SE0002405L - Multi-beam pattern generator - Google Patents

Multi-beam pattern generator

Info

Publication number
SE0002405L
SE0002405L SE0002405A SE0002405A SE0002405L SE 0002405 L SE0002405 L SE 0002405L SE 0002405 A SE0002405 A SE 0002405A SE 0002405 A SE0002405 A SE 0002405A SE 0002405 L SE0002405 L SE 0002405L
Authority
SE
Sweden
Prior art keywords
optical path
substrate
beams
light source
carrier
Prior art date
Application number
SE0002405A
Other languages
English (en)
Other versions
SE0002405D0 (sv
SE518170C2 (sv
Inventor
Torbjoern Sandstroem
Original Assignee
Micronic Laser Systems Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronic Laser Systems Ab filed Critical Micronic Laser Systems Ab
Priority to SE0002405A priority Critical patent/SE518170C2/sv
Publication of SE0002405D0 publication Critical patent/SE0002405D0/sv
Priority to PCT/SE2001/001443 priority patent/WO2002001298A1/en
Priority to US10/275,623 priority patent/US6975443B2/en
Priority to JP2002506371A priority patent/JP2004502197A/ja
Priority to CNB018102700A priority patent/CN1221866C/zh
Priority to AU2001266499A priority patent/AU2001266499A1/en
Priority to KR1020027017016A priority patent/KR100794851B1/ko
Priority to DE10196379T priority patent/DE10196379B3/de
Publication of SE0002405L publication Critical patent/SE0002405L/sv
Publication of SE518170C2 publication Critical patent/SE518170C2/sv

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Microscoopes, Condenser (AREA)
SE0002405A 2000-06-27 2000-06-27 Flerstrålemönstergenerator och metod för skannande SE518170C2 (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
SE0002405A SE518170C2 (sv) 2000-06-27 2000-06-27 Flerstrålemönstergenerator och metod för skannande
PCT/SE2001/001443 WO2002001298A1 (en) 2000-06-27 2001-06-25 Multi-beam pattern generator
US10/275,623 US6975443B2 (en) 2000-06-27 2001-06-25 Multi-beam pattern generator
JP2002506371A JP2004502197A (ja) 2000-06-27 2001-06-25 マルチビームパターン生成装置
CNB018102700A CN1221866C (zh) 2000-06-27 2001-06-25 扫描图案生成器系统以及扫描方法
AU2001266499A AU2001266499A1 (en) 2000-06-27 2001-06-25 Multi-beam pattern generator
KR1020027017016A KR100794851B1 (ko) 2000-06-27 2001-06-25 다중빔 패턴 발생기
DE10196379T DE10196379B3 (de) 2000-06-27 2001-06-25 Mehrstrahl-Mustergenerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0002405A SE518170C2 (sv) 2000-06-27 2000-06-27 Flerstrålemönstergenerator och metod för skannande

Publications (3)

Publication Number Publication Date
SE0002405D0 SE0002405D0 (sv) 2000-06-27
SE0002405L true SE0002405L (sv) 2001-12-28
SE518170C2 SE518170C2 (sv) 2002-09-03

Family

ID=20280257

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0002405A SE518170C2 (sv) 2000-06-27 2000-06-27 Flerstrålemönstergenerator och metod för skannande

Country Status (8)

Country Link
US (1) US6975443B2 (sv)
JP (1) JP2004502197A (sv)
KR (1) KR100794851B1 (sv)
CN (1) CN1221866C (sv)
AU (1) AU2001266499A1 (sv)
DE (1) DE10196379B3 (sv)
SE (1) SE518170C2 (sv)
WO (1) WO2002001298A1 (sv)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7184184B2 (en) 2003-12-31 2007-02-27 Reliant Technologies, Inc. High speed, high efficiency optical pattern generator using rotating optical elements
US7196831B2 (en) 2003-12-31 2007-03-27 Reliant Technologies, Inc. Two-dimensional optical scan system using a counter-rotating disk scanner
KR101306184B1 (ko) 2007-09-04 2013-09-09 삼성전자주식회사 3차원 디스플레이 장치 및 3차원 영상 표시 방법
US8390781B2 (en) 2008-09-23 2013-03-05 Pinebrook Imaging Technology, Ltd. Optical imaging writer system
US8395752B2 (en) 2008-09-23 2013-03-12 Pinebrook Imaging Technology, Ltd. Optical imaging writer system
US8253923B1 (en) 2008-09-23 2012-08-28 Pinebrook Imaging Technology, Ltd. Optical imaging writer system
US8390786B2 (en) 2008-09-23 2013-03-05 Pinebrook Imaging Technology, Ltd. Optical imaging writer system
US8670106B2 (en) 2008-09-23 2014-03-11 Pinebrook Imaging, Inc. Optical imaging writer system
EP2202580B1 (en) * 2008-12-23 2011-06-22 Carl Zeiss SMT GmbH Illumination system of a microlithographic projection exposure apparatus
JP5689535B2 (ja) * 2010-12-08 2015-03-25 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置及びデバイス製造方法
US10725287B2 (en) 2013-06-11 2020-07-28 Nlight, Inc. Image rotation compensation for multiple beam material processing
CN105659164B (zh) * 2013-10-22 2019-04-30 应用材料公司 根据光刻胶厚度使用处理器改变写入射束的输送剂量的图案产生器及相关方法
US10569357B1 (en) 2014-08-01 2020-02-25 Nlight, Inc. Scanner drift compensation for laser material processing
US10406630B1 (en) 2014-11-20 2019-09-10 Nlight, Inc. Multi-beam laser processing with dispersion compensation

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5793907U (sv) * 1980-11-26 1982-06-09
JPS57102016A (en) * 1980-12-17 1982-06-24 Hitachi Ltd Pattern generator
US4861983A (en) * 1987-04-27 1989-08-29 Dainippon Screen Mfg. Co., Ltd. Optical system for flying-spot scanning system
JPH0315018A (ja) * 1989-01-13 1991-01-23 Dainippon Screen Mfg Co Ltd 画像走査記録装置のレーザ露光装置
DE69226511T2 (de) * 1992-03-05 1999-01-28 Micronic Laser Systems Ab Verfahren und Vorrichtung zur Belichtung von Substraten
JPH0992592A (ja) * 1995-09-22 1997-04-04 Canon Inc 走査露光装置及びそれを用いたデバイスの製造方法
JP3991166B2 (ja) * 1996-10-25 2007-10-17 株式会社ニコン 照明光学装置および該照明光学装置を備えた露光装置
JP3571935B2 (ja) * 1998-10-09 2004-09-29 キヤノン株式会社 投影露光装置及びそれを用いたデバイスの製造方法
SE514835C2 (sv) * 1999-01-21 2001-04-30 Micronic Laser Systems Ab System och metod för mikrolitografiskt skrivande
US6570840B1 (en) * 2000-04-26 2003-05-27 Optical Disc Corporation Figure of merit in optical recording structures

Also Published As

Publication number Publication date
CN1221866C (zh) 2005-10-05
SE0002405D0 (sv) 2000-06-27
US20030140806A1 (en) 2003-07-31
KR20030076235A (ko) 2003-09-26
US6975443B2 (en) 2005-12-13
SE518170C2 (sv) 2002-09-03
KR100794851B1 (ko) 2008-01-15
CN1432142A (zh) 2003-07-23
JP2004502197A (ja) 2004-01-22
WO2002001298A1 (en) 2002-01-03
AU2001266499A1 (en) 2002-01-08
DE10196379B3 (de) 2012-03-29
DE10196379T1 (de) 2003-05-22

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