NO882222L - Fremgangsmaate for fremstilling av tynn film av supraledende oksyd. - Google Patents
Fremgangsmaate for fremstilling av tynn film av supraledende oksyd.Info
- Publication number
- NO882222L NO882222L NO882222A NO882222A NO882222L NO 882222 L NO882222 L NO 882222L NO 882222 A NO882222 A NO 882222A NO 882222 A NO882222 A NO 882222A NO 882222 L NO882222 L NO 882222L
- Authority
- NO
- Norway
- Prior art keywords
- film
- solution
- superconducting
- substrate
- superconducting oxide
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 65
- 239000010409 thin film Substances 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000010408 film Substances 0.000 claims description 129
- 239000000758 substrate Substances 0.000 claims description 61
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 48
- 239000007788 liquid Substances 0.000 claims description 30
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 27
- 229920000642 polymer Polymers 0.000 claims description 20
- 239000006193 liquid solution Substances 0.000 claims description 18
- 150000001768 cations Chemical class 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 16
- 239000010949 copper Substances 0.000 claims description 15
- 238000010304 firing Methods 0.000 claims description 15
- 239000002243 precursor Substances 0.000 claims description 14
- 239000007787 solid Substances 0.000 claims description 14
- 238000001035 drying Methods 0.000 claims description 13
- 230000004888 barrier function Effects 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 229910000510 noble metal Inorganic materials 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 10
- 239000011347 resin Substances 0.000 claims description 10
- 229920000620 organic polymer Polymers 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 239000010970 precious metal Substances 0.000 claims description 8
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 claims description 7
- 229910052746 lanthanum Inorganic materials 0.000 claims description 7
- -1 rare earth ions Chemical class 0.000 claims description 7
- 238000009987 spinning Methods 0.000 claims description 7
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 6
- 125000002091 cationic group Chemical group 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 229910052712 strontium Inorganic materials 0.000 claims description 6
- 229910000018 strontium carbonate Inorganic materials 0.000 claims description 6
- 229910052788 barium Inorganic materials 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 5
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 5
- 229910052727 yttrium Inorganic materials 0.000 claims description 5
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 claims description 4
- 150000007524 organic acids Chemical class 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 3
- 229910052691 Erbium Inorganic materials 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052693 Europium Inorganic materials 0.000 claims description 3
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 3
- 229910052765 Lutetium Inorganic materials 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052771 Terbium Inorganic materials 0.000 claims description 3
- 229910052775 Thulium Inorganic materials 0.000 claims description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Inorganic materials [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- 239000010948 rhodium Substances 0.000 claims description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 2
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 229910000009 copper(II) carbonate Inorganic materials 0.000 claims description 2
- JJLJMEJHUUYSSY-UHFFFAOYSA-L copper(II) hydroxide Inorganic materials [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 claims description 2
- AEJIMXVJZFYIHN-UHFFFAOYSA-N copper;dihydrate Chemical compound O.O.[Cu] AEJIMXVJZFYIHN-UHFFFAOYSA-N 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 230000001939 inductive effect Effects 0.000 claims description 2
- 239000004310 lactic acid Substances 0.000 claims description 2
- 235000014655 lactic acid Nutrition 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 239000000725 suspension Substances 0.000 claims description 2
- 230000001737 promoting effect Effects 0.000 claims 3
- 229910052692 Dysprosium Inorganic materials 0.000 claims 2
- 229910052689 Holmium Inorganic materials 0.000 claims 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
- 229910002113 barium titanate Inorganic materials 0.000 claims 2
- 239000002178 crystalline material Substances 0.000 claims 2
- 229910001020 Au alloy Inorganic materials 0.000 claims 1
- 229910000531 Co alloy Inorganic materials 0.000 claims 1
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- 229910000990 Ni alloy Inorganic materials 0.000 claims 1
- 229910001260 Pt alloy Inorganic materials 0.000 claims 1
- 229910001362 Ta alloys Inorganic materials 0.000 claims 1
- 239000003353 gold alloy Substances 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 239000000243 solution Substances 0.000 description 35
- 239000000203 mixture Substances 0.000 description 23
- 229910002367 SrTiO Inorganic materials 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 229960004106 citric acid Drugs 0.000 description 7
- 229920006254 polymer film Polymers 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- YASYEJJMZJALEJ-UHFFFAOYSA-N Citric acid monohydrate Chemical compound O.OC(=O)CC(O)(C(O)=O)CC(O)=O YASYEJJMZJALEJ-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 229960002303 citric acid monohydrate Drugs 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 229910002370 SrTiO3 Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000002887 superconductor Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001860 citric acid derivatives Chemical class 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920000914 Metallic fiber Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- ONWSXQXQPJHQPU-UHFFFAOYSA-N ethane-1,2-diol;2-hydroxypropane-1,2,3-tricarboxylic acid Chemical compound OCCO.OC(=O)CC(O)(C(O)=O)CC(O)=O ONWSXQXQPJHQPU-UHFFFAOYSA-N 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 description 1
- 239000002897 polymer film coating Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- RLJWTAURUFQFJP-UHFFFAOYSA-N propan-2-ol;titanium Chemical compound [Ti].CC(C)O.CC(C)O.CC(C)O.CC(C)O RLJWTAURUFQFJP-UHFFFAOYSA-N 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B12/00—Superconductive or hyperconductive conductors, cables, or transmission lines
- H01B12/02—Superconductive or hyperconductive conductors, cables, or transmission lines characterised by their form
- H01B12/06—Films or wires on bases or cores
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/45—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
- C04B35/4504—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides containing rare earth oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0324—Processes for depositing or forming copper oxide superconductor layers from a solution
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
- H10N60/0604—Monocrystalline substrates, e.g. epitaxial growth
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/20—Permanent superconducting devices
- H10N60/203—Permanent superconducting devices comprising high-Tc ceramic materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/053,058 US4994433A (en) | 1987-05-22 | 1987-05-22 | Preparation of thin film superconducting oxides |
| US07/123,929 US4897378A (en) | 1987-05-22 | 1987-11-23 | Preparation of thin film superconducting oxides |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NO882222D0 NO882222D0 (no) | 1988-05-20 |
| NO882222L true NO882222L (no) | 1988-11-23 |
Family
ID=26731394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO882222A NO882222L (no) | 1987-05-22 | 1988-05-20 | Fremgangsmaate for fremstilling av tynn film av supraledende oksyd. |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US4897378A (ja) |
| JP (1) | JPH01119502A (ja) |
| KR (1) | KR880014017A (ja) |
| AU (1) | AU1644888A (ja) |
| BE (1) | BE1001625A4 (ja) |
| CH (1) | CH676893A5 (ja) |
| DE (1) | DE3817322A1 (ja) |
| DK (1) | DK277188A (ja) |
| ES (2) | ES2009607A6 (ja) |
| FI (1) | FI882362A (ja) |
| FR (1) | FR2615506A1 (ja) |
| GB (1) | GB2206109A (ja) |
| IT (1) | IT1219319B (ja) |
| NL (1) | NL8801286A (ja) |
| NO (1) | NO882222L (ja) |
| SE (1) | SE8801896L (ja) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0275343A1 (en) * | 1987-01-23 | 1988-07-27 | International Business Machines Corporation | New superconductive compounds of the K2NiF4 structural type having a high transition temperature, and method for fabricating same |
| KR880009453A (ko) * | 1987-01-30 | 1988-09-15 | 원본미기재 | 초전도성 재료와 그 제조방법 |
| DE3744145A1 (de) * | 1987-12-24 | 1989-07-06 | Asea Brown Boveri | Supraleiter und verfahren zu seiner herstellung |
| US5140300A (en) * | 1988-10-24 | 1992-08-18 | Sharp Kabushiki Kaisha | Superconductive magneto-resistive device comprising laminated superconductive ceramic films |
| US5180706A (en) * | 1989-01-26 | 1993-01-19 | Reick Franklin G | High-temperature porous-ceramic superconductors |
| US5075283A (en) * | 1989-03-09 | 1991-12-24 | International Superconductor Corp. | High-Tc superconductor quantum interference devices |
| FR2649093B1 (fr) * | 1989-06-30 | 1991-09-13 | Comp Generale Electricite | Procede de mise en forme d'une ceramique supraconductrice |
| US5073537A (en) * | 1990-02-06 | 1991-12-17 | Eastman Kodak Company | Electrically conductive article |
| US5082810A (en) * | 1990-02-28 | 1992-01-21 | E. I. Du Pont De Nemours And Company | Ceramic dielectric composition and method for preparation |
| US5082811A (en) * | 1990-02-28 | 1992-01-21 | E. I. Du Pont De Nemours And Company | Ceramic dielectric compositions and method for enhancing dielectric properties |
| JP3081212B2 (ja) * | 1990-03-06 | 2000-08-28 | 日産自動車株式会社 | 部分クエン酸塩法による複合酸化物の合成方法 |
| US5187147A (en) * | 1991-05-31 | 1993-02-16 | Florida State University | Method for producing freestanding high Tc superconducting thin films |
| FR2680604A1 (fr) * | 1991-08-23 | 1993-02-26 | Alsthom Cge Alcatel | Procede de realisation d'une structure composite en forme de feuille metal/supraconducteur a haute temperature critique. |
| DE69215801T2 (de) * | 1991-08-23 | 1997-04-03 | Alsthom Cge Alcatel | Verfahren zur Herstellung eines Verbundleiters aus Metall und Hoch-Temperatur-Supraleiter |
| US5273776A (en) * | 1991-12-06 | 1993-12-28 | Mitsubishi Materials Corporation | Method for forming thermistor thin film |
| US5356474A (en) * | 1992-11-27 | 1994-10-18 | General Electric Company | Apparatus and method for making aligned Hi-Tc tape superconductors |
| KR100458856B1 (ko) * | 2001-07-06 | 2004-12-03 | 오근호 | 마이크로웨이브(Microwave) 가열을 이용한 무기질 복합산화물 합성방법 |
| KR20030075797A (ko) * | 2002-03-20 | 2003-09-26 | 한국전력공사 | 와이비씨오 초전도체의 와이123분말과 와이211분말을동시에 합성하는 방법 |
| US8053709B2 (en) | 2006-12-12 | 2011-11-08 | Enerco Group, Inc. | Heat and/or light producing unit powered by a lithium secondary cell battery with high charge and discharge rate capability |
| JP5421561B2 (ja) | 2008-08-20 | 2014-02-19 | 住友電気工業株式会社 | 酸化物超電導薄膜の製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3330697A (en) * | 1963-08-26 | 1967-07-11 | Sprague Electric Co | Method of preparing lead and alkaline earth titanates and niobates and coating method using the same to form a capacitor |
| FR2204454B1 (ja) * | 1972-10-30 | 1975-09-12 | Pro Catalyse | |
| DE2516747A1 (de) * | 1975-04-16 | 1976-10-28 | Battelle Institut E V | Verfahren zur herstellung von duktilen und eigenstabilen supraleitenden werkstoffen |
| US4022584A (en) * | 1976-05-11 | 1977-05-10 | Erwin Rudy | Sintered cermets for tool and wear applications |
| JPS5685814A (en) * | 1979-12-14 | 1981-07-13 | Tdk Electronics Co Ltd | Condenser |
| WO1988008609A1 (en) * | 1987-04-24 | 1988-11-03 | General Atomics | Manufacture of high purity superconducting ceramic |
| AU607219B2 (en) * | 1987-05-29 | 1991-02-28 | Toray Industries, Inc. | Method of forming superconductive thin films and solutions for forming the same |
-
1987
- 1987-11-23 US US07/123,929 patent/US4897378A/en not_active Expired - Fee Related
-
1988
- 1988-05-18 NL NL8801286A patent/NL8801286A/nl not_active Application Discontinuation
- 1988-05-19 AU AU16448/88A patent/AU1644888A/en not_active Abandoned
- 1988-05-19 FR FR8806703A patent/FR2615506A1/fr not_active Withdrawn
- 1988-05-19 FI FI882362A patent/FI882362A/fi not_active IP Right Cessation
- 1988-05-20 CH CH1924/88A patent/CH676893A5/de not_active IP Right Cessation
- 1988-05-20 DK DK277188A patent/DK277188A/da not_active Application Discontinuation
- 1988-05-20 SE SE8801896A patent/SE8801896L/ not_active Application Discontinuation
- 1988-05-20 BE BE8800561A patent/BE1001625A4/fr not_active IP Right Cessation
- 1988-05-20 DE DE3817322A patent/DE3817322A1/de not_active Withdrawn
- 1988-05-20 NO NO882222A patent/NO882222L/no unknown
- 1988-05-20 ES ES8801591A patent/ES2009607A6/es not_active Expired
- 1988-05-20 IT IT67469/88A patent/IT1219319B/it active
- 1988-05-21 KR KR1019880006055A patent/KR880014017A/ko not_active Application Discontinuation
- 1988-05-23 JP JP63125606A patent/JPH01119502A/ja active Pending
- 1988-05-23 GB GB08812188A patent/GB2206109A/en not_active Withdrawn
-
1989
- 1989-07-01 ES ES8902338A patent/ES2017822A6/es not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DK277188A (da) | 1989-03-16 |
| FR2615506A1 (fr) | 1988-11-25 |
| NL8801286A (nl) | 1988-12-16 |
| DE3817322A1 (de) | 1988-12-01 |
| NO882222D0 (no) | 1988-05-20 |
| FI882362A (fi) | 1988-11-23 |
| GB2206109A (en) | 1988-12-29 |
| BE1001625A4 (fr) | 1989-12-19 |
| GB8812188D0 (en) | 1988-06-29 |
| AU1644888A (en) | 1988-11-24 |
| JPH01119502A (ja) | 1989-05-11 |
| US4897378A (en) | 1990-01-30 |
| IT8867469A0 (it) | 1988-05-20 |
| KR880014017A (ko) | 1988-12-22 |
| FI882362A0 (fi) | 1988-05-19 |
| DK277188D0 (da) | 1988-05-20 |
| SE8801896D0 (sv) | 1988-05-20 |
| SE8801896L (sv) | 1988-11-23 |
| ES2009607A6 (es) | 1989-10-01 |
| IT1219319B (it) | 1990-05-03 |
| CH676893A5 (ja) | 1991-03-15 |
| ES2017822A6 (es) | 1991-03-01 |
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