NO334730B1 - Fremgangsmåte for vibrasjonsmåling og interferometer - Google Patents

Fremgangsmåte for vibrasjonsmåling og interferometer Download PDF

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Publication number
NO334730B1
NO334730B1 NO20121458A NO20121458A NO334730B1 NO 334730 B1 NO334730 B1 NO 334730B1 NO 20121458 A NO20121458 A NO 20121458A NO 20121458 A NO20121458 A NO 20121458A NO 334730 B1 NO334730 B1 NO 334730B1
Authority
NO
Norway
Prior art keywords
plane
measurements
accordance
illumination
interferometer
Prior art date
Application number
NO20121458A
Other languages
English (en)
Norwegian (no)
Other versions
NO20121458A1 (no
Inventor
Eiolf Vikhagen
Original Assignee
Optonor As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optonor As filed Critical Optonor As
Priority to NO20121458A priority Critical patent/NO334730B1/no
Priority to PCT/NO2013/050214 priority patent/WO2014088424A1/en
Priority to JP2015546414A priority patent/JP6307517B2/ja
Priority to EP13860879.9A priority patent/EP2929305B1/en
Priority to CN201380063341.7A priority patent/CN104823029B/zh
Priority to US14/648,378 priority patent/US9964432B2/en
Publication of NO20121458A1 publication Critical patent/NO20121458A1/no
Publication of NO334730B1 publication Critical patent/NO334730B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
NO20121458A 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer NO334730B1 (no)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NO20121458A NO334730B1 (no) 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer
PCT/NO2013/050214 WO2014088424A1 (en) 2012-12-05 2013-12-04 Method of vibration measurement and interferometer
JP2015546414A JP6307517B2 (ja) 2012-12-05 2013-12-04 振動測定方法及び干渉計
EP13860879.9A EP2929305B1 (en) 2012-12-05 2013-12-04 Method of vibration measurement and interferometer
CN201380063341.7A CN104823029B (zh) 2012-12-05 2013-12-04 振动测量的方法以及干涉仪
US14/648,378 US9964432B2 (en) 2012-12-05 2013-12-04 Method of vibration measurement and interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20121458A NO334730B1 (no) 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer

Publications (2)

Publication Number Publication Date
NO20121458A1 NO20121458A1 (no) 2014-05-19
NO334730B1 true NO334730B1 (no) 2014-05-19

Family

ID=50883743

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20121458A NO334730B1 (no) 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer

Country Status (6)

Country Link
US (1) US9964432B2 (enExample)
EP (1) EP2929305B1 (enExample)
JP (1) JP6307517B2 (enExample)
CN (1) CN104823029B (enExample)
NO (1) NO334730B1 (enExample)
WO (1) WO2014088424A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2544727A (en) * 2015-11-16 2017-05-31 Optonor As Optical interferometry
GB2570742B (en) 2018-06-01 2020-10-28 Optonor As Optical-interference analysis
EP3757445A1 (en) 2019-06-24 2020-12-30 Hexagon Ragasco AS System and method for testing composite pressure vessels
NO20200190A1 (en) 2020-02-14 2021-08-16 Optonor As System and method for analysing an object
JPWO2023120170A1 (enExample) * 2021-12-22 2023-06-29

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5229832A (en) * 1991-07-08 1993-07-20 Industrial Quality, Inc. Optical ultrasonic material characterization apparatus and method
AU6036599A (en) * 1998-09-09 2000-03-27 Lockheed Martin Idaho Technologies Company Method and apparatus for assessing material properties of sheet-like materials
NO314323B1 (no) 2000-03-24 2003-03-03 Optonor As Framgangsmåte og interferometer for måling av mikroskopisk vibrasjon
JP3955899B2 (ja) * 2002-09-20 2007-08-08 国立大学法人埼玉大学 電子的スペックル干渉法を用いた変形計測方法および装置
WO2005062941A2 (en) * 2003-12-22 2005-07-14 Bossa Nova Technologies, Llc Multi-channel laser interferometric method and apparatus for detection of ultrasonic motion from a surface
GB2411001B (en) * 2004-02-10 2007-03-28 Statoil Asa Seismic exploration
GB2416835C (en) * 2004-08-04 2013-11-06 Statoil Asa Method and apparatus for studying surfaces
CN100362316C (zh) * 2006-03-08 2008-01-16 中国船舶重工集团公司第七一一研究所 一种三维电子散斑干涉仪
DE102007023826A1 (de) * 2007-05-21 2008-11-27 Polytec Gmbh Verfahren und Vorrichtung zur berührungslosen Schwingungsmessung
NL1036179A1 (nl) * 2007-11-20 2009-05-25 Asml Netherlands Bv Lithographic apparatus and method.
GB0803701D0 (en) * 2008-02-28 2008-04-09 Statoilhydro Asa Improved interferometric methods and apparatus for seismic exploration

Also Published As

Publication number Publication date
EP2929305C0 (en) 2024-01-31
NO20121458A1 (no) 2014-05-19
US9964432B2 (en) 2018-05-08
JP6307517B2 (ja) 2018-04-04
CN104823029A (zh) 2015-08-05
CN104823029B (zh) 2018-09-04
EP2929305A1 (en) 2015-10-14
JP2016501373A (ja) 2016-01-18
US20150308887A1 (en) 2015-10-29
EP2929305A4 (en) 2016-07-20
EP2929305B1 (en) 2024-01-31
WO2014088424A1 (en) 2014-06-12

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