DE68912830D1 - Integrierter heizbarer Fühler. - Google Patents

Integrierter heizbarer Fühler.

Info

Publication number
DE68912830D1
DE68912830D1 DE89305812T DE68912830T DE68912830D1 DE 68912830 D1 DE68912830 D1 DE 68912830D1 DE 89305812 T DE89305812 T DE 89305812T DE 68912830 T DE68912830 T DE 68912830T DE 68912830 D1 DE68912830 D1 DE 68912830D1
Authority
DE
Germany
Prior art keywords
sensor
sensor element
area
openings
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89305812T
Other languages
English (en)
Other versions
DE68912830T2 (de
Inventor
Ari Lehto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Engicom NV
Vaisala Oy
Fortum Oil Oy
Outokumpu Oyj
Kemira Oyj
Neste Oyj
Original Assignee
Engicom NV
Vaisala Oy
Fortum Oil Oy
Outokumpu Oyj
Kemira Oyj
Neste Oyj
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Engicom NV, Vaisala Oy, Fortum Oil Oy, Outokumpu Oyj, Kemira Oyj, Neste Oyj filed Critical Engicom NV
Publication of DE68912830D1 publication Critical patent/DE68912830D1/de
Application granted granted Critical
Publication of DE68912830T2 publication Critical patent/DE68912830T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Food Science & Technology (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
DE68912830T 1988-06-08 1989-06-08 Integrierter heizbarer Fühler. Expired - Fee Related DE68912830T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI882697A FI82774C (fi) 1988-06-08 1988-06-08 Integrerad uppvaermbar sensor.

Publications (2)

Publication Number Publication Date
DE68912830D1 true DE68912830D1 (de) 1994-03-17
DE68912830T2 DE68912830T2 (de) 1994-08-25

Family

ID=8526596

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68912830T Expired - Fee Related DE68912830T2 (de) 1988-06-08 1989-06-08 Integrierter heizbarer Fühler.

Country Status (11)

Country Link
US (1) US4991424A (de)
EP (1) EP0346127B1 (de)
JP (1) JPH0231150A (de)
AT (1) ATE101274T1 (de)
AU (1) AU619550B2 (de)
CA (1) CA1319837C (de)
DE (1) DE68912830T2 (de)
DK (1) DK278089A (de)
FI (1) FI82774C (de)
NO (1) NO892344L (de)
PT (1) PT90777B (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1019331B (zh) * 1989-08-11 1992-12-02 法国煤矿公司 薄膜细丝型传感器及其制造方法和应用
DE4004165C2 (de) * 1990-02-10 1993-12-16 Kostal Leopold Gmbh & Co Kg Sensoreinrichtung
DE4105025C1 (de) * 1991-02-19 1992-07-02 Robert Bosch Gmbh, 7000 Stuttgart, De
EP0527258B1 (de) * 1991-08-14 1995-10-25 Siemens Aktiengesellschaft Gassensor-Array zur Detektion einzelner Gaskomponenten in einem Gasgemisch
GB9401634D0 (en) * 1994-01-28 1994-03-23 City Tech Monitor
GB9501461D0 (en) * 1994-06-20 1995-03-15 Capteur Sensors & Analysers Detection of ozone
US5504681A (en) * 1994-06-29 1996-04-02 Ford Motor Company Mass air flow sensor calibration
US5679275A (en) * 1995-07-03 1997-10-21 Motorola, Inc. Circuit and method of modifying characteristics of a utilization circuit
FR2746183B1 (fr) * 1996-03-14 1998-06-05 Dispositif capteur chimique a semiconducteur et procede de formation d'un dispositif capteur chimique a semiconducteur
EP0822578B1 (de) * 1996-07-31 2003-10-08 STMicroelectronics S.r.l. Verfahren zur Herstellung von integrierten Halbleiteranordnungen mit chemoresistivem Gasmikrosensor
RU2137117C1 (ru) * 1996-10-10 1999-09-10 Самсунг Электроникс Ко., Лтд. Гибридная интегральная схема газового сенсора
US5880354A (en) * 1997-06-11 1999-03-09 Cts Corporation Gas sensor with orientation insensitivity
GB2366627A (en) * 2000-09-11 2002-03-13 Bookham Technology Plc Method and apparatus for temperature control
US6708561B2 (en) 2002-04-19 2004-03-23 Visteon Global Technologies, Inc. Fluid flow meter having an improved sampling channel
US6973825B2 (en) * 2003-02-24 2005-12-13 Visteon Global Technologies, Inc. Hot-wire mass flow sensor with low-loss bypass passage
ITTO20030318A1 (it) * 2003-04-24 2004-10-25 Sacmi Dispositivo sensore di gas a film sottile semiconduttore.
DE102005021614A1 (de) * 2005-05-11 2006-11-23 Hella Kgaa Hueck & Co. Sensoranordnung, insbesondere zur Bestimmung der Luftgüte
DE102011089608A1 (de) * 2011-12-22 2013-06-27 Horst Siedle Gmbh & Co. Kg Gehäuseteil für einen elektrischen Sensorsowie Verfahren zur Herstellung des Gehäuseteils
CN105209935A (zh) * 2013-02-22 2015-12-30 维萨拉公司 无线电探空仪以及用于在高温下实施大气探测的方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1586117A (en) * 1977-06-22 1981-03-18 Rosemount Eng Co Ltd Solid state sensor element
US4377944A (en) * 1979-12-27 1983-03-29 Nippon Electric Co., Ltd. Integrated gas sensitive unit comprising a gas sensitive semiconductor element and a resistor for gas concentration measurement
DE3019387C2 (de) * 1980-05-21 1986-01-23 Siemens AG, 1000 Berlin und 8000 München Dünnschicht-Halbleiter-Gassensor mit einem in den Sensoraufbau integrierten Heizelement
JPS58105047A (ja) * 1981-12-18 1983-06-22 Hitachi Ltd 一体型温度・湿度センサ
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
CA1216330A (en) * 1983-02-07 1987-01-06 Junji Manaka Low power gas detector
JPS60243549A (ja) * 1984-05-05 1985-12-03 ゲゼルシヤフト、フユール、ゲレーテバウ、ミツト、ベシユレンクテル、ハフツング ガスの触媒燃焼用のセンサの製造方法
US4674319A (en) * 1985-03-20 1987-06-23 The Regents Of The University Of California Integrated circuit sensor
DE3519397A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Sensor fuer gasanalyse bzw. -detektion
JPS61275648A (ja) * 1985-05-31 1986-12-05 Nippon Telegr & Teleph Corp <Ntt> マイクロガスセンサ
JPS63184049A (ja) * 1987-01-27 1988-07-29 Figaro Eng Inc ガスセンサの製造方法
JPS63172948A (ja) * 1987-01-12 1988-07-16 Figaro Eng Inc ガスセンサ

Also Published As

Publication number Publication date
DK278089D0 (da) 1989-06-07
ATE101274T1 (de) 1994-02-15
FI882697A0 (fi) 1988-06-08
CA1319837C (en) 1993-07-06
FI882697A (fi) 1989-12-09
JPH0231150A (ja) 1990-02-01
EP0346127B1 (de) 1994-02-02
US4991424A (en) 1991-02-12
FI82774C (fi) 1991-04-10
EP0346127A3 (en) 1990-05-23
NO892344L (no) 1989-12-11
EP0346127A2 (de) 1989-12-13
FI82774B (fi) 1990-12-31
DE68912830T2 (de) 1994-08-25
PT90777B (pt) 1994-11-30
AU619550B2 (en) 1992-01-30
DK278089A (da) 1989-12-09
AU3512189A (en) 1989-12-14
NO892344D0 (no) 1989-06-07
PT90777A (pt) 1989-12-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee