DE69505383T2 - Verwendung eines strömungsmessgerätes als mikrofon und system mit einem solchen mikrofon - Google Patents

Verwendung eines strömungsmessgerätes als mikrofon und system mit einem solchen mikrofon

Info

Publication number
DE69505383T2
DE69505383T2 DE69505383T DE69505383T DE69505383T2 DE 69505383 T2 DE69505383 T2 DE 69505383T2 DE 69505383 T DE69505383 T DE 69505383T DE 69505383 T DE69505383 T DE 69505383T DE 69505383 T2 DE69505383 T2 DE 69505383T2
Authority
DE
Germany
Prior art keywords
microphone
pct
flow meter
sec
heating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69505383T
Other languages
English (en)
Other versions
DE69505383D1 (de
Inventor
Bree Hans-Elias De
Theodorus Lammerink
Michael Elwenspoek
Johannes Fluitman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BREE HANS ELIAS DE
Original Assignee
BREE HANS ELIAS DE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BREE HANS ELIAS DE filed Critical BREE HANS ELIAS DE
Application granted granted Critical
Publication of DE69505383D1 publication Critical patent/DE69505383D1/de
Publication of DE69505383T2 publication Critical patent/DE69505383T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/002—Transducers other than those covered by groups H04R9/00 - H04R21/00 using electrothermic-effect transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6882—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element making use of temperature dependence of acoustic properties, e.g. propagation speed of surface acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
    • G01F1/708—Measuring the time taken to traverse a fixed distance
    • G01F1/7082—Measuring the time taken to traverse a fixed distance using acoustic detecting arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
    • G01F1/708—Measuring the time taken to traverse a fixed distance
    • G01F1/7084—Measuring the time taken to traverse a fixed distance using thermal detecting arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Micromachines (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Details Of Flowmeters (AREA)
DE69505383T 1994-06-24 1995-06-22 Verwendung eines strömungsmessgerätes als mikrofon und system mit einem solchen mikrofon Expired - Lifetime DE69505383T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9401051A NL9401051A (nl) 1994-06-24 1994-06-24 Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop.
PCT/NL1995/000220 WO1996000488A1 (en) 1994-06-24 1995-06-22 Use of a fluid flow measuring device as a microphone and system comprising such a microphone

Publications (2)

Publication Number Publication Date
DE69505383D1 DE69505383D1 (de) 1998-11-19
DE69505383T2 true DE69505383T2 (de) 1999-03-11

Family

ID=19864359

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69505383T Expired - Lifetime DE69505383T2 (de) 1994-06-24 1995-06-22 Verwendung eines strömungsmessgerätes als mikrofon und system mit einem solchen mikrofon

Country Status (11)

Country Link
US (1) US5959217A (de)
EP (1) EP0766904B1 (de)
JP (1) JPH10502230A (de)
CN (1) CN1151241A (de)
AT (1) ATE172348T1 (de)
AU (1) AU2683895A (de)
CA (1) CA2193956A1 (de)
DE (1) DE69505383T2 (de)
DK (1) DK0766904T3 (de)
NL (1) NL9401051A (de)
WO (1) WO1996000488A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5940780A (en) * 1995-09-29 1999-08-17 Advanced Thermal Solutions, Inc. Universal transceiver
NL1008006C1 (nl) * 1998-01-09 1999-07-12 Microflown Technologies B V Deeltjessnelheidssensor.
US7029694B2 (en) * 2000-04-26 2006-04-18 Watson Laboratories, Inc. Compositions and methods for transdermal oxybutynin therapy
CA2421291A1 (en) * 2000-05-08 2001-11-15 Microbridge Technologies Inc. Gas flow sensor, speaker system and microphone
US20040101153A1 (en) * 2001-05-08 2004-05-27 Oleg Grudin Gas flow sensor, speaker system and microphone, utilizing measurement absolute of time-variations in absolute pressure
CA2503275A1 (en) * 2005-04-07 2006-10-07 Advanced Flow Technologies Inc. System, method and apparatus for acoustic fluid flow measurement
JP5622725B2 (ja) * 2008-06-25 2014-11-12 エンド ファーマスーティカルズ ソリューションズ インコーポレイテッド．Ｅｎｄｏ Ｐｈａｒｍａｃｅｕｔｉｃａｌｓ Ｓｏｌｕｔｉｏｎｓｉｎｃ． エキセナチド及び他のポリペプチド類の持続的送達
JP2010131264A (ja) * 2008-12-05 2010-06-17 Nippon Koden Corp 呼吸気情報測定センサ
US8638956B2 (en) * 2009-08-06 2014-01-28 Ken K. Deng Acoustic velocity microphone using a buoyant object
NL2007334C2 (en) 2011-09-02 2013-03-05 Munisense B V Device and method for measuring sound levels and direction or localisation of sound sources.
US10578440B1 (en) 2017-08-04 2020-03-03 The United States Of America, As Represented By The Secretary Of The Navy Atmospheric infrasonic sensing from an aircraft
RU2697518C1 (ru) * 2018-12-03 2019-08-15 Федеральное государственное унитарное предприятие "Ростовский-на-Дону научно-исследовательский институт радиосвязи" (ФГУП "РНИИРС") Измерительный преобразователь акустической скорости частиц

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4966037A (en) * 1983-09-12 1990-10-30 Honeywell Inc. Cantilever semiconductor device
DE3611614A1 (de) * 1986-04-07 1987-10-08 Vdo Schindling Anordnung mit einem thermischen sensor
DE3637538A1 (de) * 1986-11-04 1988-05-05 Vdo Schindling Vorrichtung zur bestimmung der durchflussrichtung
JPH0810231B2 (ja) * 1987-03-31 1996-01-31 シャープ株式会社 フローセンサ
US4932250A (en) * 1987-12-03 1990-06-12 Aberdeen University Multi point sensor
US4914742A (en) * 1987-12-07 1990-04-03 Honeywell Inc. Thin film orthogonal microsensor for air flow and method
JPH01236800A (ja) * 1988-03-16 1989-09-21 Nippon Denso Co Ltd 能動的消音装置
JPH0264417A (ja) * 1988-08-31 1990-03-05 Ricoh Co Ltd 流速センサ
DE3842399C2 (de) * 1988-12-16 1997-07-31 Fisher Rosemount Gmbh & Co Ges Mikroströmungsfühler für Gase
US5243858A (en) * 1991-08-12 1993-09-14 General Motors Corporation Fluid flow sensor with thermistor detector
JP2666163B2 (ja) * 1991-12-04 1997-10-22 山武ハネウエル株式会社 流速センサの温度特性補正方法
US5263380A (en) * 1992-02-18 1993-11-23 General Motors Corporation Differential AC anemometer
US5406841A (en) * 1992-03-17 1995-04-18 Ricoh Seiki Company, Ltd. Flow sensor
US5392647A (en) * 1993-06-07 1995-02-28 Ricoh Seiki Company, Ltd. Flow sensor

Also Published As

Publication number Publication date
EP0766904B1 (de) 1998-10-14
JPH10502230A (ja) 1998-02-24
ATE172348T1 (de) 1998-10-15
DE69505383D1 (de) 1998-11-19
CA2193956A1 (en) 1996-01-04
US5959217A (en) 1999-09-28
CN1151241A (zh) 1997-06-04
WO1996000488A1 (en) 1996-01-04
DK0766904T3 (da) 1999-06-23
EP0766904A1 (de) 1997-04-09
AU2683895A (en) 1996-01-19
NL9401051A (nl) 1996-02-01

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