AU2001230175A1 - Impedance adapted microwave energy coupling device - Google Patents

Impedance adapted microwave energy coupling device

Info

Publication number
AU2001230175A1
AU2001230175A1 AU2001230175A AU3017501A AU2001230175A1 AU 2001230175 A1 AU2001230175 A1 AU 2001230175A1 AU 2001230175 A AU2001230175 A AU 2001230175A AU 3017501 A AU3017501 A AU 3017501A AU 2001230175 A1 AU2001230175 A1 AU 2001230175A1
Authority
AU
Australia
Prior art keywords
microwave
coupling device
hollow
gas supply
supply tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001230175A
Inventor
Wolf Essers
Hanno Kass
Rodney Moore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tetra Laval Holdings and Finance SA
Original Assignee
Tetra Laval Holdings and Finance SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tetra Laval Holdings and Finance SA filed Critical Tetra Laval Holdings and Finance SA
Publication of AU2001230175A1 publication Critical patent/AU2001230175A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)

Abstract

A device for coupling microwave energy into a treatment chamber (3) which is arranged in a hollow body (2), whereby said treatment chamber is a plasma CVD coating chamber for coating the inner wall of a hollow body (2). The inventive device comprises a microwave source, a microwave coupling device (10) and a microwave conductor (1,9). A gas supply tube (13) can be inserted into said hollow body (2) in such a way that a process gas can be activated into a plasma state by the coupled microwave energy. In order to treat hollow bodies (2) of different shapes and sizes without the need for substantial re-fitting each time, the gas supply tube (13) which is provided with the electrically conductive material extends into the wave guide from a first side in the form of an inner conductor of a coaxial wave guide (1 in region b) and the microwave coupling device (10) is arranged on the second side opposite, and an additional, electroconductive hollow conductor insert (12) in the form of a substantially hollow sleeve is disposed in the coaxial waveguide, coaxially surrounding the gas supply tube (13) at a distance therefrom.
AU2001230175A 2000-01-19 2001-01-11 Impedance adapted microwave energy coupling device Abandoned AU2001230175A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10001936 2000-01-19
DE10001936A DE10001936A1 (en) 2000-01-19 2000-01-19 Microwave internal plasma-coating apparatus for bottles, has microwave coupling system at one end, opposite coaxial waveguide including gas supply tube
PCT/EP2001/000257 WO2001054164A1 (en) 2000-01-19 2001-01-11 Impedance adapted microwave energy coupling device

Publications (1)

Publication Number Publication Date
AU2001230175A1 true AU2001230175A1 (en) 2001-07-31

Family

ID=7627893

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001230175A Abandoned AU2001230175A1 (en) 2000-01-19 2001-01-11 Impedance adapted microwave energy coupling device

Country Status (9)

Country Link
US (1) US20030051666A1 (en)
EP (1) EP1252647B1 (en)
JP (1) JP2003534627A (en)
AT (1) ATE374433T1 (en)
AU (1) AU2001230175A1 (en)
DE (2) DE10001936A1 (en)
ES (1) ES2292556T3 (en)
PT (1) PT1252647E (en)
WO (1) WO2001054164A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963122A1 (en) * 1999-12-24 2001-06-28 Tetra Laval Holdings & Finance Plasma chemical vapor deposition assembly has a cylindrical structure with a waveguide system to couple the microwave energy with a gas feed to coat the interior of plastics containers of all shapes and sizes without modification
MXPA04011663A (en) * 2002-05-24 2005-07-05 Schott Ag Multistation coating device and method for plasma coating.
AU2003229285A1 (en) * 2002-05-24 2003-12-12 Sig Technology Ltd. Method and device for plasma treating workpieces
DE10260745A1 (en) * 2002-12-23 2004-07-01 Outokumpu Oyj Process and plant for the thermal treatment of granular solids
FR2904479B1 (en) * 2006-07-27 2008-09-19 Thales Sa DEVICE FOR GENERATING HYPERFREQUENCY RADIATION, AND METHOD FOR TESTING HIGH ENERGY RADIATION VULNERABILITY
DE102017121731A1 (en) * 2017-09-19 2019-03-21 Muegge Gmbh Apparatus for treating a product with microwaves
CN109712856B (en) * 2018-12-29 2020-04-21 电子科技大学 Electric vacuum energy transmission window structure

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2514033B1 (en) * 1981-10-02 1985-09-27 Henaff Louis PLASMA REACTIVE VAPOR VAPOR THIN FILM DEPOSITION SYSTEM
DE3632748A1 (en) * 1986-09-26 1988-04-07 Ver Foerderung Inst Kunststoff Method of coating hollow bodies
JPS64272A (en) * 1987-06-22 1989-01-05 Canon Inc Microwave plasma cvd device
DE4114108C1 (en) * 1991-04-30 1991-12-19 Schott Glaswerke, 6500 Mainz, De
DE4235914A1 (en) * 1992-10-23 1994-04-28 Juergen Prof Dr Engemann Device for generating microwave plasmas
DE4316349C2 (en) * 1993-05-15 1996-09-05 Ver Foerderung Inst Kunststoff Process for the internal coating of hollow bodies with organic cover layers by plasma polymerization, and device for carrying out the process
ATE179914T1 (en) * 1994-02-16 1999-05-15 Coca Cola Co HOLLOW CONTAINER HAVING INERT OR IMPERMEABLE INNER SURFACE BY PLASMA ASSISTED SURFACE REACTION OR IN SITU POLYMERIZATION
DE4437050A1 (en) * 1994-10-17 1996-04-18 Leybold Ag Device for treating surfaces of hollow bodies, in particular inner surfaces of fuel tanks
JP2000510910A (en) * 1996-05-22 2000-08-22 テトラ ラバル ホールディングス アンド ファイナンス エス アー Method and apparatus for treating the inner surface of a container
DE19629877C1 (en) * 1996-07-24 1997-03-27 Schott Glaswerke CVD for internal coating of hollow articles with barrier film
DE19722205A1 (en) * 1997-05-27 1998-12-03 Leybold Systems Gmbh Method and device for coating plastic or glass containers by means of a PCVD coating method
CA2304613A1 (en) * 1997-09-30 1999-04-08 Jacques Laurent Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
FR2776540B1 (en) * 1998-03-27 2000-06-02 Sidel Sa BARRIER-EFFECT CONTAINER AND METHOD AND APPARATUS FOR ITS MANUFACTURING

Also Published As

Publication number Publication date
DE10001936A1 (en) 2001-07-26
EP1252647A1 (en) 2002-10-30
ES2292556T3 (en) 2008-03-16
PT1252647E (en) 2007-12-11
DE50113057D1 (en) 2007-11-08
WO2001054164A1 (en) 2001-07-26
JP2003534627A (en) 2003-11-18
US20030051666A1 (en) 2003-03-20
ATE374433T1 (en) 2007-10-15
EP1252647B1 (en) 2007-09-26

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