PT1240659E - Disposição para a transferência de energia de micro-ondas para uma câmara de tratamento - Google Patents

Disposição para a transferência de energia de micro-ondas para uma câmara de tratamento Download PDF

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Publication number
PT1240659E
PT1240659E PT00990762T PT00990762T PT1240659E PT 1240659 E PT1240659 E PT 1240659E PT 00990762 T PT00990762 T PT 00990762T PT 00990762 T PT00990762 T PT 00990762T PT 1240659 E PT1240659 E PT 1240659E
Authority
PT
Portugal
Prior art keywords
arrangement
region
microwave energy
waveguide
gas
Prior art date
Application number
PT00990762T
Other languages
English (en)
Inventor
Rodney Moore
Wolf Essers
Original Assignee
Tetra Laval Holdings & Finance
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tetra Laval Holdings & Finance filed Critical Tetra Laval Holdings & Finance
Publication of PT1240659E publication Critical patent/PT1240659E/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/3222—Antennas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
PT00990762T 1999-12-24 2000-12-15 Disposição para a transferência de energia de micro-ondas para uma câmara de tratamento PT1240659E (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19963122A DE19963122A1 (de) 1999-12-24 1999-12-24 Anordnung zum Einkoppeln von Mikrowellenenergie in eine Behandlungskammer

Publications (1)

Publication Number Publication Date
PT1240659E true PT1240659E (pt) 2009-06-12

Family

ID=7934583

Family Applications (1)

Application Number Title Priority Date Filing Date
PT00990762T PT1240659E (pt) 1999-12-24 2000-12-15 Disposição para a transferência de energia de micro-ondas para uma câmara de tratamento

Country Status (10)

Country Link
US (1) US6952949B2 (pt)
EP (1) EP1240659B1 (pt)
JP (1) JP4831591B2 (pt)
AT (1) ATE431618T1 (pt)
AU (1) AU3012401A (pt)
DE (2) DE19963122A1 (pt)
ES (1) ES2323751T3 (pt)
PT (1) PT1240659E (pt)
TW (1) TW494603B (pt)
WO (1) WO2001048788A1 (pt)

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DE10224547B4 (de) * 2002-05-24 2020-06-25 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
US7926446B2 (en) * 2002-05-24 2011-04-19 Schott Ag Multi-place coating apparatus and process for plasma coating
DE10225609A1 (de) * 2002-06-07 2003-12-24 Sig Technology Ltd Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
FR2847912B1 (fr) * 2002-11-28 2005-02-18 Sidel Sa Procede et dispositif pour deposer par plasma micro-ondes un revetement sur une face d'un recipient en materiau thermoplastique
DE10260745A1 (de) * 2002-12-23 2004-07-01 Outokumpu Oyj Verfahren und Anlage zur thermischen Behandlung von körnigen Feststoffen
US20060137613A1 (en) * 2004-01-27 2006-06-29 Shigeru Kasai Plasma generating apparatus, plasma generating method and remote plasma processing apparatus
EP2495350B1 (en) * 2003-03-12 2014-06-18 Toyo Seikan Group Holdings, Ltd. Microwave plasma processing device with a plasma processing gas supply member
DE102004039468B4 (de) * 2004-08-14 2008-09-25 R3T Gmbh Rapid Reactive Radicals Technology Vorrichtung zur Erzeugung angeregter und/oder ionisierter Teilchen in einem Plasma
JP4747566B2 (ja) * 2004-12-01 2011-08-17 凸版印刷株式会社 プラズマ処理装置
US7545541B2 (en) * 2005-05-20 2009-06-09 Sharp Laboratories Of America, Inc. Systems and methods for embedding metadata in a color measurement target
JP4910403B2 (ja) * 2006-01-26 2012-04-04 凸版印刷株式会社 ２分岐導波管を有するプラズマ処理装置
JP4904840B2 (ja) * 2006-02-15 2012-03-28 凸版印刷株式会社 ３次元中空容器の薄膜成膜装置
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
DK2251454T3 (da) 2009-05-13 2014-10-13 Sio2 Medical Products Inc Coating og inspektion af beholder
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US20120326803A1 (en) 2011-06-24 2012-12-27 Amarante Technologies, Inc. Microwave resonant cavity
CN103930595A (zh) 2011-11-11 2014-07-16 Sio2医药产品公司 用于药物包装的钝化、pH保护性或润滑性涂层、涂布方法以及设备
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
EP2920567B1 (en) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
WO2014085348A2 (en) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
KR102211788B1 (ko) 2013-03-11 2021-02-04 에스아이오2 메디컬 프로덕츠, 인크. 코팅된 패키징
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
TWI553700B (zh) * 2013-11-06 2016-10-11 東京威力科創股份有限公司 多單元共振器微波表面波電漿設備
JP6302082B2 (ja) * 2014-03-03 2018-03-28 ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ Ａｌｄコーティングによるガスコンテナ内部の保護
EP3122917B1 (en) 2014-03-28 2020-05-06 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
KR20180048694A (ko) 2015-08-18 2018-05-10 에스아이오2 메디컬 프로덕츠, 인크. 산소 전달률이 낮은, 의약품 및 다른 제품의 포장용기
CN105396859B (zh) * 2015-11-27 2017-08-25 宁国市四方钢球模具设备有限公司 密炼机磁致除尘器
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CN112343780B (zh) * 2019-08-09 2021-08-13 哈尔滨工业大学 微波同轴谐振会切场推力器

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JPS6283464A (ja) * 1985-10-04 1987-04-16 Sumitomo Electric Ind Ltd 筒状部材内面被覆方法および装置
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DE19960333C2 (de) * 1999-12-15 2002-12-19 Tetra Laval Holdings & Finance Vorrichtung zum Herstellen eines Gasgemisches und deren Verwendung
DE10001936A1 (de) * 2000-01-19 2001-07-26 Tetra Laval Holdings & Finance Einkoppelanordnung für Mikrowellenenergie mit Impedanzanpassung
DE10124225B4 (de) * 2001-05-18 2006-03-02 Tetra Laval Holdings & Finance S.A. Verfahren und Vorrichtung zum Bestimmen der Permeation einer Barriereschicht

Also Published As

Publication number Publication date
AU3012401A (en) 2001-07-09
DE50015646D1 (de) 2009-06-25
US20030097986A1 (en) 2003-05-29
WO2001048788A1 (de) 2001-07-05
DE19963122A1 (de) 2001-06-28
JP2003518555A (ja) 2003-06-10
EP1240659B1 (de) 2009-05-13
ES2323751T3 (es) 2009-07-24
US6952949B2 (en) 2005-10-11
EP1240659A1 (de) 2002-09-18
ATE431618T1 (de) 2009-05-15
JP4831591B2 (ja) 2011-12-07
TW494603B (en) 2002-07-11

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