NO20073688L - Oscillerende mikromekanisk vinkelhastighetssensor - Google Patents

Oscillerende mikromekanisk vinkelhastighetssensor

Info

Publication number
NO20073688L
NO20073688L NO20073688A NO20073688A NO20073688L NO 20073688 L NO20073688 L NO 20073688L NO 20073688 A NO20073688 A NO 20073688A NO 20073688 A NO20073688 A NO 20073688A NO 20073688 L NO20073688 L NO 20073688L
Authority
NO
Norway
Prior art keywords
angular velocity
velocity sensor
oscillating micromechanical
oscillating
springs
Prior art date
Application number
NO20073688A
Other languages
English (en)
Other versions
NO339420B1 (no
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of NO20073688L publication Critical patent/NO20073688L/no
Publication of NO339420B1 publication Critical patent/NO339420B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)

Abstract

Oppfinnelsen vedrører måleinnretninger som benyttes ved måling av vinkelhastigheter, og mer særskilt vedrører oppfinnelsen oscillerende mikromekaniske vinkelhastighetssensorer. I en vinkelhastighetssensor ifølge oppfinnelsen er seismikkmasser (1, 2, 36, 37) forbundet med bæreområder ved hjelp av fjærer eller ved hjelp av fjærer og stive hjelpestrukturer, hvorved massene (1, 2, 36, 37) får en frihetsgrad i forhold til en rotasjonsakse perpendikulært på planet til den skiven som dannes av massen, og i forhold til minst én rotasjonsakse parallelt med skiveplanet. Strukturen til vinkelhastighetssensoren muliggjør en pålitelig og effektiv måling, særlig med kompakte og oscillerende mikromekaniske vinkelhastighetssensorer.
NO20073688A 2004-12-31 2007-07-17 Oscillerende mikromekanisk vinkelhastighetssensor NO339420B1 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20041708A FI116543B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi
PCT/FI2005/000557 WO2006070059A1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity

Publications (2)

Publication Number Publication Date
NO20073688L true NO20073688L (no) 2007-10-01
NO339420B1 NO339420B1 (no) 2016-12-12

Family

ID=33548065

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20073688A NO339420B1 (no) 2004-12-31 2007-07-17 Oscillerende mikromekanisk vinkelhastighetssensor

Country Status (11)

Country Link
US (1) US7454971B2 (no)
EP (2) EP1831643B1 (no)
JP (4) JP5006208B2 (no)
KR (1) KR100936638B1 (no)
CN (1) CN101120232B (no)
CA (1) CA2586707C (no)
ES (1) ES2477570T3 (no)
FI (1) FI116543B (no)
IL (1) IL183573A (no)
NO (1) NO339420B1 (no)
WO (1) WO2006070059A1 (no)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8020441B2 (en) * 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US8141424B2 (en) 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US7998380B2 (en) * 2007-07-13 2011-08-16 Wisconsin Alumni Research Foundation Method of fabricating a tissue engineering scaffold
DE102007035806B4 (de) * 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
FI119895B (fi) 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102007054505B4 (de) * 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
CN101999081B (zh) * 2008-04-11 2013-01-02 三菱电机株式会社 加速度传感器
FI122397B (fi) * 2008-04-16 2011-12-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102008040682A1 (de) * 2008-07-24 2010-01-28 Robert Bosch Gmbh Sensoranordnung und Verfahren zum Betrieb einer Sensoranordnung
US20100095768A1 (en) * 2008-10-20 2010-04-22 Custom Sensors & Technologies, Inc. Micromachined torsional gyroscope with anti-phase linear sense transduction
DE102008043796B4 (de) * 2008-11-17 2023-12-21 Robert Bosch Gmbh Drehratensensor
DE102009001248B4 (de) * 2009-02-27 2020-12-17 Hanking Electronics, Ltd. MEMS-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse
DE102009001244A1 (de) * 2009-02-27 2010-09-02 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
US8256290B2 (en) * 2009-03-17 2012-09-04 Minyao Mao Tri-axis angular rate sensor
DE102009002702B4 (de) 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
DE102009002701B4 (de) * 2009-04-28 2018-01-18 Hanking Electronics, Ltd. Mikromechanischer Sensor
WO2011029878A1 (de) 2009-09-09 2011-03-17 Continental Teves Ag & Co. Ohg Doppelaxialer, schockrobuster, drehratensensor mit linearen und rotatorischen seismischen elementen
US8534127B2 (en) * 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
EP2378246A1 (en) * 2010-04-16 2011-10-19 SensoNor Technologies AS MEMS Structure for an Angular Rate Sensor
DE102011056971A1 (de) * 2011-12-23 2013-06-27 Maxim Integrated Products, Inc. Mikromechanischer Coriolis-Drehratensensor
US9759563B2 (en) 2012-01-31 2017-09-12 Nxp Usa, Inc. Vibration robust x-axis ring gyro transducer
JP6070920B2 (ja) * 2012-04-04 2017-02-01 セイコーエプソン株式会社 ジャイロセンサーおよび電子機器
DE102013208828A1 (de) * 2013-05-14 2014-11-20 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
FI125695B (en) * 2013-09-11 2016-01-15 Murata Manufacturing Co Improved gyroscope construction and gyroscope
DE102014215038A1 (de) * 2014-07-31 2016-02-04 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors
CN105371834B (zh) * 2014-08-21 2018-08-31 上海矽睿科技有限公司 检测质量块及采用该检测质量块的陀螺仪
FI20146153A (fi) 2014-12-29 2016-06-30 Murata Manufacturing Co Mikromekaaninen gyroskooppirakenne
FI127042B (en) * 2015-09-09 2017-10-13 Murata Manufacturing Co Electrode of a microelectromechanical device
DE102016213877A1 (de) * 2015-11-20 2017-05-24 Robert Bosch Gmbh Mikromechanischer Drehratensensor und Betriebsverfahren desselben
DE102016208503A1 (de) * 2016-05-18 2017-11-23 Robert Bosch Gmbh Mikromechanisches Bauelement
TWI632345B (zh) * 2016-05-27 2018-08-11 日商村田製作所股份有限公司 振動的微機電陀螺儀之驅動振輻的持續性監控與相關方法
JP6627912B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6610706B2 (ja) 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6627911B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP2020085744A (ja) * 2018-11-28 2020-06-04 セイコーエプソン株式会社 加速度センサー、電子機器および移動体
CN112378575B (zh) * 2020-06-23 2022-02-08 襄阳达安汽车检测中心有限公司 一种汽车碰撞试验用假人多轴力传感器轴间串扰校准方法
GB202210053D0 (en) 2022-07-08 2022-08-24 Autorient Tech As Micromechanical devices and methods of manufacturing thereof

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
JPH05240874A (ja) * 1991-12-06 1993-09-21 Canon Inc 角速度センサ
JPH05264282A (ja) 1992-03-17 1993-10-12 Matsushita Electric Ind Co Ltd 角速度センサ
US5492596A (en) * 1994-02-04 1996-02-20 The Charles Stark Draper Laboratory, Inc. Method of making a micromechanical silicon-on-glass tuning fork gyroscope
DE4414237A1 (de) 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
DE4431232C2 (de) 1994-09-02 1999-07-08 Hahn Schickard Ges Integrierbares Feder-Masse-System
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5886259A (en) 1996-04-01 1999-03-23 Alliedsignal Inc. Axis aligned rate and acceleration sensor
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
DE19641284C1 (de) 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
SE9800194D0 (sv) 1998-01-23 1998-01-23 Gert Andersson Anordning för mätning av vinkelhastighet
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
JP3796991B2 (ja) * 1998-12-10 2006-07-12 株式会社デンソー 角速度センサ
DE19937747C2 (de) * 1999-08-10 2001-10-31 Siemens Ag Mechanischer Resonator für Rotationssensor
EP1083431A1 (en) * 1999-09-10 2001-03-14 STMicroelectronics S.r.l. Method for compensating the position offset of a capacitive inertial sensor, andcapacitive inertial sensor
EP1212585B1 (en) * 1999-09-17 2010-08-04 Kionix, Inc. Electrically decoupled micromachined gyroscope
KR100343211B1 (ko) * 1999-11-04 2002-07-10 윤종용 웨이퍼 레벨 진공 패키징이 가능한 ｍｅｍｓ의 구조물의제작방법
KR100374812B1 (ko) * 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
FR2809174B1 (fr) * 2000-05-16 2002-07-12 Commissariat Energie Atomique Structure vibrante a deux oscillateurs couples, notamment pour un gyrometre
JP2002296038A (ja) * 2001-03-30 2002-10-09 Mitsubishi Electric Corp 角速度センサ
US6513380B2 (en) * 2001-06-19 2003-02-04 Microsensors, Inc. MEMS sensor with single central anchor and motion-limiting connection geometry
US6722197B2 (en) * 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
FR2834055B1 (fr) * 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
WO2003058167A1 (de) * 2002-01-12 2003-07-17 Robert Bosch Gmbh Drehratensensor
US6848304B2 (en) * 2003-04-28 2005-02-01 Analog Devices, Inc. Six degree-of-freedom micro-machined multi-sensor
US6837107B2 (en) * 2003-04-28 2005-01-04 Analog Devices, Inc. Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing
US6767758B1 (en) * 2003-04-28 2004-07-27 Analog Devices, Inc. Micro-machined device structures having on and off-axis orientations
US7036372B2 (en) 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
US7458263B2 (en) * 2003-10-20 2008-12-02 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US6939473B2 (en) * 2003-10-20 2005-09-06 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7406867B2 (en) * 2005-06-27 2008-08-05 Milli Sensor Systems + Actuators G2-Gyroscope: MEMS gyroscope with output oscillation about the normal to the plane
US7621183B2 (en) * 2005-11-18 2009-11-24 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7549334B2 (en) * 2006-04-24 2009-06-23 Milli Sensor Systems + Actuators Small angle bias measurement mechanism for MEMS instruments

Also Published As

Publication number Publication date
JP2011145298A (ja) 2011-07-28
ES2477570T3 (es) 2014-07-17
FI20041708A0 (fi) 2004-12-31
JP5514384B2 (ja) 2014-06-04
EP1831643A4 (en) 2010-09-01
CN101120232A (zh) 2008-02-06
JP2011149944A (ja) 2011-08-04
FI116543B (fi) 2005-12-15
CN101120232B (zh) 2011-07-06
EP1831643A1 (en) 2007-09-12
CA2586707A1 (en) 2006-07-06
JP5006208B2 (ja) 2012-08-22
JP2008527318A (ja) 2008-07-24
KR100936638B1 (ko) 2010-01-14
NO339420B1 (no) 2016-12-12
KR20070094920A (ko) 2007-09-27
EP2527789A1 (en) 2012-11-28
CA2586707C (en) 2011-02-08
IL183573A (en) 2011-03-31
IL183573A0 (en) 2007-09-20
US7454971B2 (en) 2008-11-25
WO2006070059A1 (en) 2006-07-06
JP2011137826A (ja) 2011-07-14
US20060156814A1 (en) 2006-07-20
EP1831643B1 (en) 2012-08-01
EP2527789B1 (en) 2014-04-09

Similar Documents

Publication Publication Date Title
NO20073688L (no) Oscillerende mikromekanisk vinkelhastighetssensor
DE602006007001D1 (de) Enzmessung der bewegung von vibrierenden massen
EP1416250A3 (en) Z-axis vibration gyroscope
NO20073687L (no) Oscillerende mikro-mekanisk vinkelhastighetssensor
EP1914512A3 (en) Force rebalancing and parametric amplification of MEMS inertial sensors
CN107655465B (zh) 两级杠杆放大的谐振式仿生毛发流速、加速度微传感器
NO20073803L (no) Treakset akselerasjonsmaler
WO2008127849A3 (en) Multi-axis micromachined accelerometer and rate sensor
WO2003067190A8 (en) Micromachined gyroscope
ATE480755T1 (de) Umwandler auf basis des coriolis-effektes
EP2105707A3 (en) Systems and methods for determining acceleration and rotation by using an out-of-plane mems device
WO2008051677A3 (en) Dual axis rate sensor
WO2006132773A3 (en) Torsional rate sensor with momentum balance and mode decoupling
ATE545841T1 (de) Drehgeschwindigkeitsdetektionsgerät
EA201491263A1 (ru) Мультиосевой микроэлектронный инерциальный датчик
FI20065484A (fi) Menetelmä mikroelektromekaanisen komponentin valmistamiseksi ja mikroelektromekaaninen komponentti
TW200515605A (en) Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
WO2004097431B1 (en) Six degree-of-freedom micro-machined multi-sensor
WO2009013666A3 (en) Multi-axial sensor for determining displacement, velocity and acceleration of a linear or angular movement
JP2502937B2 (ja) 回転センサ
ATE496279T1 (de) Mikromechanischer coriolis-drehratensensor
Champoux et al. Moment excitation of structures using two synchronized impact hammers
NO20055875L (no) Klemanordning for coriolis massestroms maleinstrument som anvender in situ kalibrering
WO2009078284A1 (ja) 角速度センサ
BR0115699A (pt) Fluxìmetro de massa giroscópico

Legal Events

Date Code Title Description
CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

Owner name: MURATA ELECTRONICS OY, FI

CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

Owner name: MURATA MANUFACTURING CO., JP

CREP Change of representative

Representative=s name: PLOUGMANN VINGTOFT, POSTBOKS 1003 SENTRUM, 0104