NO892344L - Sensor med oppvarmbart maaleelement og utfoert som integrert krets. - Google Patents

Sensor med oppvarmbart maaleelement og utfoert som integrert krets.

Info

Publication number
NO892344L
NO892344L NO89892344A NO892344A NO892344L NO 892344 L NO892344 L NO 892344L NO 89892344 A NO89892344 A NO 89892344A NO 892344 A NO892344 A NO 892344A NO 892344 L NO892344 L NO 892344L
Authority
NO
Norway
Prior art keywords
sensor
sensor element
area
openings
substrate
Prior art date
Application number
NO89892344A
Other languages
English (en)
Other versions
NO892344D0 (no
Inventor
Ari Lehto
Original Assignee
Vaisala Oy
Kemira Oy
Neste Oy
Outokumpu Oy
Engicom Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy, Kemira Oy, Neste Oy, Outokumpu Oy, Engicom Nv filed Critical Vaisala Oy
Publication of NO892344D0 publication Critical patent/NO892344D0/no
Publication of NO892344L publication Critical patent/NO892344L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Food Science & Technology (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

Sensor (2, 15), særlig for måling av gass- konsentrasjon, omfattende et sensorelement (8, 10) med elektroder (8) og et gassfølsomt sjikt (10), et oppvarmingselement (11) an- ordnet inntil sensoren for å bringe denne til en temperatur over den omgivende gass- atmosfæres temperatur, og elektroniske kretser (18) for måling av sensorparametrene og dermed gasskonsentrasjonen. Sensoren og de elektroniske kretser danner en integrert krets på et plant substrat (l, 7) med hull (5, 13, 17) inntil sensoren for å redusere varmetransport fra denne, og for- bindelsesledningene (3) til sensoren og opp- varmingselementet (11) går da over smale broer eller istmuser (14) mellom åpningene.
NO89892344A 1988-06-08 1989-06-07 Sensor med oppvarmbart maaleelement og utfoert som integrert krets. NO892344L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI882697A FI82774C (fi) 1988-06-08 1988-06-08 Integrerad uppvaermbar sensor.

Publications (2)

Publication Number Publication Date
NO892344D0 NO892344D0 (no) 1989-06-07
NO892344L true NO892344L (no) 1989-12-11

Family

ID=8526596

Family Applications (1)

Application Number Title Priority Date Filing Date
NO89892344A NO892344L (no) 1988-06-08 1989-06-07 Sensor med oppvarmbart maaleelement og utfoert som integrert krets.

Country Status (11)

Country Link
US (1) US4991424A (no)
EP (1) EP0346127B1 (no)
JP (1) JPH0231150A (no)
AT (1) ATE101274T1 (no)
AU (1) AU619550B2 (no)
CA (1) CA1319837C (no)
DE (1) DE68912830T2 (no)
DK (1) DK278089A (no)
FI (1) FI82774C (no)
NO (1) NO892344L (no)
PT (1) PT90777B (no)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1019331B (zh) * 1989-08-11 1992-12-02 法国煤矿公司 薄膜细丝型传感器及其制造方法和应用
DE4004165C2 (de) * 1990-02-10 1993-12-16 Kostal Leopold Gmbh & Co Kg Sensoreinrichtung
DE4105025C1 (no) * 1991-02-19 1992-07-02 Robert Bosch Gmbh, 7000 Stuttgart, De
DE59106772D1 (de) * 1991-08-14 1995-11-30 Siemens Ag Gassensor-Array zur Detektion einzelner Gaskomponenten in einem Gasgemisch.
GB9401634D0 (en) * 1994-01-28 1994-03-23 City Tech Monitor
GB9501461D0 (en) * 1994-06-20 1995-03-15 Capteur Sensors & Analysers Detection of ozone
US5504681A (en) * 1994-06-29 1996-04-02 Ford Motor Company Mass air flow sensor calibration
US5679275A (en) * 1995-07-03 1997-10-21 Motorola, Inc. Circuit and method of modifying characteristics of a utilization circuit
FR2746183B1 (fr) * 1996-03-14 1998-06-05 Dispositif capteur chimique a semiconducteur et procede de formation d'un dispositif capteur chimique a semiconducteur
DE69630292D1 (de) * 1996-07-31 2003-11-13 St Microelectronics Srl Verfahren zur Herstellung von integrierten Halbleiteranordnungen mit chemoresistivem Gasmikrosensor
JP3553613B2 (ja) * 1996-10-10 2004-08-11 サムソン・エレクトロニクス・カンパニー・リミテッド ガスセンサのハイブリッド集積回路
US5880354A (en) * 1997-06-11 1999-03-09 Cts Corporation Gas sensor with orientation insensitivity
GB2366627A (en) * 2000-09-11 2002-03-13 Bookham Technology Plc Method and apparatus for temperature control
US6708561B2 (en) 2002-04-19 2004-03-23 Visteon Global Technologies, Inc. Fluid flow meter having an improved sampling channel
US6973825B2 (en) * 2003-02-24 2005-12-13 Visteon Global Technologies, Inc. Hot-wire mass flow sensor with low-loss bypass passage
ITTO20030318A1 (it) * 2003-04-24 2004-10-25 Sacmi Dispositivo sensore di gas a film sottile semiconduttore.
DE102005021614A1 (de) * 2005-05-11 2006-11-23 Hella Kgaa Hueck & Co. Sensoranordnung, insbesondere zur Bestimmung der Luftgüte
DE102011089608A1 (de) * 2011-12-22 2013-06-27 Horst Siedle Gmbh & Co. Kg Gehäuseteil für einen elektrischen Sensorsowie Verfahren zur Herstellung des Gehäuseteils
WO2014128348A1 (en) * 2013-02-22 2014-08-28 Vaisala Oyj A radiosonde and a method for atmospheric measurements performed at an elevated temperature

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1586117A (en) * 1977-06-22 1981-03-18 Rosemount Eng Co Ltd Solid state sensor element
US4377944A (en) * 1979-12-27 1983-03-29 Nippon Electric Co., Ltd. Integrated gas sensitive unit comprising a gas sensitive semiconductor element and a resistor for gas concentration measurement
DE3019387C2 (de) * 1980-05-21 1986-01-23 Siemens AG, 1000 Berlin und 8000 München Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement
JPS58105047A (ja) * 1981-12-18 1983-06-22 Hitachi Ltd 一体型温度・湿度センサ
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
CA1216330A (en) * 1983-02-07 1987-01-06 Junji Manaka Low power gas detector
JPS60243549A (ja) * 1984-05-05 1985-12-03 ゲゼルシヤフト、フユール、ゲレーテバウ、ミツト、ベシユレンクテル、ハフツング ガスの触媒燃焼用のセンサの製造方法
US4674319A (en) * 1985-03-20 1987-06-23 The Regents Of The University Of California Integrated circuit sensor
DE3519397A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Sensor fuer gasanalyse bzw. -detektion
JPS61275648A (ja) * 1985-05-31 1986-12-05 Nippon Telegr & Teleph Corp <Ntt> マイクロガスセンサ
JPS63184049A (ja) * 1987-01-27 1988-07-29 Figaro Eng Inc ガスセンサの製造方法
JPS63172948A (ja) * 1987-01-12 1988-07-16 Figaro Eng Inc ガスセンサ

Also Published As

Publication number Publication date
EP0346127B1 (en) 1994-02-02
FI882697A0 (fi) 1988-06-08
JPH0231150A (ja) 1990-02-01
NO892344D0 (no) 1989-06-07
CA1319837C (en) 1993-07-06
ATE101274T1 (de) 1994-02-15
FI82774B (fi) 1990-12-31
DK278089A (da) 1989-12-09
US4991424A (en) 1991-02-12
DK278089D0 (da) 1989-06-07
PT90777A (pt) 1989-12-29
DE68912830T2 (de) 1994-08-25
EP0346127A2 (en) 1989-12-13
FI882697A (fi) 1989-12-09
DE68912830D1 (de) 1994-03-17
AU619550B2 (en) 1992-01-30
EP0346127A3 (en) 1990-05-23
FI82774C (fi) 1991-04-10
AU3512189A (en) 1989-12-14
PT90777B (pt) 1994-11-30

Similar Documents

Publication Publication Date Title
NO892344D0 (no) Sensor med oppvarmbart maaleelement og utfoert som integrert krets.
ES2005406A6 (es) Un metodo y un sistema para indicar el cambio en la relacion de coeficientes de disipacion.
GB2358930A (en) Precision laminar flow element for use in thermal mass flow sensors and flow controllers
NO900569L (no) Fremgangsmaate og anordning for bestemmelse av varmeledningsevnen for gasser.
EP0360025A3 (en) Temperature measuring probe and electronic clinical thermometer equipped with same
ATE123877T1 (de) Sensor zur erfassung reduzierender gase.
DE3677634D1 (de) Heizvorrichtung.
EP0287108A3 (en) Measuring circuit for use in device for detecting ambient air temperature
ATE237801T1 (de) Vorrichtung zur hochtemperaturerfassung und verfahren zur herstellung derselben
KR880011576A (ko) 온도 측정 장치
JPS6441865A (en) Acceleration sensor unit
ATE26019T1 (de) Einrichtung zur bestimmung der saettigungstemperatur einer heissen, unter druck stehenden fluessigkeit und schaltungsanordnung zur ueberwachung des abstandes zur saettigungstemperatur und der dampfbildung unter verwendung dieser einrichtung.
DK1207347T3 (da) Fremgangsmåde til regulering af en gasbrænder
ES2004898A6 (es) Un dispositivo electrico para detectar la presion estatica de un fluido
JPS54103366A (en) Liquid crystal display device
ES2072457T3 (es) Aparato de medicion para determinar la tendencia a la transpiracion de las personas.
JPS61173043U (no)
Lipinski et al. Continuous Measurement of the Dew Point in Processes of Thermochemical Treatment
DE69230582D1 (de) Halbleiterreferenzelektrode für einen keramischen Sensor
RU2003983C1 (ru) Датчик тока
Balakovskii et al. Optimum Mounting of Thermocouples for Studying Intensive Unsteady Thermal Effects on Materials
SE8206268L (sv) Medicinsk temperaturindikator
ES2005236A6 (es) Sensor analogico electronico para indicacion y control de temperatura, en especial en motores termicos