RU2506570C1 - Способ и устройство для выполнения рентгеновского анализа образца - Google Patents

Способ и устройство для выполнения рентгеновского анализа образца Download PDF

Info

Publication number
RU2506570C1
RU2506570C1 RU2012129873/28A RU2012129873A RU2506570C1 RU 2506570 C1 RU2506570 C1 RU 2506570C1 RU 2012129873/28 A RU2012129873/28 A RU 2012129873/28A RU 2012129873 A RU2012129873 A RU 2012129873A RU 2506570 C1 RU2506570 C1 RU 2506570C1
Authority
RU
Russia
Prior art keywords
sample
ray
rays
xrd
xrf
Prior art date
Application number
RU2012129873/28A
Other languages
English (en)
Russian (ru)
Inventor
Рависекхар ЙЕЛЛЕПЕДДИ
Пьер-Ив НЕГРО
Original Assignee
Термо Фишер Сайентифик (Экубленс) Сарл
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Термо Фишер Сайентифик (Экубленс) Сарл filed Critical Термо Фишер Сайентифик (Экубленс) Сарл
Application granted granted Critical
Publication of RU2506570C1 publication Critical patent/RU2506570C1/ru

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/071—Investigating materials by wave or particle radiation secondary emission combination of measurements, at least 1 secondary emission
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
RU2012129873/28A 2009-12-17 2010-12-13 Способ и устройство для выполнения рентгеновского анализа образца RU2506570C1 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0921965.0A GB2476255B (en) 2009-12-17 2009-12-17 Method and apparatus for performing x-ray analysis of a sample
GB0921965.0 2009-12-17
PCT/EP2010/069540 WO2011073148A1 (en) 2009-12-17 2010-12-13 Method and apparatus for performing x-ray analysis of a sample

Publications (1)

Publication Number Publication Date
RU2506570C1 true RU2506570C1 (ru) 2014-02-10

Family

ID=41717033

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2012129873/28A RU2506570C1 (ru) 2009-12-17 2010-12-13 Способ и устройство для выполнения рентгеновского анализа образца

Country Status (9)

Country Link
US (1) US9031187B2 (enExample)
EP (1) EP2513641B1 (enExample)
JP (1) JP5855573B2 (enExample)
CN (1) CN102770753B (enExample)
GB (1) GB2476255B (enExample)
IN (1) IN2012DN05107A (enExample)
RU (1) RU2506570C1 (enExample)
WO (1) WO2011073148A1 (enExample)
ZA (1) ZA201204142B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU232863U1 (ru) * 2024-12-25 2025-03-24 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") Стенд для исследования тонкой структуры металлических материалов при термоциклических испытаниях

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102608144A (zh) * 2012-03-28 2012-07-25 苏州科技学院 一种测量金属微结构残余应力三维分布的装置及其方法
CN103076352B (zh) * 2012-12-28 2015-02-25 中国科学院高能物理研究所 一种获得高品质薄膜样品x射线吸收谱的方法
EP2762862B1 (en) * 2013-01-30 2017-03-08 Bruker AXS GmbH XRF measurement apparatus for detecting contaminations on the bevel of a wafer
US9613728B2 (en) * 2013-03-15 2017-04-04 Proto Manufacturing Ltd. X-ray diffraction apparatus and method
FI125488B (en) * 2014-06-09 2015-10-30 Fenno Aurum Oy Wavelength crystal dispersion spectrometer, X-ray fluorescence device and method for this
DE102014219601B4 (de) 2014-08-13 2023-06-29 Bruker Nano Gmbh Verfahren zum Scannen einer Probe mittels einer Röntgenoptik und eine Apparatur zum Scannen einer Probe
US9746432B2 (en) 2014-09-23 2017-08-29 Olympus Scientific Solutions Americas Inc. Spacer accessory for XRF handheld analyzers
US9784699B2 (en) * 2015-03-03 2017-10-10 Panalytical B.V. Quantitative X-ray analysis—matrix thickness correction
WO2016193968A1 (en) * 2015-06-01 2016-12-08 Xwinsys Ltd. Metrology inspection apparatus
CN105092618A (zh) * 2015-09-18 2015-11-25 北京师范大学 一种微束能量色散的x射线衍射仪及其使用方法
CN105651801B (zh) * 2015-12-30 2018-10-16 北京矿冶研究总院 一种矿浆矿物在线分析方法
CN105891246B (zh) * 2016-06-23 2018-11-16 北京至一恒盛技术服务有限公司 一种x射线荧光探测装置
WO2018051353A1 (en) * 2016-09-19 2018-03-22 Soreq Nuclear Research Center X-ray fluorescence system and method for identifying samples
CN107228871B (zh) * 2017-07-21 2023-07-04 中国地质大学(武汉) 一种便携式x射线分析装置
IT201700100060A1 (it) * 2017-09-06 2019-03-06 De Tec Tor S R L Apparato di selezione di prodotti in base alla loro composizione tramite spettroscopia a fluorescenza a raggi x e relativo procedimento di selezione
EP3553507A1 (en) * 2018-04-13 2019-10-16 Malvern Panalytical B.V. X-ray analysis apparatus
CN112313505B (zh) * 2018-04-20 2025-01-03 美卓奥图泰芬兰有限公司 X射线荧光分析仪和用于执行x射线荧光分析的方法
AU2019254727B2 (en) * 2018-04-20 2022-03-03 Metso Finland Oy X-ray fluorescence analyzer system and a method for performing X-ray fluorescence analysis of an element of interest in slurry
MX2020011022A (es) 2018-04-20 2021-01-29 Outotec Finland Oy Analizador de fluorescencia de rayos x y un método para realizar el análisis de fluorescencia de rayos x.
SE544472C2 (en) * 2018-04-20 2022-06-14 Outotec Finland Oy X-ray fluorescence analyzer with a plurality of measurement channels, and a method for performing x-ray fluorescence analysis
JP6871629B2 (ja) * 2018-06-29 2021-05-12 株式会社リガク X線分析装置及びその光軸調整方法
IL279576B2 (en) * 2018-07-04 2024-09-01 Rigaku Denki Co Ltd Luminescent X-Ray Analysis Device
KR102986678B1 (ko) * 2020-03-04 2026-07-06 주식회사 엘지화학 전지의 xrd 측정용 챔버 장치
JP7380421B2 (ja) * 2020-05-27 2023-11-15 株式会社島津製作所 X線分析装置およびx線分析方法
EP4019951A1 (en) * 2020-12-24 2022-06-29 Inel S.A.S Apparatuses and methods for combined simultaneous analyses of materials
GB202106959D0 (en) * 2021-05-14 2021-06-30 Malvern Panalytical Bv Apparatus and method for x-ray fluorescence analysis
EP4201328A1 (en) 2021-12-21 2023-06-28 Universität Hamburg X-ray irradiation apparatus, including a spectrally shaping x-ray optic and a spectral filter aperture device, for x-ray imaging
CN119173759A (zh) * 2022-05-02 2024-12-20 斯格瑞公司 X射线顺序阵列波长色散光谱仪
CN114705708B (zh) * 2022-06-07 2022-08-23 四川大学 一种样品表面成分智能分析方法及系统
CN114720496B (zh) * 2022-06-08 2022-08-26 四川大学 实现全场x射线荧光成像分析的衍射分析装置及方法
CN117129501B (zh) * 2023-08-17 2026-06-19 中国科学院高能物理研究所 一种具有样品纵向深度分辨的xrd检测方法
CN116879335B (zh) * 2023-09-08 2023-11-17 四川大学 一种组合扫描式xrd/xrf综合成像方法
WO2025174816A1 (en) * 2024-02-12 2025-08-21 Kub Technologies, Inc. Dba Kubtec System and method for cabinet radiography utilizing x-ray fluorescence
WO2026107363A1 (en) * 2024-11-14 2026-05-21 Veracio Ltd. Assemblies, systems, and methods for analyzing material samples

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4263510A (en) * 1979-07-30 1981-04-21 General Electric Company Combined x-ray diffraction and fluorescence spectroscopy apparatus with environmentally controllable chamber
US5406608A (en) * 1992-11-11 1995-04-11 Fisons Plc X-ray analysis apparatus
US5745543A (en) * 1995-10-03 1998-04-28 U.S. Philips Corporation Apparatus for simultaneous X-ray diffraction and X-ray fluorescence measurements
RU2255328C1 (ru) * 2004-06-10 2005-06-27 Южно-Уральский государственный университет Способ определения концентрации фазы в веществе сложного химического состава
WO2006047267A2 (en) * 2004-10-21 2006-05-04 X-Ray Optical Systems, Inc. Apparatus and method for suppressing insignificant variations in measured sample composition data, including data measured from dynamically changing samples using x-ray analysis techniques
RU2362149C1 (ru) * 2008-01-09 2009-07-20 Государственное образовательное учреждение высшего профессионального образования "Южно-Уральский государственный университет" Способ определения концентраций элемента и фазы, включающей данный элемент, в веществе сложного химического состава

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3344274A (en) 1967-09-26 Ray analysis apparatus having both diffraction amd spectrometer tubes mounted on a common housing
EP0183043B1 (de) 1984-10-22 1989-09-27 Siemens Aktiengesellschaft Einrichtung zur Röntgenanalyse
US4796284A (en) * 1984-12-31 1989-01-03 North American Philips Corporation Polycrystalline X-ray spectrometer
JP2742415B2 (ja) * 1987-11-27 1998-04-22 株式会社日立製作所 X線分析装置
JP2921597B2 (ja) 1990-11-17 1999-07-19 株式会社リコー 全反射スペクトル測定装置
JPH11502312A (ja) * 1996-01-12 1999-02-23 フィリップス エレクトロニクス エヌ ベー 回転可能な一次コリメータを含むx線分析装置
JP3593412B2 (ja) 1996-03-26 2004-11-24 株式会社リガク X線分析装置および蛍光x線分析用アタッチメント
JPH09318565A (ja) 1996-05-24 1997-12-12 Rigaku Ind Co X線分析方法および装置
JP2000009666A (ja) * 1998-06-24 2000-01-14 Rigaku Industrial Co X線分析装置
JP3367478B2 (ja) * 1999-07-29 2003-01-14 株式会社島津製作所 蛍光x線分析装置
JP4777539B2 (ja) 2001-05-29 2011-09-21 エスアイアイ・ナノテクノロジー株式会社 複合x線分析装置
JP2003098126A (ja) * 2001-09-26 2003-04-03 Rigaku Industrial Co 蛍光・回折共用x線分析装置
CN1270176C (zh) * 2002-12-02 2006-08-16 中国科学技术大学 对组合样品的结构和成分进行测量分析的方法及装置
JP3912606B2 (ja) 2004-10-26 2007-05-09 株式会社リガク X線薄膜検査装置と、プロダクトウエーハの薄膜検査装置およびその方法
JP2006213836A (ja) 2005-02-04 2006-08-17 Freudenberg-Nok General Partnership ペルオキシド硬化したフルオロカーボンエラストマー組成物
GB2447252B (en) * 2007-03-06 2012-03-14 Thermo Fisher Scientific Inc X-ray analysis instrument
GB2457646B (en) 2007-10-30 2010-03-03 Imagination Tech Ltd Method and apparatus for compressing and decompressing data
CN201335815Y (zh) * 2009-01-14 2009-10-28 布莱格科技(北京)有限公司 X射线衍射-荧光双谱仪

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4263510A (en) * 1979-07-30 1981-04-21 General Electric Company Combined x-ray diffraction and fluorescence spectroscopy apparatus with environmentally controllable chamber
US5406608A (en) * 1992-11-11 1995-04-11 Fisons Plc X-ray analysis apparatus
US5745543A (en) * 1995-10-03 1998-04-28 U.S. Philips Corporation Apparatus for simultaneous X-ray diffraction and X-ray fluorescence measurements
RU2255328C1 (ru) * 2004-06-10 2005-06-27 Южно-Уральский государственный университет Способ определения концентрации фазы в веществе сложного химического состава
WO2006047267A2 (en) * 2004-10-21 2006-05-04 X-Ray Optical Systems, Inc. Apparatus and method for suppressing insignificant variations in measured sample composition data, including data measured from dynamically changing samples using x-ray analysis techniques
RU2362149C1 (ru) * 2008-01-09 2009-07-20 Государственное образовательное учреждение высшего профессионального образования "Южно-Уральский государственный университет" Способ определения концентраций элемента и фазы, включающей данный элемент, в веществе сложного химического состава

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU232863U1 (ru) * 2024-12-25 2025-03-24 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") Стенд для исследования тонкой структуры металлических материалов при термоциклических испытаниях

Also Published As

Publication number Publication date
US20120294418A1 (en) 2012-11-22
US9031187B2 (en) 2015-05-12
CN102770753B (zh) 2016-09-14
EP2513641B1 (en) 2019-04-10
GB2476255A (en) 2011-06-22
GB2476255B (en) 2012-03-07
JP5855573B2 (ja) 2016-02-09
JP2013514527A (ja) 2013-04-25
CN102770753A (zh) 2012-11-07
WO2011073148A1 (en) 2011-06-23
ZA201204142B (en) 2013-02-27
EP2513641A1 (en) 2012-10-24
IN2012DN05107A (enExample) 2015-10-09
GB0921965D0 (en) 2010-02-03

Similar Documents

Publication Publication Date Title
US9031187B2 (en) Method and apparatus for performing X-ray analysis of a sample
US11105756B2 (en) X-ray diffraction and X-ray spectroscopy method and related apparatus
US11112371B2 (en) X-ray spectrometer
Kavčič et al. Design and performance of a versatile curved-crystal spectrometer for high-resolution spectroscopy in the tender x-ray range
US8548123B2 (en) Method and apparatus for using an area X-ray detector as a point detector in an X-ray diffractometer
US7123686B2 (en) Apparatus and method for X-ray analysis
US7852983B2 (en) X-ray diffractometer for mechanically correlated movement of the source, detector, and sample position
US11796492B2 (en) Apparatuses and methods for combined simultaneous analyses of materials
JP2008506127A (ja) 短波長x線回折測定装置及びその方法
US20240044821A1 (en) Combined xrf analysis device
US12523621B2 (en) Parallel plate x-ray collimator having a variable acceptance angle and an x-ray analysis apparatus
EP0553911A1 (en) Position-sensitive X-ray analysis
JP2010286346A (ja) 分光器
US6546069B1 (en) Combined wave dispersive and energy dispersive spectrometer
JPH11502312A (ja) 回転可能な一次コリメータを含むx線分析装置
US12578289B2 (en) X-ray apparatus and method for analysing a sample
JP2006250642A (ja) X線回折分析方法およびx線回折分析装置
WO2006095468A1 (ja) X線回折分析装置およびx線回折分析方法
JPH06160312A (ja) X線評価装置
RU2216010C2 (ru) Многоканальный рентгеновский дифрактометр
JP2024099440A (ja) 蛍光x線分析装置
JP2000009666A (ja) X線分析装置
RU2166184C2 (ru) Рентгеновский рефлектометр
JPH09229881A (ja) X線回折装置
Turyanskiy et al. An energy dispersion scheme based on a semiconductor X-ray spectrometer and a broadband monochromator for determining the content of heavy elements from the absorption spectra