-03-08 Abb Schweiz Ag Robot industriel comprenant un dispositif de détection de fuite conçu pour détecter une fuite de lubrifiant provenant d'une unité d'engrenage
CN116248068B (zh) * 2022-09-28 2024-03-08 泰晶科技股份有限公司 一种超高频at切石英晶片及制造方法

Family Cites Families (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3260104A (en) * 1962-10-22 1966-07-12 Exxon Research Engineering Co Apparatus for fluid analysis
US3329004A (en) * 1963-09-23 1967-07-04 Exxon Research Engineering Co Coated piezoelectric analyzer
US3561253A (en) * 1969-03-26 1971-02-09 Thermo Systems Inc Apparatus and method of measurement of particulate mass
US3879992A (en) * 1970-05-12 1975-04-29 California Inst Of Techn Multiple crystal oscillator measuring apparatus
US3694677A (en) * 1971-03-03 1972-09-26 Us Army Vhf-uhf piezoelectric resonators
US3744296A (en) * 1971-05-07 1973-07-10 Exxon Research Engineering Co Coated piezoelectric analyzers
JPS5229908B2 (fr) * 1971-11-17 1977-08-04
US4242096A (en) * 1977-11-14 1980-12-30 Minnesota Mining And Manufacturing Company Immunoassay for antigens
FR2527865A1 (fr) * 1982-06-01 1983-12-02 Cepe Resonateur piezo-electrique a haute frequence et son procede de fabrication
US4562725A (en) * 1982-07-31 1986-01-07 Shimadzu Corporation Moisture sensor and a process for the production thereof
US4644804A (en) * 1984-07-17 1987-02-24 Franz Rittmeyer Ag Quartz resonating force and pressure transducer
WO1986006228A1 (fr) * 1985-04-11 1986-10-23 Toyo Communication Equipment Co., Ltd. Resonateur piezo-electrique de production de surtonalites
EP0215669A3 (fr) * 1985-09-17 1989-08-30 Seiko Instruments Inc. Diagnostique et procédé d'analyse de composés biochimiques, microbes et cellules
US4741200A (en) * 1986-07-11 1988-05-03 Ford Motor Company Method and apparatus for measuring viscosity in a liquid utilizing a piezoelectric sensor
US5501986A (en) * 1988-04-06 1996-03-26 E. I. Du Pont De Nemours And Company Piezoelectric specific binding assay with mass amplified reagents
JPH02118434A (ja) 1988-10-28 1990-05-02 Meidensha Corp 液体の汚染度測定器
JP2813996B2 (ja) * 1989-11-30 1998-10-22 セイコープレシジョン株式会社 3次オーバトーンatカット水晶振動子
JPH049742A (ja) 1990-04-27 1992-01-14 Sogo Yatsukou Kk 導電性雰囲気中で水晶発振子を正常に発振させる方法、該方法に用いられる支持体被覆水晶発振子および該支持体被覆水晶発振子を用いて導電性雰囲気中に含有される物質またはイオンを定量する方法
DE4013665A1 (de) 1990-04-27 1991-10-31 Fraunhofer Ges Forschung Sensor zum nachweisen eines stoffes in einer fluessigkeit
EP0484545B1 (fr) * 1990-05-25 1997-01-22 Toyo Communication Equipment Co. Ltd. Structure d'electrode et de sortie correspondante pour resonateur piezoelectrique a plaque mince
JPH04236336A (ja) 1991-01-17 1992-08-25 Koji Toda 水晶温度センサ
US5201215A (en) * 1991-10-17 1993-04-13 The United States Of America As Represented By The United States Department Of Energy Method for simultaneous measurement of mass loading and fluid property changes using a quartz crystal microbalance
JP3296854B2 (ja) * 1992-09-07 2002-07-02 昇 小山 遺伝子センサー
EP0587408A1 (fr) * 1992-09-07 1994-03-16 Terumo Kabushiki Kaisha Méthode de détermination d'ADN et senseur pour cela
US5455475A (en) * 1993-11-01 1995-10-03 Marquette University Piezoelectric resonant sensor using the acoustoelectric effect
US5705399A (en) * 1994-05-20 1998-01-06 The Cooper Union For Advancement Of Science And Art Sensor and method for detecting predetermined chemical species in solution
JPH0875629A (ja) * 1994-09-09 1996-03-22 Nippon Steel Corp 流体中吸着物量連続測定素子及び材料層コーティング方法
US5744902A (en) * 1995-05-16 1998-04-28 The United States Of America As Represented By The Secretary Of The Army Chemical and biological sensor based on microresonators
US5852229A (en) * 1996-05-29 1998-12-22 Kimberly-Clark Worldwide, Inc. Piezoelectric resonator chemical sensing device
JP3262007B2 (ja) * 1997-01-10 2002-03-04 株式会社村田製作所 エネルギー閉じ込め型厚みすべり共振子およびこの共振子を用いた電子部品
US5945774A (en) * 1997-03-28 1999-08-31 Industrial Technology Research Institute Open package for crystal oscillator chips
US6196059B1 (en) * 1997-08-11 2001-03-06 Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Piezoelectric resonator, process for the fabrication thereof including its use as a sensor element for the determination of the concentration of a substance contained in a liquid and/or for the determination of the physical properties of the liquid
AU737392B2 (en) * 1997-12-02 2001-08-16 Allan L Smith Mass and heat flow measurement sensor
JPH11168343A (ja) * 1997-12-04 1999-06-22 Murata Mfg Co Ltd 厚み縦圧電共振子
US6029500A (en) * 1998-05-19 2000-02-29 Advanced Technology Materials, Inc. Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
GB9823410D0 (en) * 1998-10-26 1998-12-23 Smithkline Beecham Plc Novel device
US6295861B1 (en) * 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
DE19914109C2 (de) * 1999-03-23 2001-10-11 Atotech Deutschland Gmbh Halterung für einen Schwingquarz
JP4020539B2 (ja) * 1999-06-29 2007-12-12 ジーイーヘルスケア バイオサイエンス株式会社 水晶発振子を用いた液滴中の溶質濃度測定方法
KR20010021135A (ko) * 1999-08-05 2001-03-15 사토 히로시 압전공진자 및 압전공진부
US6291931B1 (en) * 1999-11-23 2001-09-18 Tfr Technologies, Inc. Piezoelectric resonator with layered electrodes
AU2001283977B2 (en) * 2000-08-08 2005-03-10 Inverness Medical Switzerland Gmbh Quartz crystal microbalance
JP3357914B2 (ja) * 2000-08-30 2002-12-16 独立行政法人産業技術総合研究所 溶液中の低分子化合物の検出方法
SE0004547D0 (sv) * 2000-12-07 2000-12-07 Amersham Pharmacia Biotech Kk Chip quartz oscillator and sensor
JP2002246874A (ja) * 2001-02-13 2002-08-30 Seiko Epson Corp 高周波振動子及びその製造方法
DE10123040A1 (de) * 2001-05-11 2002-11-21 Bosch Gmbh Robert Sensor zur Messung der Viskosität einer Flüssigkeit
CA2357522A1 (fr) * 2001-09-20 2003-03-20 Michael Thompson Amelioration de la reponse d'un capteur d'ondes acoustiques par une modification de ses electrodes
GB0225353D0 (en) * 2002-10-31 2002-12-11 Amersham Biosciences Kk Chip-based resonator and liquid-phase sensor
WO2005001421A2 (fr) * 2003-06-05 2005-01-06 Oakland University Immunocapteur pièzoélectrique amélioré
US6990852B2 (en) * 2003-07-28 2006-01-31 Becton Dickinson & Company System and method for detecting particles
JP4222513B2 (ja) * 2003-08-19 2009-02-12 日本碍子株式会社 質量測定装置および方法
US7568377B2 (en) * 2005-07-28 2009-08-04 University Of South Florida High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection

Also Published As

Publication number Publication date
CN1751234A (zh) 2006-03-22
JP2010237218A (ja) 2010-10-21
WO2004072622A8 (fr) 2004-12-23
JP5090500B2 (ja) 2012-12-05
EP1592958B1 (fr) 2018-08-15
US20120090389A1 (en) 2012-04-19
US9762204B2 (en) 2017-09-12
US20060107733A1 (en) 2006-05-25
WO2004072622A1 (fr) 2004-08-26
JP2006517668A (ja) 2006-07-27
CN1751234B (zh) 2010-04-28
EP1592958A1 (fr) 2005-11-09
JP4977458B2 (ja) 2012-07-18

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