ATE480755T1 - Umwandler auf basis des coriolis-effektes - Google Patents
Umwandler auf basis des coriolis-effektesInfo
- Publication number
- ATE480755T1 ATE480755T1 AT00968963T AT00968963T ATE480755T1 AT E480755 T1 ATE480755 T1 AT E480755T1 AT 00968963 T AT00968963 T AT 00968963T AT 00968963 T AT00968963 T AT 00968963T AT E480755 T1 ATE480755 T1 AT E480755T1
- Authority
- AT
- Austria
- Prior art keywords
- ftest
- sensitive
- along
- vibratory
- axis
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/78—Direct mass flowmeters
- G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
- G01F1/84—Coriolis or gyroscopic mass flowmeters
- G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
- G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
- G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/359,477 US6516651B1 (en) | 1999-07-22 | 1999-07-22 | Coriolis effect transducer |
PCT/US2000/040416 WO2001007875A1 (en) | 1999-07-22 | 2000-07-18 | Coriolis effect transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE480755T1 true ATE480755T1 (de) | 2010-09-15 |
Family
ID=23413961
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00968963T ATE480755T1 (de) | 1999-07-22 | 2000-07-18 | Umwandler auf basis des coriolis-effektes |
Country Status (6)
Country | Link |
---|---|
US (2) | US6516651B1 (de) |
EP (1) | EP1238248B1 (de) |
JP (1) | JP3590023B2 (de) |
AT (1) | ATE480755T1 (de) |
DE (1) | DE60044944D1 (de) |
WO (1) | WO2001007875A1 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9815232D0 (en) * | 1998-07-15 | 1998-09-09 | Hydramotion Ltd | Diagnostic sensor |
JP2003028644A (ja) * | 2001-07-12 | 2003-01-29 | Denso Corp | 角速度センサ装置 |
US6714070B1 (en) | 2002-02-07 | 2004-03-30 | Bei Technologies, Inc. | Differential charge amplifier with built-in testing for rotation rate sensor |
US6713829B1 (en) | 2003-03-12 | 2004-03-30 | Analog Devices, Inc. | Single unit position sensor |
US7017411B2 (en) * | 2004-03-04 | 2006-03-28 | Analog Devices, Inc. | Apparatus with selected fill gas |
US20050268716A1 (en) * | 2004-06-08 | 2005-12-08 | Honeywell International Inc. | Built in test for mems vibratory type inertial sensors |
GB0423780D0 (en) * | 2004-10-26 | 2004-12-01 | Trade & Industry Sec Dep For | Lateral calibration device |
EP1677073B1 (de) * | 2004-12-29 | 2013-06-19 | STMicroelectronics Srl | Mems-Kreisel mit elektrisch isolierten Bereiche |
JP2007232460A (ja) * | 2006-02-28 | 2007-09-13 | Aisin Seiki Co Ltd | 加速度センサの状態検出装置 |
EP1959233A1 (de) * | 2007-02-13 | 2008-08-20 | STMicroelectronics S.r.l. | Microelectromechanical Gyroskop mit Selbsttestfunktion und Steuerungverfahren eines microelectromechanical Gyroskops |
EP1962054B1 (de) * | 2007-02-13 | 2011-07-20 | STMicroelectronics Srl | Mikroelektromechanisches Gyroskop mit Detektionsvorrichtung mit offenem Regelkreis und Verfahren zur Steuerung eines mikroelektromechanischen Gyroskops |
DE102007035806B4 (de) * | 2007-07-31 | 2011-03-17 | Sensordynamics Ag | Mikromechanischer Drehratensensor |
JP4831241B2 (ja) * | 2010-05-26 | 2011-12-07 | 株式会社村田製作所 | 振動ジャイロ及びそれを用いた電子装置 |
EP2616772B1 (de) | 2010-09-18 | 2016-06-22 | Fairchild Semiconductor Corporation | Mikroverarbeitetes monolithisches 3-achsen-gyroskop mit einzelantrieb |
US8813564B2 (en) | 2010-09-18 | 2014-08-26 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope with central suspension and gimbal structure |
DE112011103124T5 (de) | 2010-09-18 | 2013-12-19 | Fairchild Semiconductor Corporation | Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen |
KR20130057485A (ko) | 2010-09-18 | 2013-05-31 | 페어차일드 세미컨덕터 코포레이션 | 미세 전자 기계 시스템에 미치는 응력을 감소시키기 위한 패키징 |
US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
CN103210278B (zh) * | 2010-09-20 | 2015-09-09 | 快捷半导体公司 | 模式匹配电路、方法和系统 |
US8978475B2 (en) | 2012-02-01 | 2015-03-17 | Fairchild Semiconductor Corporation | MEMS proof mass with split z-axis portions |
US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
US9069006B2 (en) * | 2012-04-05 | 2015-06-30 | Fairchild Semiconductor Corporation | Self test of MEMS gyroscope with ASICs integrated capacitors |
KR102058489B1 (ko) | 2012-04-05 | 2019-12-23 | 페어차일드 세미컨덕터 코포레이션 | 멤스 장치 프론트 엔드 전하 증폭기 |
EP2647955B8 (de) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung |
EP2647952B1 (de) | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Automatische Verstärkungsregelungsschleife einer MEMS-Vorrichtung für mechanischen Amplitudenantrieb |
US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
DE102013014881B4 (de) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien |
US9797921B2 (en) | 2015-09-03 | 2017-10-24 | Nxp Usa, Inc. | Compensation and calibration of multiple mass MEMS sensor |
CN105949146A (zh) * | 2016-05-06 | 2016-09-21 | 武汉工程大学 | 截短侧耳素-替唑尼特杂合药物及其制备方法 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3087325A (en) * | 1961-08-07 | 1963-04-30 | Roth Wilfred | Gyroscopic mass flowmeters |
EP0188572B1 (de) * | 1984-07-11 | 1992-01-15 | Exac Corporation | Gerät zum messen des massenflussdebits und der dichte |
US4870588A (en) * | 1985-10-21 | 1989-09-26 | Sundstrand Data Control, Inc. | Signal processor for inertial measurement using coriolis force sensing accelerometer arrangements |
US4823614A (en) * | 1986-04-28 | 1989-04-25 | Dahlin Erik B | Coriolis-type mass flowmeter |
US4823613A (en) | 1986-10-03 | 1989-04-25 | Micro Motion, Inc. | Density insensitive coriolis mass flow rate meter |
US5027662A (en) * | 1987-07-15 | 1991-07-02 | Micro Motion, Inc. | Accuracy mass flow meter with asymmetry and viscous damping compensation |
US5228327A (en) * | 1991-07-11 | 1993-07-20 | Micro Motion, Inc. | Technique for determining a mechanical zero value for a coriolis meter |
US5460053A (en) | 1992-09-18 | 1995-10-24 | Lew; Hyok S. | Electronic method for mass flow measurement |
US5426970A (en) * | 1993-08-02 | 1995-06-27 | New Sd, Inc. | Rotation rate sensor with built in test circuit |
US5602344A (en) * | 1994-09-01 | 1997-02-11 | Lew; Hyok S. | Inertia force flowmeter |
DE4447005A1 (de) * | 1994-12-29 | 1996-07-04 | Bosch Gmbh Robert | Vorrichtung zur Ermittlung einer Drehrate |
US5635640A (en) | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Micromachined device with rotationally vibrated masses |
US5756895A (en) * | 1995-09-01 | 1998-05-26 | Hughes Aircraft Company | Tunneling-based rate gyros with simple drive and sense axis coupling |
US5600065A (en) * | 1995-10-25 | 1997-02-04 | Motorola, Inc. | Angular velocity sensor |
IT1275825B1 (it) * | 1995-10-30 | 1997-10-17 | Nuovo Pignone Spa | Sistema perfezionato per la misura e la regolazione della portata massica di gas |
US5796012A (en) | 1996-09-19 | 1998-08-18 | Oval Corporation | Error correcting Coriolis flowmeter |
US6122961A (en) * | 1997-09-02 | 2000-09-26 | Analog Devices, Inc. | Micromachined gyros |
US6293157B1 (en) * | 1998-01-02 | 2001-09-25 | Graco Minnesota Inc. | Compensation of coriolis meter motion induced signal |
US6178828B1 (en) * | 1998-02-11 | 2001-01-30 | Wade M. Mattar | Free standing Coriolis driver |
US6249752B1 (en) * | 1998-07-16 | 2001-06-19 | Micro Motion, Inc. | Vibrating conduit parameter sensors, operating methods and computer program productors utilizing real normal modal decomposition |
US6272438B1 (en) * | 1998-08-05 | 2001-08-07 | Micro Motion, Inc. | Vibrating conduit parameter sensors, methods and computer program products for generating residual-flexibility-compensated mass flow estimates |
US6327914B1 (en) * | 1998-09-30 | 2001-12-11 | Micro Motion, Inc. | Correction of coriolis flowmeter measurements due to multiphase flows |
US6343517B1 (en) * | 1999-06-30 | 2002-02-05 | Micro Motion, Inc. | Apparatus for connecting a coriolis flowmeter flow tube to a flowmeter case |
US6347293B1 (en) * | 1999-07-09 | 2002-02-12 | Micro Motion, Inc. | Self-characterizing vibrating conduit parameter sensors and methods of operation therefor |
US6378354B1 (en) * | 2000-07-21 | 2002-04-30 | Micro Motion, Inc. | System for calibrating a drive signal in a coriolis flowmeter to cause the driver to vibrate a conduit in a desired mode of vibration |
-
1999
- 1999-07-22 US US09/359,477 patent/US6516651B1/en not_active Expired - Lifetime
-
2000
- 2000-07-18 EP EP00968963A patent/EP1238248B1/de not_active Expired - Lifetime
- 2000-07-18 JP JP2001512258A patent/JP3590023B2/ja not_active Expired - Lifetime
- 2000-07-18 DE DE60044944T patent/DE60044944D1/de not_active Expired - Lifetime
- 2000-07-18 WO PCT/US2000/040416 patent/WO2001007875A1/en active Application Filing
- 2000-07-18 AT AT00968963T patent/ATE480755T1/de not_active IP Right Cessation
-
2001
- 2001-12-28 US US10/032,640 patent/US6510745B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1238248A4 (de) | 2006-08-16 |
US6516651B1 (en) | 2003-02-11 |
DE60044944D1 (de) | 2010-10-21 |
EP1238248A1 (de) | 2002-09-11 |
US20020083757A1 (en) | 2002-07-04 |
WO2001007875A9 (en) | 2002-05-10 |
EP1238248B1 (de) | 2010-09-08 |
JP3590023B2 (ja) | 2004-11-17 |
WO2001007875A1 (en) | 2001-02-01 |
US6510745B2 (en) | 2003-01-28 |
JP2003505685A (ja) | 2003-02-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |