NL9100725A - Werkwijze ter vervaardiging van supergeleidende geintegreerde schakelingen. - Google Patents
Werkwijze ter vervaardiging van supergeleidende geintegreerde schakelingen. Download PDFInfo
- Publication number
- NL9100725A NL9100725A NL9100725A NL9100725A NL9100725A NL 9100725 A NL9100725 A NL 9100725A NL 9100725 A NL9100725 A NL 9100725A NL 9100725 A NL9100725 A NL 9100725A NL 9100725 A NL9100725 A NL 9100725A
- Authority
- NL
- Netherlands
- Prior art keywords
- superconducting
- layer
- substrate
- integrated circuits
- oxygen
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims description 27
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- 239000001301 oxygen Substances 0.000 claims description 13
- 229920002120 photoresistant polymer Polymers 0.000 claims description 10
- 238000003486 chemical etching Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 23
- 239000010408 film Substances 0.000 description 10
- 239000002887 superconductor Substances 0.000 description 6
- 239000002344 surface layer Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/85—Superconducting active materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/728—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/742—Annealing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019900005997A KR930004024B1 (ko) | 1990-04-27 | 1990-04-27 | 초전도 집적회로소자의 제조방법 |
| KR900005997 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL9100725A true NL9100725A (nl) | 1991-11-18 |
Family
ID=19298462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL9100725A NL9100725A (nl) | 1990-04-27 | 1991-04-26 | Werkwijze ter vervaardiging van supergeleidende geintegreerde schakelingen. |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5219830A (ko) |
| JP (1) | JP2614942B2 (ko) |
| KR (1) | KR930004024B1 (ko) |
| DE (1) | DE4040053A1 (ko) |
| FR (1) | FR2661557B1 (ko) |
| GB (1) | GB2244882B (ko) |
| NL (1) | NL9100725A (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05251777A (ja) * | 1991-12-13 | 1993-09-28 | Sumitomo Electric Ind Ltd | 超電導電界効果型素子およびその作製方法 |
| US7068618B2 (en) | 2001-08-10 | 2006-06-27 | Interdigital Technology Corp. | Dynamic link adaption for time division duplex (TDD) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3850580T2 (de) * | 1987-01-30 | 1994-10-27 | Hitachi Ltd | Supraleiteranordnung. |
| JPH0638525B2 (ja) * | 1987-05-06 | 1994-05-18 | 株式会社半導体エネルギ−研究所 | 超電導装置の作製方法 |
| CA1328242C (en) * | 1987-05-18 | 1994-04-05 | Nobuhiko Fujita | Process for manufacturing a superconductor and a method for producing a superconducting circuit |
| US5041420A (en) * | 1987-06-26 | 1991-08-20 | Hewlett-Packard Company | Method for making superconductor films from organometallic precursors |
| DK160382C (da) * | 1987-09-22 | 1991-08-12 | Ib Johannsen | Fremgangsmaade til tilvejebringelse af et elektrisk kredsloeb indeholdende josephson dioder |
| JP2707499B2 (ja) * | 1987-11-26 | 1998-01-28 | 住友電気工業株式会社 | 酸化物超電導体の製造方法 |
| JPH01160888A (ja) * | 1987-12-15 | 1989-06-23 | Mitsubishi Electric Corp | ビームを用いた局部熱処理方法 |
| NL8703039A (nl) * | 1987-12-16 | 1989-07-17 | Philips Nv | Werkwijze voor het patroonmatig vervaardigen van een dunne laag uit een oxidisch supergeleidend materiaal. |
| US4939308A (en) * | 1988-04-29 | 1990-07-03 | Allied-Signal Inc. | Method of forming crystallite-oriented superconducting ceramics by electrodeposition and thin film superconducting ceramic made thereby |
| JPH0354875A (ja) * | 1989-07-24 | 1991-03-08 | Furukawa Electric Co Ltd:The | 超電導体回路の形成方法 |
-
1990
- 1990-04-27 KR KR1019900005997A patent/KR930004024B1/ko not_active IP Right Cessation
- 1990-11-28 FR FR9014863A patent/FR2661557B1/fr not_active Expired - Fee Related
- 1990-12-14 DE DE4040053A patent/DE4040053A1/de not_active Withdrawn
-
1991
- 1991-01-08 JP JP3000763A patent/JP2614942B2/ja not_active Expired - Lifetime
- 1991-04-16 GB GB9108001A patent/GB2244882B/en not_active Expired - Fee Related
- 1991-04-26 NL NL9100725A patent/NL9100725A/nl active Search and Examination
- 1991-07-15 US US07/731,050 patent/US5219830A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| FR2661557B1 (fr) | 1995-10-13 |
| GB9108001D0 (en) | 1991-06-05 |
| JP2614942B2 (ja) | 1997-05-28 |
| GB2244882B (en) | 1994-12-21 |
| JPH04226089A (ja) | 1992-08-14 |
| US5219830A (en) | 1993-06-15 |
| DE4040053A1 (de) | 1991-10-31 |
| FR2661557A1 (fr) | 1991-10-31 |
| KR910019170A (ko) | 1991-11-30 |
| KR930004024B1 (ko) | 1993-05-19 |
| GB2244882A (en) | 1991-12-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BA | A request for search or an international-type search has been filed | ||
| BC | A request for examination has been filed | ||
| BN | A decision not to publish the application has become irrevocable |