NO20062660L - Anordning og fremgangsmate for infrarod inspeksjon, samt fremgangsmate for fremstilling av halvleder-skive - Google Patents

Anordning og fremgangsmate for infrarod inspeksjon, samt fremgangsmate for fremstilling av halvleder-skive

Info

Publication number
NO20062660L
NO20062660L NO20062660A NO20062660A NO20062660L NO 20062660 L NO20062660 L NO 20062660L NO 20062660 A NO20062660 A NO 20062660A NO 20062660 A NO20062660 A NO 20062660A NO 20062660 L NO20062660 L NO 20062660L
Authority
NO
Norway
Prior art keywords
infrared
lens
inspection object
inspection
well
Prior art date
Application number
NO20062660A
Other languages
English (en)
Norwegian (no)
Inventor
Norihisa Matsumoto
Shigeru Matsuno
Original Assignee
Mitsubishi Electrical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electrical Corp filed Critical Mitsubishi Electrical Corp
Publication of NO20062660L publication Critical patent/NO20062660L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G01N21/9505—Wafer internal defects, e.g. microcracks

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
NO20062660A 2005-06-14 2006-06-09 Anordning og fremgangsmate for infrarod inspeksjon, samt fremgangsmate for fremstilling av halvleder-skive NO20062660L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005173423A JP2006351669A (ja) 2005-06-14 2005-06-14 赤外検査装置および赤外検査方法ならびに半導体ウェハの製造方法

Publications (1)

Publication Number Publication Date
NO20062660L true NO20062660L (no) 2006-12-15

Family

ID=37513736

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20062660A NO20062660L (no) 2005-06-14 2006-06-09 Anordning og fremgangsmate for infrarod inspeksjon, samt fremgangsmate for fremstilling av halvleder-skive

Country Status (4)

Country Link
US (1) US20060278831A1 (ja)
JP (1) JP2006351669A (ja)
DE (1) DE102006026710A1 (ja)
NO (1) NO20062660L (ja)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7705978B2 (en) * 2006-02-06 2010-04-27 Northrop Grumman Corporation Method and apparatus for inspection of multi-junction solar cells
US7326929B2 (en) * 2006-02-06 2008-02-05 Northrop Grumman Corporation Method and apparatus for inspection of semiconductor devices
JP4575886B2 (ja) * 2006-02-14 2010-11-04 シャープ株式会社 多結晶半導体ウエハの割れ検査装置および割れ検査方法
DE102007006525B4 (de) * 2007-02-06 2009-05-14 Basler Ag Verfahren und Vorrichtung zur Detektierung von Defekten
WO2008110159A2 (de) * 2007-03-15 2008-09-18 Gp Solar Gmbh Verfahren und vorrichtung zum bestimmen eines bruchs in kristallinem material
EP2165312A1 (en) * 2007-06-12 2010-03-24 Icos Vision Systems N.V. Method for semiconductor substrate inspection
DE102008016195B3 (de) * 2008-03-27 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Erkennung von Dichte- und/oder Dickenunterschieden
KR100953204B1 (ko) * 2008-05-19 2010-04-15 (주)쎄미시스코 기판의 품질 검사장치 및 그 검사방법
SG158782A1 (en) * 2008-07-28 2010-02-26 Chan Sok Leng Method and system for detecting micro-cracks in wafers
SG158787A1 (en) 2008-07-28 2010-02-26 Chan Sok Leng Apparatus for detecting micro-cracks in wafers and method therefor
SG173204A1 (en) * 2009-02-05 2011-08-29 D I R Technologies Detection Ir Ltd Method and system for determining the quality of pharmaceutical products
JP2011033449A (ja) * 2009-07-31 2011-02-17 Sumco Corp ウェーハの欠陥検査方法及び欠陥検査装置
JP5824984B2 (ja) 2011-09-06 2015-12-02 株式会社島津製作所 太陽電池セル検査装置
JP5907180B2 (ja) 2012-02-10 2016-04-26 株式会社島津製作所 太陽電池セルの検査装置および太陽電池セルの処理装置
JP5900628B2 (ja) * 2012-09-05 2016-04-06 株式会社島津製作所 太陽電池セルの検査装置
US9395346B2 (en) * 2013-11-18 2016-07-19 Zoetis Services Llc Non-contact egg identification system for determining egg viability, and associated method
SG10202110739PA (en) * 2014-12-05 2021-11-29 Kla Tencor Corp Apparatus, method and computer program product for defect detection in work pieces
JP6752638B2 (ja) 2016-06-27 2020-09-09 株式会社ディスコ 内部クラック検出方法、および内部クラック検出装置
US20190257876A1 (en) * 2018-02-21 2019-08-22 Asm Technology Singapore Pte Ltd System and method for detecting defects in an electronic device

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH668483A5 (de) * 1985-12-17 1988-12-30 Zellweger Uster Ag Verfahren und vorrichtung zur bestimmung der oberflaechenstruktur eines langgestreckten pruefkoerpers, insbesondere zur messung der haarigkeit eines garnes.
JPH0652240B2 (ja) * 1989-02-16 1994-07-06 日本製紙株式会社 地合測定方法および地合測定装置
JP3229411B2 (ja) * 1993-01-11 2001-11-19 株式会社日立製作所 薄膜トランジスタ基板の欠陥検出方法およびその修正方法
US5334844A (en) * 1993-04-05 1994-08-02 Space Systems/Loral, Inc. Optical illumination and inspection system for wafer and solar cell defects
JPH08220008A (ja) * 1995-02-15 1996-08-30 Mitsubishi Electric Corp 赤外検査装置
JP3261362B2 (ja) * 1998-05-28 2002-02-25 株式会社アドバンテスト 表面状態測定方法及び装置
US6111638A (en) * 1998-08-21 2000-08-29 Trw Inc. Method and apparatus for inspection of a solar cell by use of a rotating illumination source
US6236044B1 (en) * 1998-08-21 2001-05-22 Trw Inc. Method and apparatus for inspection of a substrate by use of a ring illuminator
JP2000292307A (ja) * 1999-04-07 2000-10-20 Menicon Co Ltd 光透過体の外観検査装置
US6384415B1 (en) * 2000-06-20 2002-05-07 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Method of evaluating quality of silicon wafer and method of reclaiming the water
JP3406578B2 (ja) * 2000-07-21 2003-05-12 東洋ガラス株式会社 ガラス容器の欠点検出方法並びに装置
JP2004529359A (ja) * 2001-05-21 2004-09-24 プレスコ テクノロジー インコーポレーテッド 自動化されたプロセス制御物品検査アプリケーションの中でスナップショット動作熱赤外線イメージングを提供するための装置および方法
SE0200782D0 (sv) * 2002-03-14 2002-03-14 Astrazeneca Ab Method of analysing a pharmaceutical sample
US7179553B2 (en) * 2002-09-06 2007-02-20 General Motors Corporation Method for detecting electrical defects in membrane electrode assemblies
JP2004340652A (ja) * 2003-05-14 2004-12-02 Hitachi Ltd 欠陥検査装置および陽電子線応用装置

Also Published As

Publication number Publication date
DE102006026710A1 (de) 2006-12-28
US20060278831A1 (en) 2006-12-14
JP2006351669A (ja) 2006-12-28

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