GB1326412A - Radio-frequency plasma generators - Google Patents

Radio-frequency plasma generators

Info

Publication number
GB1326412A
GB1326412A GB5267170A GB5267170A GB1326412A GB 1326412 A GB1326412 A GB 1326412A GB 5267170 A GB5267170 A GB 5267170A GB 5267170 A GB5267170 A GB 5267170A GB 1326412 A GB1326412 A GB 1326412A
Authority
GB
United Kingdom
Prior art keywords
radio
plasma
container
generator
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5267170A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1326412A publication Critical patent/GB1326412A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

1326412 High-frequency discharge apparatus G LISITANO 5 Nov 1970 [6 Nov 1969] 52671/70 Heading H1D A plasma generator comprises an outer container 14 for plasma, a radio-frequency generator 10, a transmission member 61 which is coupled to the radio-frequency generator and is disposed within the outer container so as to convey radio-frequency power to the plasma, the transmission member including a slotted substantially tubular hollow conductive body disposed such that radio-frequency power supplied to it from the generator is propagated, axially of the body, with a diminished velocity, and means 24 for producing a static magnetic field to confine the generated plasma to the said body. In the embodiment shown the inner conductor of a coaxialline 12 is connected to the member 16, and the outer conductor to container 14. A helical slot 18 in the member 16 may be either open or filled with dielectric material 25. The container 14 can be connected by flanges 22 to a system containing gas e.g. argon, at a pressure from 10<SP>-4</SP> torr. up to atmospheric. An axial magnetic field B is generated by coils 24. In alternative embodiments (Figs. 2, 3, not shown) the coaxial line 12 is connected either at a point nearer one end of the cylinder 16 or at a central point so that a shot extends in each direction from the point of connection. Further alternative embodiments (Figs. 4 and 5, not shown) include waveguide input arrangements.
GB5267170A 1969-11-06 1970-11-05 Radio-frequency plasma generators Expired GB1326412A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691955914 DE1955914A1 (en) 1969-11-06 1969-11-06 High frequency plasma generator

Publications (1)

Publication Number Publication Date
GB1326412A true GB1326412A (en) 1973-08-15

Family

ID=5750342

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5267170A Expired GB1326412A (en) 1969-11-06 1970-11-05 Radio-frequency plasma generators

Country Status (4)

Country Link
US (1) US3663858A (en)
BE (1) BE758571A (en)
DE (1) DE1955914A1 (en)
GB (1) GB1326412A (en)

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US3757518A (en) * 1970-11-03 1973-09-11 Messerschmitt Boelkow Blohm Ion engine
US3814983A (en) * 1972-02-07 1974-06-04 C Weissfloch Apparatus and method for plasma generation and material treatment with electromagnetic radiation
US3911318A (en) * 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
US4057462A (en) * 1975-02-26 1977-11-08 The United States Of America As Represented By The United States Energy Research And Development Administration Radio frequency sustained ion energy
US4584159A (en) * 1979-09-17 1986-04-22 Energy Profiles, Inc. Plasma wave damping system and method
US4390495A (en) * 1981-01-19 1983-06-28 Energy Profiles, Inc. Control of colliding ion beams
DE3711184A1 (en) * 1987-04-02 1988-10-20 Leybold Ag DEVICE FOR THE APPLICATION OF MICROWAVE ENERGY WITH AN OPEN MICROWAVE LEAD
US4792732A (en) * 1987-06-12 1988-12-20 United States Of America As Represented By The Secretary Of The Air Force Radio frequency plasma generator
JP2805009B2 (en) * 1988-05-11 1998-09-30 株式会社日立製作所 Plasma generator and plasma element analyzer
JPH02215038A (en) * 1989-02-15 1990-08-28 Hitachi Ltd Device for analyzing trace element using microwave plasma
EP0502269A1 (en) * 1991-03-06 1992-09-09 Hitachi, Ltd. Method of and system for microwave plasma treatments
WO1994006263A1 (en) * 1992-09-01 1994-03-17 The University Of North Carolina At Chapel Hill High pressure magnetically assisted inductively coupled plasma
DE4337119C2 (en) * 1993-10-29 1996-10-24 Forsch Applikationslabor Plasm VHF plasma source
US5668442A (en) * 1994-05-13 1997-09-16 Hughes Electronics Plasma-assisted tube with helical slow-wave structure
US5958266A (en) * 1997-10-24 1999-09-28 Fugo; Richard J. Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
WO1999021495A1 (en) * 1997-10-24 1999-05-06 Fugo Richard J Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
US6479785B1 (en) * 1998-07-09 2002-11-12 Richard J. Fugo Device for plasma incision of mater with a specifically tuned radiofrequencty electromagnetic field generator
KR20010012617A (en) * 1998-03-16 2001-02-26 마츠시타 덴끼 산교 가부시키가이샤 Electrodeless discharge energy supply apparatus and electrodeless discharge lamp device
US6787730B2 (en) 1998-07-09 2004-09-07 Damian Coccio Device for plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
DE19923018C2 (en) * 1999-05-19 2001-09-27 Univ Dresden Tech Device for processing band-shaped workpieces using resonant high-frequency plasmas
GB0312818D0 (en) * 2003-06-04 2003-07-09 Univ Cambridge Tech Acoustic sensor
US8088126B2 (en) * 2006-08-17 2012-01-03 Fugo Richard J Method and apparatus for plasma incision of cardiovascular tissue
KR20160072846A (en) 2008-05-02 2016-06-23 샤인 메디컬 테크놀로지스, 인크. Device and method for producing medical isotopes
KR20110020702A (en) * 2009-08-24 2011-03-03 한국기초과학지원연구원 Permanent magnet embeded lisitano antenna for large-area uniform plasma generation
WO2012003009A2 (en) 2010-01-28 2012-01-05 Shine Medical Technologies, Inc. Segmented reaction chamber for radioisotope production
DE102010001395B4 (en) 2010-01-29 2013-11-14 Forschungsverbund Berlin E.V. Miniaturizable plasma source
US10734126B2 (en) 2011-04-28 2020-08-04 SHINE Medical Technologies, LLC Methods of separating medical isotopes from uranium solutions
CA2869559C (en) 2012-04-05 2022-03-29 Shine Medical Technologies, Inc. Aqueous assembly and control method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2842712A (en) * 1953-03-06 1958-07-08 Philco Corp Electronic signal generator
US3171053A (en) * 1959-12-15 1965-02-23 Sperry Rand Corp Plasma-beam signal generator
NL265884A (en) * 1960-06-13
GB972457A (en) * 1962-08-10 1964-10-14 M O Valve Co Ltd Improvements in or relating to travelling wave tubes
US3378723A (en) * 1964-01-02 1968-04-16 Rca Corp Fast wave transmission line coupled to a plasma
US3363138A (en) * 1964-11-04 1968-01-09 Sperry Rand Corp Electron beam-plasma device operating at multiple harmonics of beam cyclotron frequency
US3388287A (en) * 1965-01-04 1968-06-11 Lockheed Aircraft Corp Tm01 mode rf pulse generator
DE1261608B (en) * 1965-12-22 1968-02-22 Inst Plasmaphysik G M B H High frequency plasma generator
US3432722A (en) * 1966-01-17 1969-03-11 Gen Electric Electromagnetic wave generating and translating apparatus

Also Published As

Publication number Publication date
DE1955914A1 (en) 1971-06-09
US3663858A (en) 1972-05-16
BE758571A (en) 1971-04-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees