NL9401051A - Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop. - Google Patents

Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop. Download PDF

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Publication number
NL9401051A
NL9401051A NL9401051A NL9401051A NL9401051A NL 9401051 A NL9401051 A NL 9401051A NL 9401051 A NL9401051 A NL 9401051A NL 9401051 A NL9401051 A NL 9401051A NL 9401051 A NL9401051 A NL 9401051A
Authority
NL
Netherlands
Prior art keywords
microphone
heating element
microphones
acoustic
temperature
Prior art date
Application number
NL9401051A
Other languages
English (en)
Dutch (nl)
Inventor
Hans-Elias De Bree
Theodorus Simon Jose Lammerink
Michael Curt Elwenspoek
Johannes Hermanus Jos Fluitman
Original Assignee
Stichting Tech Wetenschapp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stichting Tech Wetenschapp filed Critical Stichting Tech Wetenschapp
Priority to NL9401051A priority Critical patent/NL9401051A/nl
Priority to US08/765,597 priority patent/US5959217A/en
Priority to AU26838/95A priority patent/AU2683895A/en
Priority to DK95922000T priority patent/DK0766904T3/da
Priority to CN95193785A priority patent/CN1151241A/zh
Priority to EP95922000A priority patent/EP0766904B1/de
Priority to CA002193956A priority patent/CA2193956A1/en
Priority to DE69505383T priority patent/DE69505383T2/de
Priority to JP8503031A priority patent/JPH10502230A/ja
Priority to AT95922000T priority patent/ATE172348T1/de
Priority to PCT/NL1995/000220 priority patent/WO1996000488A1/en
Publication of NL9401051A publication Critical patent/NL9401051A/nl

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/002—Transducers other than those covered by groups H04R9/00 - H04R21/00 using electrothermic-effect transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6882—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element making use of temperature dependence of acoustic properties, e.g. propagation speed of surface acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
    • G01F1/708—Measuring the time taken to traverse a fixed distance
    • G01F1/7082—Measuring the time taken to traverse a fixed distance using acoustic detecting arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
    • G01F1/708—Measuring the time taken to traverse a fixed distance
    • G01F1/7084—Measuring the time taken to traverse a fixed distance using thermal detecting arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Signal Processing (AREA)
  • Measuring Volume Flow (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Details Of Flowmeters (AREA)
NL9401051A 1994-06-24 1994-06-24 Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop. NL9401051A (nl)

Priority Applications (11)

Application Number Priority Date Filing Date Title
NL9401051A NL9401051A (nl) 1994-06-24 1994-06-24 Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop.
US08/765,597 US5959217A (en) 1994-06-24 1995-06-22 Fluid flow measuring device as a microphone and system comprising such a microphone
AU26838/95A AU2683895A (en) 1994-06-24 1995-06-22 Use of a fluid flow measuring device as a microphone and system comprising such a microphone
DK95922000T DK0766904T3 (da) 1994-06-24 1995-06-22 Anvendelse af en fluidummåleanordning som mikrofon og system omfattende en sådan mikrofon
CN95193785A CN1151241A (zh) 1994-06-24 1995-06-22 流体流测量装置作为传声器的使用及含这种传声器的系统
EP95922000A EP0766904B1 (de) 1994-06-24 1995-06-22 Verwendung eines strömungsmessgerätes als mikrofon und system mit einem solchen mikrofon
CA002193956A CA2193956A1 (en) 1994-06-24 1995-06-22 Use of a fluid flow measuring device as a microphone and system comprising such a microphone
DE69505383T DE69505383T2 (de) 1994-06-24 1995-06-22 Verwendung eines strömungsmessgerätes als mikrofon und system mit einem solchen mikrofon
JP8503031A JPH10502230A (ja) 1994-06-24 1995-06-22 マイクロホンとしての流体流測定装置の使用およびそのようなマイクロホンを含んでなるシステム
AT95922000T ATE172348T1 (de) 1994-06-24 1995-06-22 Verwendung eines strömungsmessgerätes als mikrofon und system mit einem solchen mikrofon
PCT/NL1995/000220 WO1996000488A1 (en) 1994-06-24 1995-06-22 Use of a fluid flow measuring device as a microphone and system comprising such a microphone

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9401051A NL9401051A (nl) 1994-06-24 1994-06-24 Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop.
NL9401051 1994-06-24

Publications (1)

Publication Number Publication Date
NL9401051A true NL9401051A (nl) 1996-02-01

Family

ID=19864359

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9401051A NL9401051A (nl) 1994-06-24 1994-06-24 Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop.

Country Status (11)

Country Link
US (1) US5959217A (de)
EP (1) EP0766904B1 (de)
JP (1) JPH10502230A (de)
CN (1) CN1151241A (de)
AT (1) ATE172348T1 (de)
AU (1) AU2683895A (de)
CA (1) CA2193956A1 (de)
DE (1) DE69505383T2 (de)
DK (1) DK0766904T3 (de)
NL (1) NL9401051A (de)
WO (1) WO1996000488A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5940780A (en) * 1995-09-29 1999-08-17 Advanced Thermal Solutions, Inc. Universal transceiver
NL1008006C1 (nl) * 1998-01-09 1999-07-12 Microflown Technologies B V Deeltjessnelheidssensor.
US7029694B2 (en) * 2000-04-26 2006-04-18 Watson Laboratories, Inc. Compositions and methods for transdermal oxybutynin therapy
JP2003532881A (ja) * 2000-05-08 2003-11-05 マイクロブリッジ テクノロジーズ インコーポレイテッド 絶対圧の時間的変動の測定を利用するガス流量センサ、スピーカシステム、およびマイクロホン
US20040101153A1 (en) * 2001-05-08 2004-05-27 Oleg Grudin Gas flow sensor, speaker system and microphone, utilizing measurement absolute of time-variations in absolute pressure
CA2503275A1 (en) * 2005-04-07 2006-10-07 Advanced Flow Technologies Inc. System, method and apparatus for acoustic fluid flow measurement
JP5622725B2 (ja) * 2008-06-25 2014-11-12 エンド ファーマスーティカルズ ソリューションズ インコーポレイテッド．Ｅｎｄｏ Ｐｈａｒｍａｃｅｕｔｉｃａｌｓ Ｓｏｌｕｔｉｏｎｓｉｎｃ． エキセナチド及び他のポリペプチド類の持続的送達
JP2010131264A (ja) * 2008-12-05 2010-06-17 Nippon Koden Corp 呼吸気情報測定センサ
US8638956B2 (en) * 2009-08-06 2014-01-28 Ken K. Deng Acoustic velocity microphone using a buoyant object
NL2007334C2 (en) 2011-09-02 2013-03-05 Munisense B V Device and method for measuring sound levels and direction or localisation of sound sources.
US10578440B1 (en) 2017-08-04 2020-03-03 The United States Of America, As Represented By The Secretary Of The Navy Atmospheric infrasonic sensing from an aircraft
RU2697518C1 (ru) * 2018-12-03 2019-08-15 Федеральное государственное унитарное предприятие "Ростовский-на-Дону научно-исследовательский институт радиосвязи" (ФГУП "РНИИРС") Измерительный преобразователь акустической скорости частиц

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3611614A1 (de) * 1986-04-07 1987-10-08 Vdo Schindling Anordnung mit einem thermischen sensor
EP0268004A1 (de) * 1986-11-04 1988-05-25 VDO Adolf Schindling AG Vorrichtung zur Bestimmung der Durchflussrichtung
EP0285451A1 (de) * 1987-03-31 1988-10-05 Sharp Kabushiki Kaisha Strömungssensor
JPH01236800A (ja) * 1988-03-16 1989-09-21 Nippon Denso Co Ltd 能動的消音装置
US4932250A (en) * 1987-12-03 1990-06-12 Aberdeen University Multi point sensor
GB2226139A (en) * 1988-12-16 1990-06-20 Leybold Ag Microflow sensor for gases

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US4966037A (en) * 1983-09-12 1990-10-30 Honeywell Inc. Cantilever semiconductor device
US4914742A (en) * 1987-12-07 1990-04-03 Honeywell Inc. Thin film orthogonal microsensor for air flow and method
JPH0264417A (ja) * 1988-08-31 1990-03-05 Ricoh Co Ltd 流速センサ
US5243858A (en) * 1991-08-12 1993-09-14 General Motors Corporation Fluid flow sensor with thermistor detector
JP2666163B2 (ja) * 1991-12-04 1997-10-22 山武ハネウエル株式会社 流速センサの温度特性補正方法
US5263380A (en) * 1992-02-18 1993-11-23 General Motors Corporation Differential AC anemometer
US5406841A (en) * 1992-03-17 1995-04-18 Ricoh Seiki Company, Ltd. Flow sensor
US5392647A (en) * 1993-06-07 1995-02-28 Ricoh Seiki Company, Ltd. Flow sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3611614A1 (de) * 1986-04-07 1987-10-08 Vdo Schindling Anordnung mit einem thermischen sensor
EP0268004A1 (de) * 1986-11-04 1988-05-25 VDO Adolf Schindling AG Vorrichtung zur Bestimmung der Durchflussrichtung
EP0285451A1 (de) * 1987-03-31 1988-10-05 Sharp Kabushiki Kaisha Strömungssensor
US4932250A (en) * 1987-12-03 1990-06-12 Aberdeen University Multi point sensor
JPH01236800A (ja) * 1988-03-16 1989-09-21 Nippon Denso Co Ltd 能動的消音装置
GB2226139A (en) * 1988-12-16 1990-06-20 Leybold Ag Microflow sensor for gases

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
FEHR: "Infrasonic Thermistor Microphone", JOURNAL OF THE AUDIO ENGINEERING SOCIETY., vol. 18, no. 2, April 1970 (1970-04-01), NEW YORK US *
LAMMERINK ET AL.: "Micro-liquid flow sensor", SENSORS AND ACTUATORS A, vol. 37-38, 1993, LAUSANNE CH, pages 45 - 50 *
PATENT ABSTRACTS OF JAPAN vol. 13, no. 568 (E - 861) 15 December 1989 (1989-12-15) *

Also Published As

Publication number Publication date
EP0766904A1 (de) 1997-04-09
JPH10502230A (ja) 1998-02-24
WO1996000488A1 (en) 1996-01-04
ATE172348T1 (de) 1998-10-15
AU2683895A (en) 1996-01-19
DE69505383D1 (de) 1998-11-19
DK0766904T3 (da) 1999-06-23
US5959217A (en) 1999-09-28
EP0766904B1 (de) 1998-10-14
CA2193956A1 (en) 1996-01-04
DE69505383T2 (de) 1999-03-11
CN1151241A (zh) 1997-06-04

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BV The patent application has lapsed