NO20031821L - Fremgangsmate ved rensing av silisiumkarbid-partikler - Google Patents

Fremgangsmate ved rensing av silisiumkarbid-partikler

Info

Publication number
NO20031821L
NO20031821L NO20031821A NO20031821A NO20031821L NO 20031821 L NO20031821 L NO 20031821L NO 20031821 A NO20031821 A NO 20031821A NO 20031821 A NO20031821 A NO 20031821A NO 20031821 L NO20031821 L NO 20031821L
Authority
NO
Norway
Prior art keywords
particles
silicon carbide
cleaning
agglomerates
discharged
Prior art date
Application number
NO20031821A
Other languages
English (en)
Other versions
NO325179B1 (no
NO20031821D0 (no
Inventor
Ola Schiefloe Raaness
Juraj Chmelar
Original Assignee
Sintef
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sintef filed Critical Sintef
Priority to NO20031821A priority Critical patent/NO325179B1/no
Publication of NO20031821D0 publication Critical patent/NO20031821D0/no
Priority to CN200480010659XA priority patent/CN1791497B/zh
Priority to PCT/NO2004/000094 priority patent/WO2004098848A1/en
Priority to AT04725218T priority patent/ATE549099T1/de
Priority to EP04725218A priority patent/EP1620238B1/en
Publication of NO20031821L publication Critical patent/NO20031821L/no
Publication of NO325179B1 publication Critical patent/NO325179B1/no

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07B—SEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B9/00—Combinations of apparatus for screening or sifting or for separating solids from solids using gas currents; General arrangement of plant, e.g. flow sheets
    • B07B9/02—Combinations of similar or different apparatus for separating solids from solids using gas currents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/12—Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007—Use, recovery or regeneration of abrasive mediums
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Silicon Compounds (AREA)

Abstract

Fremgangsmåte ved rensing av partikler av silisiumkarbid for finkornede partikler som henger fast på silisiumkarbid-partiklene, typisk i form av agglomerater av metallpartikler etter produksjon (saging) av silisiumskiver, etter fjerning av eventuelt løsningsmiddel fra partiklene. Partiklene (1) av forurenset silisiumkarbid utsettes først for en mekanisk bearbeiding i et første trinn (2) av rensing i et i og for seg kjent klassererutstyr, hvor det skilles ut en første grovfraksjon (3) av partikler større enn de opprinnelige partiklene av silisiumkarbid, hvilken første grovfraksjon (3) behandles i en prosess (4) hvor agglomeratene brytes ned uten at det skjer noen knusing av de enkelte korn i agglomeratene og resirkuleres (5) til nevnte første rensetrinn (2), samt en første finfraksjon (6) som går vi dere til et andre rensetrinn (7), idet nevnte andre rensetrinn (7) utføres i et i og for seg kjent klassererutstyr, hvorfra partiklene av silisiumkarbid kommer ut som en andre grovfraksjon (8), mens forurensningene som skilles fra i det andre rensetrinn kommer ut som en andre finfraksjon (9).
NO20031821A 2003-04-23 2003-04-23 Fremgangsmate ved rensing av silisiumkarbid-partikler NO325179B1 (no)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NO20031821A NO325179B1 (no) 2003-04-23 2003-04-23 Fremgangsmate ved rensing av silisiumkarbid-partikler
CN200480010659XA CN1791497B (zh) 2003-04-23 2004-04-01 用于清洗碳化硅颗粒的方法
PCT/NO2004/000094 WO2004098848A1 (en) 2003-04-23 2004-04-01 Method for cleaning sic particles
AT04725218T ATE549099T1 (de) 2003-04-23 2004-04-01 Verfahren zur reinigung von sic-partikeln
EP04725218A EP1620238B1 (en) 2003-04-23 2004-04-01 Method for cleaning sic particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20031821A NO325179B1 (no) 2003-04-23 2003-04-23 Fremgangsmate ved rensing av silisiumkarbid-partikler

Publications (3)

Publication Number Publication Date
NO20031821D0 NO20031821D0 (no) 2003-04-23
NO20031821L true NO20031821L (no) 2004-10-25
NO325179B1 NO325179B1 (no) 2008-02-11

Family

ID=19914698

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20031821A NO325179B1 (no) 2003-04-23 2003-04-23 Fremgangsmate ved rensing av silisiumkarbid-partikler

Country Status (5)

Country Link
EP (1) EP1620238B1 (no)
CN (1) CN1791497B (no)
AT (1) ATE549099T1 (no)
NO (1) NO325179B1 (no)
WO (1) WO2004098848A1 (no)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2477782B (en) 2010-02-12 2012-08-29 Metallkraft As A method for refining silicon
CN101979160B (zh) * 2010-05-21 2014-05-14 北京天科合达蓝光半导体有限公司 一种清洗碳化硅晶片表面污染物的方法
CN101941699B (zh) * 2010-09-14 2012-08-22 东北大学 由单晶硅和多晶硅切割废料中回收硅和碳化硅的方法
CN101983919B (zh) * 2010-11-15 2012-06-27 桂劲宁 一种利用多晶硅切割废料碱洗废水生产白碳黑的方法
CN102825027B (zh) * 2012-08-27 2014-04-16 西北工业大学 一种用于溶胶凝胶法提拉制膜的衬底清洗方法
CN105764620A (zh) * 2013-10-24 2016-07-13 麦拓卡夫特有限公司 清洁污染碳化硅粒子的方法与系统
DE102017118017A1 (de) * 2017-08-08 2019-02-14 PDR Recycling GmbH + Co. KG Recyclingverfahren für Schleifkörner
WO2020119887A1 (de) * 2018-12-10 2020-06-18 Wacker Chemie Ag Verfahren zur herstellung sphärischer siliconharzpartikel
CN110983446A (zh) * 2019-12-25 2020-04-10 北京北方华创微电子装备有限公司 碳化硅原料加工方法
DE102020102512A1 (de) 2020-01-31 2021-08-05 ESK - SIC GmbH Verfahren zum Abtrennen von Verunreinigungen von Siliciumcarbid und gereinigtes Siliciumcarbid-Pulver

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57144665A (en) * 1981-03-04 1982-09-07 Toshiba Mach Co Ltd Regeneration unit for grinding sludge
US4766875A (en) * 1982-11-22 1988-08-30 Stanford University Endless wire saw having material recovery capability
NO300257B1 (no) * 1995-04-07 1997-05-05 Sinvent As Apparat for sortering av partikkelformig materiale
DE19526040A1 (de) * 1995-07-17 1997-01-23 Krupp Polysius Ag Verfahren und Anlage zur Zerkleinerung von Mahlgut
IT1299540B1 (it) * 1998-07-01 2000-03-16 Memc Electronic Materials Procedimento per separare e rigenerare abrasivo esausto a base di glicole e carburo di silicio ai fini della loro riutilizzazione
US6231628B1 (en) * 1998-01-07 2001-05-15 Memc Electronic Materials, Inc. Method for the separation, regeneration and reuse of an exhausted glycol-based slurry
EP1561557B1 (en) * 2001-05-29 2011-03-30 MEMC ELECTRONIC MATERIALS S.p.A. Method for treating an exhausted glycol-based slurry
CN1152422C (zh) * 2002-04-25 2004-06-02 张彩根 制造晶片用的碳化硅舟的切割制造方法

Also Published As

Publication number Publication date
NO325179B1 (no) 2008-02-11
WO2004098848A1 (en) 2004-11-18
EP1620238A1 (en) 2006-02-01
EP1620238B1 (en) 2012-03-14
ATE549099T1 (de) 2012-03-15
CN1791497A (zh) 2006-06-21
NO20031821D0 (no) 2003-04-23
CN1791497B (zh) 2010-10-13

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Legal Events

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CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

Owner name: METALLKRAFT 1 AS

Free format text: NEW ADDRESS: SETEDALSVEIEN 110, 4617 KRISTIANSAND S, NORGE

CREP Change of representative

Representative=s name: ADVOKATFIRMAET SELMER DA, POSTBOKS

CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

Owner name: METALLKRAFT AS, NO

CREP Change of representative

Representative=s name: ONSAGERS AS, POSTBOKS 1813 VIKA, 0123

MM1K Lapsed by not paying the annual fees