JPS5031852A - - Google Patents
Info
- Publication number
- JPS5031852A JPS5031852A JP8060573A JP8060573A JPS5031852A JP S5031852 A JPS5031852 A JP S5031852A JP 8060573 A JP8060573 A JP 8060573A JP 8060573 A JP8060573 A JP 8060573A JP S5031852 A JPS5031852 A JP S5031852A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8060573A JPS5031852A (no) | 1973-07-20 | 1973-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8060573A JPS5031852A (no) | 1973-07-20 | 1973-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5031852A true JPS5031852A (no) | 1975-03-28 |
Family
ID=13722948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8060573A Pending JPS5031852A (no) | 1973-07-20 | 1973-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5031852A (no) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05248825A (ja) * | 1991-12-06 | 1993-09-28 | Hughes Aircraft Co | 薄膜の厚さを測定する装置および方法 |
| JPH0666524A (ja) * | 1992-06-29 | 1994-03-08 | Hughes Aircraft Co | 変形した形状及び部分的に変化した傾斜を有する薄膜層上の薄膜層の厚みを計測学的に処理するための装置及びその方法 |
-
1973
- 1973-07-20 JP JP8060573A patent/JPS5031852A/ja active Pending
Non-Patent Citations (1)
| Title |
|---|
| REVIEW SCIENTIFIC INSTRUMENTS=1967 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05248825A (ja) * | 1991-12-06 | 1993-09-28 | Hughes Aircraft Co | 薄膜の厚さを測定する装置および方法 |
| JPH0666524A (ja) * | 1992-06-29 | 1994-03-08 | Hughes Aircraft Co | 変形した形状及び部分的に変化した傾斜を有する薄膜層上の薄膜層の厚みを計測学的に処理するための装置及びその方法 |