PT1799876E - Bloco terminal liso para transportar um alvo de pulverização rotativo - Google Patents
Bloco terminal liso para transportar um alvo de pulverização rotativo Download PDFInfo
- Publication number
- PT1799876E PT1799876E PT05857644T PT05857644T PT1799876E PT 1799876 E PT1799876 E PT 1799876E PT 05857644 T PT05857644 T PT 05857644T PT 05857644 T PT05857644 T PT 05857644T PT 1799876 E PT1799876 E PT 1799876E
- Authority
- PT
- Portugal
- Prior art keywords
- block
- coolant
- target
- carrying
- axial length
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Motor Or Generator Frames (AREA)
- Nozzles (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04105116 | 2004-10-18 | ||
EP05101905 | 2005-03-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
PT1799876E true PT1799876E (pt) | 2009-03-30 |
Family
ID=35809667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PT05857644T PT1799876E (pt) | 2004-10-18 | 2005-10-11 | Bloco terminal liso para transportar um alvo de pulverização rotativo |
Country Status (12)
Country | Link |
---|---|
US (1) | US8562799B2 (pt) |
EP (1) | EP1799876B1 (pt) |
JP (2) | JP5582681B2 (pt) |
KR (1) | KR101358820B1 (pt) |
AT (1) | ATE423225T1 (pt) |
DE (1) | DE602005012850D1 (pt) |
DK (1) | DK1799876T3 (pt) |
ES (1) | ES2320366T3 (pt) |
PL (1) | PL1799876T3 (pt) |
PT (1) | PT1799876E (pt) |
SI (1) | SI1799876T1 (pt) |
WO (1) | WO2006097152A1 (pt) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20070108907A (ko) * | 2005-03-11 | 2007-11-13 | 베카에르트 어드벤스드 코팅스 | 단일, 직각 엔드-블록 |
US20120031755A1 (en) * | 2006-11-24 | 2012-02-09 | Guo George X | Deposition system capable of processing multiple roll-fed substrates |
US20080127887A1 (en) * | 2006-12-01 | 2008-06-05 | Applied Materials, Inc. | Vertically mounted rotary cathodes in sputtering system on elevated rails |
DE102008033904B4 (de) * | 2008-07-18 | 2012-01-19 | Von Ardenne Anlagentechnik Gmbh | Antriebsendblock für eine Magnetronanordnung mit einem rotierenden Target |
US8182662B2 (en) * | 2009-03-27 | 2012-05-22 | Sputtering Components, Inc. | Rotary cathode for magnetron sputtering apparatus |
WO2010115189A1 (en) * | 2009-04-03 | 2010-10-07 | General Plasma, Inc. | Rotary magnetron |
JP5497572B2 (ja) * | 2009-08-18 | 2014-05-21 | キヤノンアネルバ株式会社 | スパッタリング装置及び真空処理装置 |
DE102009056241B4 (de) * | 2009-12-01 | 2012-07-12 | Von Ardenne Anlagentechnik Gmbh | Stützeinrichtung für eine Magnetronanordnung mit einem rotierenden Target |
KR101155906B1 (ko) | 2009-12-11 | 2012-06-20 | 삼성모바일디스플레이주식회사 | 스퍼터링 장치 |
EP2371992B1 (en) * | 2010-04-01 | 2013-06-05 | Applied Materials, Inc. | End-block and sputtering installation |
EP2387063B1 (en) * | 2010-05-11 | 2014-04-30 | Applied Materials, Inc. | Chamber for physical vapor deposition |
WO2013003458A1 (en) | 2011-06-27 | 2013-01-03 | Soleras Ltd. | Sputtering target |
BE1020564A5 (nl) * | 2013-04-04 | 2013-12-03 | Soleras Advanced Coatings Bvba | Spindel voor magnetron sputter inrichting. |
US9809876B2 (en) | 2014-01-13 | 2017-11-07 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique (C.R.V.C.) Sarl | Endblock for rotatable target with electrical connection between collector and rotor at pressure less than atmospheric pressure |
US10699885B2 (en) | 2014-08-29 | 2020-06-30 | Bühler AG | Dual power feed rotary sputtering cathode |
CN104640339A (zh) * | 2015-01-12 | 2015-05-20 | 广东韦达尔科技有限公司 | 一种等离子表面处理装置 |
BE1024754B9 (nl) * | 2016-11-29 | 2018-07-24 | Soleras Advanced Coatings Bvba | Een universeel monteerbaar eindblok |
JP2018131644A (ja) * | 2017-02-13 | 2018-08-23 | 株式会社アルバック | スパッタリング装置用の回転式カソードユニット |
CN113366605B (zh) * | 2019-02-05 | 2024-02-20 | 应用材料公司 | 沉积设备和用于监测沉积设备的方法 |
KR20210080770A (ko) | 2019-12-23 | 2021-07-01 | 주식회사 선익시스템 | 스퍼터용 회전형 타겟장치 및 상기 타겟장치를 구비한 스퍼터장치 |
JP7303393B2 (ja) * | 2020-09-16 | 2023-07-04 | 株式会社アルバック | 回転式カソードユニット用の駆動ブロック |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3878085A (en) | 1973-07-05 | 1975-04-15 | Sloan Technology Corp | Cathode sputtering apparatus |
US4422916A (en) | 1981-02-12 | 1983-12-27 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
US4356073A (en) | 1981-02-12 | 1982-10-26 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
US4443318A (en) | 1983-08-17 | 1984-04-17 | Shatterproof Glass Corporation | Cathodic sputtering apparatus |
US4445997A (en) | 1983-08-17 | 1984-05-01 | Shatterproof Glass Corporation | Rotatable sputtering apparatus |
US4519885A (en) * | 1983-12-27 | 1985-05-28 | Shatterproof Glass Corp. | Method and apparatus for changing sputtering targets in a magnetron sputtering system |
US4575102A (en) * | 1984-11-20 | 1986-03-11 | Ferrofluidics Corporation | Coaxial, multiple-shaft ferrofluid seal apparatus |
US4995958A (en) | 1989-05-22 | 1991-02-26 | Varian Associates, Inc. | Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile |
US5096562A (en) * | 1989-11-08 | 1992-03-17 | The Boc Group, Inc. | Rotating cylindrical magnetron structure for large area coating |
WO1992002659A1 (en) | 1990-08-10 | 1992-02-20 | Viratec Thin Films, Inc. | Shielding for arc suppression in rotating magnetron sputtering systems |
US5200049A (en) * | 1990-08-10 | 1993-04-06 | Viratec Thin Films, Inc. | Cantilever mount for rotating cylindrical magnetrons |
US5100527A (en) * | 1990-10-18 | 1992-03-31 | Viratec Thin Films, Inc. | Rotating magnetron incorporating a removable cathode |
US5620577A (en) | 1993-12-30 | 1997-04-15 | Viratec Thin Films, Inc. | Spring-loaded mount for a rotatable sputtering cathode |
US5445721A (en) * | 1994-08-25 | 1995-08-29 | The Boc Group, Inc. | Rotatable magnetron including a replacement target structure |
US5591314A (en) | 1995-10-27 | 1997-01-07 | Morgan; Steven V. | Apparatus for affixing a rotating cylindrical magnetron target to a spindle |
JP3810132B2 (ja) * | 1996-05-23 | 2006-08-16 | 株式会社ライク | スパッタリング装置 |
EP0918351A1 (en) | 1997-11-19 | 1999-05-26 | Sinvaco N.V. | Improved planar magnetron with moving magnet assembly |
EP0969238A1 (en) | 1998-06-29 | 2000-01-05 | Sinvaco N.V. | Vacuum tight coupling for tube sections |
US6365010B1 (en) * | 1998-11-06 | 2002-04-02 | Scivac | Sputtering apparatus and process for high rate coatings |
US6488824B1 (en) | 1998-11-06 | 2002-12-03 | Raycom Technologies, Inc. | Sputtering apparatus and process for high rate coatings |
US6263542B1 (en) * | 1999-06-22 | 2001-07-24 | Lam Research Corporation | Tolerance resistant and vacuum compliant door hinge with open-assist feature |
DE19958666C2 (de) | 1999-12-06 | 2003-10-30 | Heraeus Gmbh W C | Vorrichtung zur lösbaren Verbindung eines zylinderrohrförmigen Targetteiles mit einem Aufnahmeteil |
WO2002038826A1 (en) | 2000-11-09 | 2002-05-16 | Viratec Thin Films, Inc. | Alternating current rotatable sputter cathode |
US6375815B1 (en) | 2001-02-17 | 2002-04-23 | David Mark Lynn | Cylindrical magnetron target and apparatus for affixing the target to a rotatable spindle assembly |
US6736948B2 (en) * | 2002-01-18 | 2004-05-18 | Von Ardenne Anlagentechnik Gmbh | Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation |
US20030173217A1 (en) | 2002-03-14 | 2003-09-18 | Sputtering Components, Inc. | High-power ion sputtering magnetron |
DE10213049A1 (de) | 2002-03-22 | 2003-10-02 | Dieter Wurczinger | Drehbare Rohrkatode |
US20070007129A1 (en) | 2003-03-25 | 2007-01-11 | Wilmert De Bosscher | Universal vacuum coupling for cylindrical target |
KR20060111896A (ko) * | 2003-07-04 | 2006-10-30 | 베카에르트 어드벤스드 코팅스 | 회전 관형 스퍼터 타겟 조립체 |
KR20070108907A (ko) | 2005-03-11 | 2007-11-13 | 베카에르트 어드벤스드 코팅스 | 단일, 직각 엔드-블록 |
-
2005
- 2005-10-11 SI SI200530640T patent/SI1799876T1/sl unknown
- 2005-10-11 EP EP05857644A patent/EP1799876B1/en active Active
- 2005-10-11 US US11/665,562 patent/US8562799B2/en active Active
- 2005-10-11 AT AT05857644T patent/ATE423225T1/de not_active IP Right Cessation
- 2005-10-11 JP JP2007536159A patent/JP5582681B2/ja active Active
- 2005-10-11 PT PT05857644T patent/PT1799876E/pt unknown
- 2005-10-11 DK DK05857644T patent/DK1799876T3/da active
- 2005-10-11 PL PL05857644T patent/PL1799876T3/pl unknown
- 2005-10-11 KR KR1020077008375A patent/KR101358820B1/ko active IP Right Grant
- 2005-10-11 DE DE602005012850T patent/DE602005012850D1/de active Active
- 2005-10-11 ES ES05857644T patent/ES2320366T3/es active Active
- 2005-10-11 WO PCT/EP2005/055143 patent/WO2006097152A1/en active Application Filing
-
2014
- 2014-06-10 JP JP2014119516A patent/JP6034830B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US8562799B2 (en) | 2013-10-22 |
KR20070067139A (ko) | 2007-06-27 |
EP1799876A1 (en) | 2007-06-27 |
ATE423225T1 (de) | 2009-03-15 |
JP6034830B2 (ja) | 2016-11-30 |
DK1799876T3 (da) | 2009-04-20 |
US20080105543A1 (en) | 2008-05-08 |
JP2008517150A (ja) | 2008-05-22 |
DE602005012850D1 (de) | 2009-04-02 |
KR101358820B1 (ko) | 2014-02-10 |
ES2320366T3 (es) | 2009-05-21 |
JP5582681B2 (ja) | 2014-09-03 |
WO2006097152A1 (en) | 2006-09-21 |
SI1799876T1 (sl) | 2009-06-30 |
JP2014194086A (ja) | 2014-10-09 |
PL1799876T3 (pl) | 2009-07-31 |
EP1799876B1 (en) | 2009-02-18 |
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