NO20081913L - Fremgangsmate for fremstilling av monosilan - Google Patents

Fremgangsmate for fremstilling av monosilan

Info

Publication number
NO20081913L
NO20081913L NO20081913A NO20081913A NO20081913L NO 20081913 L NO20081913 L NO 20081913L NO 20081913 A NO20081913 A NO 20081913A NO 20081913 A NO20081913 A NO 20081913A NO 20081913 L NO20081913 L NO 20081913L
Authority
NO
Norway
Prior art keywords
countercurrent reactor
trichlorosilane
heat exchanger
double wall
monosilane
Prior art date
Application number
NO20081913A
Other languages
English (en)
Inventor
Peter Adler
Raymund Sonnenschein
Yuriy Kasatkin
Adolf Petrik
Leonid Schwarzmann
Original Assignee
Evonik Degussa Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Evonik Degussa Gmbh filed Critical Evonik Degussa Gmbh
Publication of NO20081913L publication Critical patent/NO20081913L/no

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/009—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping in combination with chemical reactions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/30—Loose or shaped packing elements, e.g. Raschig rings or Berl saddles, for pouring into the apparatus for mass or heat transfer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/32—Packing elements in the form of grids or built-up elements for forming a unit or module inside the apparatus for mass or heat transfer
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/008—Details of the reactor or of the particulate material; Processes to increase or to retard the rate of reaction
    • B01J8/0085—Details of the reactor or of the particulate material; Processes to increase or to retard the rate of reaction promoting uninterrupted fluid flow, e.g. by filtering out particles in front of the catalyst layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S203/00—Distillation: processes, separatory
    • Y10S203/06—Reactor-distillation

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Den foreliggende oppfinnelsen angår et anlegg og en fremgangsmåte for kontinuerlig produksjon av monosilan og tetraklorsilan ved katalytisk dismutasjon av triklorsilan ved en driftstemperatur og et trykk fra 1-50 bar absolutt, i et anlegg ifølge krav 1, hvori triklorsilan (A) forvarmes i en varmeveksler (7) og føres til motstrømsreaktoren (1) som er utstyrt med en katalysator (3), - produktblanding som dannes i motstrømsreaktoren (1) blir i det minste delvis kondensert ved hjelp av kondenseren (5) ved en temperatur i området fra -25 til 50 °C, hvor kondensatet strømmer tilbake til motstrømsreaktoren (1), - produktfasen som ikke er blitt kondensert i kondenseren (5) føres til kondenseringsenheten (8) som drives ved en temperatur i området fra -40 til -110 °C, - den flyktige produktfasen fra kondenseringsenheten (8) føres til destillasjonskolonnen (9) som drives ved en temperatur i området fra -60 til -170 °C og monosilan (C) tas ut på toppen av destillasjonskolonnen (9), - SiCl4-holdig bunnfraksjon fra motstrømsreaktoren (1) bringes til en temperatur i området fra 60-110 °C i fordampningsenheten (6), og bunnproduktet fra fordampningsenheten (6) føres via en varmeveksler (7) inn i dobbeltveggen (2) av motstrømsreaktoren (1), og SiCl4-holdig produktstrøm (B) tas ut på et nivå i det øvre området av reaktoren.
NO20081913A 2005-09-27 2008-04-22 Fremgangsmate for fremstilling av monosilan NO20081913L (no)

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DE102005046105A DE102005046105B3 (de) 2005-09-27 2005-09-27 Verfahren zur Herstellung von Monosilan
PCT/EP2006/063316 WO2007039326A1 (en) 2005-09-27 2006-06-19 Process for producing monosilane

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KR (1) KR20080065971A (no)
CN (1) CN101466463B (no)
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CA (1) CA2624534C (no)
DE (2) DE102005046105B3 (no)
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ATE413918T1 (de) 2008-11-15
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JP4922303B2 (ja) 2012-04-25
CA2624534A1 (en) 2007-04-12
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KR20080065971A (ko) 2008-07-15
CN101466463A (zh) 2009-06-24
EP1928591B1 (en) 2008-11-12
RU2403964C2 (ru) 2010-11-20
DE602006003667D1 (de) 2008-12-24
EP1928591A1 (en) 2008-06-11
UA89438C2 (ru) 2010-01-25
WO2007039326A1 (en) 2007-04-12
US8105564B2 (en) 2012-01-31
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CA2624534C (en) 2012-11-27

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