NO20054191L - Aksellerasjonssensor og fremgangsmate for registrering av skrastilling - Google Patents

Aksellerasjonssensor og fremgangsmate for registrering av skrastilling

Info

Publication number
NO20054191L
NO20054191L NO20054191A NO20054191A NO20054191L NO 20054191 L NO20054191 L NO 20054191L NO 20054191 A NO20054191 A NO 20054191A NO 20054191 A NO20054191 A NO 20054191A NO 20054191 L NO20054191 L NO 20054191L
Authority
NO
Norway
Prior art keywords
acceleration sensor
detection
sensor chip
plane
oblique
Prior art date
Application number
NO20054191A
Other languages
English (en)
Other versions
NO20054191D0 (no
Inventor
Muneo Harada
Naoki Ikeuchi
Hiroyuki Hashimoto
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of NO20054191D0 publication Critical patent/NO20054191D0/no
Publication of NO20054191L publication Critical patent/NO20054191L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02—Details
    • G01C9/06—Electric or photoelectric indication or reading means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02—Details
    • G01C9/08—Means for compensating acceleration forces due to movement of instrument
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Abstract

I en akselerasjonsføler for påvisning av skrå forflytninger av en bestemt artikkel fra en. utgangsposisjon, omfatter akselerasjonføleren (10) en følerbrikke med et påvisningsplan herunder en påvisningsakse eller to kryssende påvisningsakser som påviser den skrå forflytning. En akse vinkelrett på påvisningsplanet av følerbrikken er anbrakt parallelt med et standardplan av artikkelen i utgangsposisjonen. Deretter frembringer følerbrikken et utgangssignal i samsvar med en skrå forflytning av standardplanet.
NO20054191A 2003-02-10 2005-09-09 Aksellerasjonssensor og fremgangsmate for registrering av skrastilling NO20054191L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003033016A JP2004264053A (ja) 2003-02-10 2003-02-10 加速度センサ及び傾斜検出方法
PCT/JP2004/001444 WO2004081584A1 (ja) 2003-02-10 2004-02-10 加速度センサ及び傾斜検出方法

Publications (2)

Publication Number Publication Date
NO20054191D0 NO20054191D0 (no) 2005-09-09
NO20054191L true NO20054191L (no) 2005-10-11

Family

ID=32984306

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20054191A NO20054191L (no) 2003-02-10 2005-09-09 Aksellerasjonssensor og fremgangsmate for registrering av skrastilling

Country Status (8)

Country Link
US (1) US7428841B2 (no)
EP (1) EP1598673A4 (no)
JP (1) JP2004264053A (no)
KR (1) KR100771458B1 (no)
CN (1) CN1748146A (no)
NO (1) NO20054191L (no)
TW (1) TWI268624B (no)
WO (1) WO2004081584A1 (no)

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JP5043358B2 (ja) * 2006-04-04 2012-10-10 ラピスセミコンダクタ株式会社 傾斜角演算方法及び傾斜角演算装置
JP2008064761A (ja) 2006-09-06 2008-03-21 Samsung Electro Mech Co Ltd ハイブリッド型センサモジュール及びそれを用いたセンシング方法
JP4607848B2 (ja) * 2006-10-27 2011-01-05 東京エレクトロン株式会社 基板処理装置、基板受け渡し位置の調整方法及び記憶媒体
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CN101620237B (zh) * 2009-08-10 2014-09-10 上海闻泰电子科技有限公司 一种加速度传感器倾斜动作的判断方法
CN102168971B (zh) * 2010-12-24 2012-12-05 郑州辰维科技股份有限公司 交会对接运动模拟器二维倾斜测量系统
TW201314089A (zh) 2011-09-26 2013-04-01 Rui-Qian Chen 用於水龍頭之監測裝置、具有監測裝置之水龍頭及其監測方法
CN103675345B (zh) 2012-09-21 2017-12-01 中国科学院地质与地球物理研究所 一种加速度计及其制造工艺
CN103675346B (zh) 2012-09-21 2018-03-06 中国科学院地质与地球物理研究所 一种加速度计及其制造工艺
CN104166016B (zh) 2013-05-16 2016-06-01 中国科学院地质与地球物理研究所 一种高灵敏度三轴mems加速度计及其制造工艺
JP6212387B2 (ja) * 2013-12-27 2017-10-11 株式会社ケーヒン 鞍乗り型車両の傾斜角検出装置
CN104006788A (zh) * 2014-05-23 2014-08-27 深圳市元征科技股份有限公司 汽车dlc插座方向检测的方法
WO2015200846A2 (en) 2014-06-26 2015-12-30 Lumedyne Technologies Incorporated Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
US9612251B2 (en) * 2014-09-30 2017-04-04 Meng Liang Chen G-force measurement system with a horizontally deviated accelerometer
TWI650558B (zh) 2015-05-20 2019-02-11 美商路梅戴尼科技公司 用於決定慣性參數之方法及系統
JP2016217980A (ja) * 2015-05-25 2016-12-22 清水建設株式会社 傾斜計
CN106142051B (zh) * 2016-07-26 2018-06-26 南京林业大学 台体型并联机构及其位置正解的求解方法
US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
JP7023171B2 (ja) * 2018-05-01 2022-02-21 アルプスアルパイン株式会社 角度検知センサ及び角度検知センサに用いられる成形体の製造方法
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Also Published As

Publication number Publication date
WO2004081584A1 (ja) 2004-09-23
EP1598673A1 (en) 2005-11-23
KR100771458B1 (ko) 2007-10-31
JP2004264053A (ja) 2004-09-24
TWI268624B (en) 2006-12-11
US7428841B2 (en) 2008-09-30
TW200425526A (en) 2004-11-16
EP1598673A4 (en) 2007-07-11
NO20054191D0 (no) 2005-09-09
CN1748146A (zh) 2006-03-15
KR20050098310A (ko) 2005-10-11
US20060162450A1 (en) 2006-07-27

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