NO931912L - Anordning og fremgangsm}te til m}ling av tykkelsen p} et lag av materiale - Google Patents

Anordning og fremgangsm}te til m}ling av tykkelsen p} et lag av materiale

Info

Publication number
NO931912L
NO931912L NO931912A NO931912A NO931912L NO 931912 L NO931912 L NO 931912L NO 931912 A NO931912 A NO 931912A NO 931912 A NO931912 A NO 931912A NO 931912 L NO931912 L NO 931912L
Authority
NO
Norway
Prior art keywords
layer
thickness
material layer
measuring
deformed
Prior art date
Application number
NO931912A
Other languages
English (en)
Other versions
NO931912D0 (no
Inventor
Anthony M Ledger
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO931912D0 publication Critical patent/NO931912D0/no
Publication of NO931912L publication Critical patent/NO931912L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

Anordning til måling av tykkelsen av et materiallag med forside og bakside der laget slipper gjennom stråling, omfattende en innretning (70) til deformasjon av materiallaget til en reflekterende kondensator (24) slik at når forsiden av det deformerte materiallag belyses med monokromatisk lys, reflekteres dette fra forside og bakside av det deformerte lag (24) på en måte som tilsvarer materiallagets tykkelse. En innretning (30, 31) mottar den reflekterte monokro- matiske stråling og angir dens egenskaper som deretter sammenlignes med et sett referanseegenskaper svarende til kjente tykkelser slik at en utgang tilsvarer tykkelsen av det målte lag av materiale.
NO931912A 1992-05-29 1993-05-26 Anordning og fremgangsm}te til m}ling av tykkelsen p} et lag av materiale NO931912L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/891,344 US5293214A (en) 1991-12-06 1992-05-29 Apparatus and method for performing thin film layer thickness metrology by deforming a thin film layer into a reflective condenser

Publications (2)

Publication Number Publication Date
NO931912D0 NO931912D0 (no) 1993-05-26
NO931912L true NO931912L (no) 1993-11-30

Family

ID=25398026

Family Applications (1)

Application Number Title Priority Date Filing Date
NO931912A NO931912L (no) 1992-05-29 1993-05-26 Anordning og fremgangsm}te til m}ling av tykkelsen p} et lag av materiale

Country Status (6)

Country Link
US (1) US5293214A (no)
EP (1) EP0572144A3 (no)
JP (1) JPH0723843B2 (no)
IL (1) IL105612A (no)
NO (1) NO931912L (no)
TW (1) TW241335B (no)

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US5089041A (en) * 1990-03-22 1992-02-18 The O.M. Scott & Sons Company Encapsulated slow release fertilizers
US5291269A (en) * 1991-12-06 1994-03-01 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
IL109589A0 (en) * 1993-05-14 1994-08-26 Hughes Aircraft Co Apparatus and method for performing high spatial resolution thin film layer thickness metrology
US5452953A (en) * 1993-10-12 1995-09-26 Hughes Aircraft Company Film thickness measurement of structures containing a scattering surface
US5436725A (en) * 1993-10-12 1995-07-25 Hughes Aircraft Company Cofocal optical system for thickness measurements of patterned wafers
US5555472A (en) * 1993-12-22 1996-09-10 Integrated Process Equipment Corp. Method and apparatus for measuring film thickness in multilayer thin film stack by comparison to a reference library of theoretical signatures
US5555474A (en) * 1994-12-21 1996-09-10 Integrated Process Equipment Corp. Automatic rejection of diffraction effects in thin film metrology
US5619371A (en) * 1995-03-02 1997-04-08 Southern Research Institute Confocal optical microscopy system for multi-layer data storage and retrieval
US5724121A (en) * 1995-05-12 1998-03-03 Hughes Danbury Optical Systems, Inc. Mounting member method and apparatus with variable length supports
FR2736286B1 (fr) * 1995-07-07 1997-08-22 Kodak Pathe Dispositif et procede pour optimiser un parametre donne d'un processus d'enduction d'une composition liquide sur un support
US5619548A (en) * 1995-08-11 1997-04-08 Oryx Instruments And Materials Corp. X-ray thickness gauge
US5729343A (en) * 1995-11-16 1998-03-17 Nikon Precision Inc. Film thickness measurement apparatus with tilting stage and method of operation
US5924058A (en) * 1997-02-14 1999-07-13 Applied Materials, Inc. Permanently mounted reference sample for a substrate measurement tool
US5936254A (en) * 1997-03-11 1999-08-10 Nikon Research Corporation Of America Thin film detection method and apparatus
US7304744B1 (en) 1998-12-24 2007-12-04 Sharp Kabushiki Kaisha Apparatus and method for measuring the thickness of a thin film via the intensity of reflected light
JP3717340B2 (ja) * 1999-07-27 2005-11-16 シャープ株式会社 電子部品製造装置
US6822745B2 (en) * 2000-01-25 2004-11-23 Zygo Corporation Optical systems for measuring form and geometric dimensions of precision engineered parts
US6714307B2 (en) 2001-10-16 2004-03-30 Zygo Corporation Measurement of complex surface shapes using a spherical wavefront
JP3928478B2 (ja) * 2002-05-22 2007-06-13 株式会社島津製作所 膜厚測定方法及び膜厚測定装置
US7212291B2 (en) * 2003-12-18 2007-05-01 Zygo Corporation Interferometric microscopy using reflective optics for complex surface shapes
JP4843272B2 (ja) * 2004-07-31 2011-12-21 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置の光学システム
KR101373511B1 (ko) * 2006-03-30 2014-03-12 오르보테크 엘티디. 연속 범위 각도에 대해 선택가능한 조명을 이용하는 검사 시스템 및 방법
KR101011491B1 (ko) * 2006-11-02 2011-01-31 도쿄엘렉트론가부시키가이샤 미소 구조체의 검사 장치, 미소 구조체의 검사 방법 및 기판 유지 장치
US7751064B2 (en) 2008-01-22 2010-07-06 Zygo Corporation Interference objective for annular test surfaces
JP2009258022A (ja) * 2008-04-18 2009-11-05 Sony Corp 変位検出装置
US9618369B2 (en) * 2008-08-26 2017-04-11 The University Court Of The University Of Glasgow Uses of electromagnetic interference patterns
US20100114532A1 (en) * 2008-11-03 2010-05-06 Applied Materials, Inc. Weighted spectrographic monitoring of a substrate during processing
TWI585880B (zh) * 2011-11-10 2017-06-01 應用材料股份有限公司 透過雷射繞射測量３ｄ半導體結構之溫度的設備及方法
CN104819776B (zh) * 2015-05-04 2017-04-12 中国科学院国家天文台南京天文光学技术研究所 用于天文观测光谱仪的定标灯系统
US10563973B2 (en) * 2016-03-28 2020-02-18 Kla-Tencor Corporation All surface film metrology system
US10923371B2 (en) * 2016-03-30 2021-02-16 Applied Materials, Inc. Metrology system for substrate deformation measurement
EP3346229B1 (en) * 2017-01-09 2022-03-30 Unity Semiconductor GmbH Method and assembly for determining the thickness of layers in a sample stack
CN112129249A (zh) * 2019-06-25 2020-12-25 宝山钢铁股份有限公司 含有环保涂层的无取向硅钢的膜厚测量方法及测量设备

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JPS5535214A (en) * 1978-09-04 1980-03-12 Asahi Chem Ind Co Ltd Method and device for film-thickness measurement making use of infrared-ray interference
US4932781A (en) * 1983-11-04 1990-06-12 Canon Kabushiki Kaisha Gap measuring apparatus using interference fringes of reflected light
US4787749A (en) * 1985-11-28 1988-11-29 Canon Kabushiki Kaisha Method and apparatus for measuring the thickness of a thin film using the spectral reflection factor of the film
US4725144A (en) * 1986-02-25 1988-02-16 R & D Associates Optic element testing method and apparatus
SU1672213A1 (ru) * 1988-07-05 1991-08-23 Каунасский Политехнический Институт Им.А.Снечкуса Способ контрол плоскостности поверхности твердотельной пластины в процессе ее радиационной модификации
DE3836564A1 (de) * 1988-10-27 1990-05-03 Zeiss Carl Fa Verfahren zur pruefung von optischen elementen
US5042949A (en) * 1989-03-17 1991-08-27 Greenberg Jeffrey S Optical profiler for films and substrates
JPH0351707A (ja) * 1989-07-19 1991-03-06 Toyota Motor Corp 曲面液晶セル用ガラス基板の品質判定方法

Also Published As

Publication number Publication date
EP0572144A2 (en) 1993-12-01
IL105612A0 (en) 1993-09-22
IL105612A (en) 1995-07-31
US5293214A (en) 1994-03-08
JPH0723843B2 (ja) 1995-03-15
TW241335B (no) 1995-02-21
NO931912D0 (no) 1993-05-26
JPH0642923A (ja) 1994-02-18
EP0572144A3 (en) 1995-05-10

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