NO932358L - Anordning og fremgangsmaate til maaling av tykkelse paa et tynt filmlag - Google Patents

Anordning og fremgangsmaate til maaling av tykkelse paa et tynt filmlag

Info

Publication number
NO932358L
NO932358L NO932358A NO932358A NO932358L NO 932358 L NO932358 L NO 932358L NO 932358 A NO932358 A NO 932358A NO 932358 A NO932358 A NO 932358A NO 932358 L NO932358 L NO 932358L
Authority
NO
Norway
Prior art keywords
thickness
radiation
properties
measuring
layer
Prior art date
Application number
NO932358A
Other languages
English (en)
Other versions
NO932358D0 (no
Inventor
Anthony M Ledger
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO932358D0 publication Critical patent/NO932358D0/no
Publication of NO932358L publication Critical patent/NO932358L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection

Abstract

Et apparat (1) til måling av tykkelsen på et lag (24) av et materiale med forside og bakside og som kan slippe gjennom stråling omfatter en anordning (10,12) til bestråling av forsiden av materiallaget (24) med polykromatisk stråling (20), der den polykromatlske stråling blir reflektert fra materiallagets forside og bakside med egenskaper som tilsvarer tykkelsen av materiallaget, en anordning (37) for filtrering av den reflekterte polykromatlske stråling (25) for dermed å frembringe monokromatlsk stråling med egenskaper som tilsvarer tykkelsen av materiallaget (24), anordning (30,34) til mottagning av den filtrerte monokromatiske stråling (35) og til påvisning av egenskapene samt anordning til sammenligning av de påviste egenskaper i den mottatte filtrerte monokromatiske stråling (35) med et sett referanseegenskaper som tilsvarer kjente tykkelser og til frembringelse av en utgang som tilsvarer tykkelsen på materiallaget (24). Bestrålings- anordningen (10,12) avgir synlig diffust lyst. Det er også beskrevet en fremgangsmåte til utførelse av tykkelsesmållnger på et lag av materiale.
NO932358A 1992-06-29 1993-06-28 Anordning og fremgangsmaate til maaling av tykkelse paa et tynt filmlag NO932358L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/906,079 US5291269A (en) 1991-12-06 1992-06-29 Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations

Publications (2)

Publication Number Publication Date
NO932358D0 NO932358D0 (no) 1993-06-28
NO932358L true NO932358L (no) 1993-12-30

Family

ID=25421897

Family Applications (1)

Application Number Title Priority Date Filing Date
NO932358A NO932358L (no) 1992-06-29 1993-06-28 Anordning og fremgangsmaate til maaling av tykkelse paa et tynt filmlag

Country Status (6)

Country Link
US (1) US5291269A (no)
EP (1) EP0577399B1 (no)
JP (1) JP2648440B2 (no)
DE (1) DE69316275T2 (no)
IL (1) IL106016A (no)
NO (1) NO932358L (no)

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US7095511B2 (en) * 2000-07-06 2006-08-22 Filmetrics, Inc. Method and apparatus for high-speed thickness mapping of patterned thin films
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Also Published As

Publication number Publication date
EP0577399B1 (en) 1998-01-14
DE69316275D1 (de) 1998-02-19
EP0577399A3 (en) 1995-05-10
DE69316275T2 (de) 1998-04-23
IL106016A (en) 1996-12-05
EP0577399A2 (en) 1994-01-05
JPH0666524A (ja) 1994-03-08
JP2648440B2 (ja) 1997-08-27
US5291269A (en) 1994-03-01
NO932358D0 (no) 1993-06-28
IL106016A0 (en) 1993-10-20

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