NL8902810A - Dampreinigings- en drooginrichting en -werkwijze. - Google Patents

Dampreinigings- en drooginrichting en -werkwijze. Download PDF

Info

Publication number
NL8902810A
NL8902810A NL8902810A NL8902810A NL8902810A NL 8902810 A NL8902810 A NL 8902810A NL 8902810 A NL8902810 A NL 8902810A NL 8902810 A NL8902810 A NL 8902810A NL 8902810 A NL8902810 A NL 8902810A
Authority
NL
Netherlands
Prior art keywords
cleaning
vapor
medium
drying
chamber
Prior art date
Application number
NL8902810A
Other languages
English (en)
Dutch (nl)
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of NL8902810A publication Critical patent/NL8902810A/nl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
NL8902810A 1988-11-15 1989-11-14 Dampreinigings- en drooginrichting en -werkwijze. NL8902810A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28674888 1988-11-15
JP63286748A JP2544971B2 (ja) 1988-11-15 1988-11-15 蒸気洗浄乾燥装置

Publications (1)

Publication Number Publication Date
NL8902810A true NL8902810A (nl) 1990-06-01

Family

ID=17708524

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8902810A NL8902810A (nl) 1988-11-15 1989-11-14 Dampreinigings- en drooginrichting en -werkwijze.

Country Status (6)

Country Link
JP (1) JP2544971B2 (ja)
KR (1) KR930007614B1 (ja)
DE (1) DE3937864C2 (ja)
FR (1) FR2638984B1 (ja)
GB (1) GB2224639B (ja)
NL (1) NL8902810A (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5142873A (en) * 1990-02-15 1992-09-01 E. I. Du Pont De Nemours And Company Vapor control system for vapor degreasing/defluxing equipment
US5470154A (en) * 1991-04-18 1995-11-28 Osaka Sanso Kogyo Ltd. Method of cleaning the reflector mirror in an optical dew point meter and an optical dew point meter equipped with a cleaning device
US5351419A (en) * 1992-07-27 1994-10-04 Motorola, Inc. Method for vapor drying
JP3151613B2 (ja) * 1997-06-17 2001-04-03 東京エレクトロン株式会社 洗浄・乾燥処理方法及びその装置
DE102011121019A1 (de) * 2011-12-13 2013-06-13 Thermo Electron Led Gmbh Reinigungsverfahren für den Nutzraum eines Brutschranks
KR101395716B1 (ko) * 2012-09-26 2014-05-16 주식회사 코디엠 유리기판 건조장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB988038A (en) * 1962-05-14 1965-03-31 Du Pont Method and apparatus for cleaning metals and other materials with boiling solvents
DE6610651U (de) * 1967-04-24 1975-04-30 Walter Becker Dampfreinigungsgeraet.
NL7010229A (ja) * 1970-07-22 1972-01-12
US4569695A (en) * 1983-04-21 1986-02-11 Nec Corporation Method of cleaning a photo-mask
DE3509122C3 (de) * 1985-03-14 1995-03-23 Gerald Dipl Ing Harms Verfahren zur Reinigung von Gegenständen mit Hilfe von Lösungsmitteln sowie Vorrichtung hierzu
US4777804A (en) * 1987-08-26 1988-10-18 Texas Instruments Incorporated Method and apparatus for easing surface particle removal by size increase

Also Published As

Publication number Publication date
DE3937864C2 (de) 1994-11-24
JP2544971B2 (ja) 1996-10-16
KR900007493A (ko) 1990-06-01
FR2638984B1 (fr) 1996-08-09
GB8925091D0 (en) 1989-12-28
DE3937864A1 (de) 1990-06-21
FR2638984A1 (fr) 1990-05-18
JPH02133925A (ja) 1990-05-23
GB2224639B (en) 1993-03-24
GB2224639A (en) 1990-05-16
KR930007614B1 (ko) 1993-08-14

Similar Documents

Publication Publication Date Title
EP1143210B1 (de) Sorptionskühler
EP2025773A1 (en) Vacuum evaporation apparatus for solid materials
KR101300266B1 (ko) 시약의 고체 소스로부터 시약을 운반하기 위한 시스템
NL8900980A (nl) Werkwijze voor het voorzien in een gedoseerde dampstroom alsmede inrichting voor het uitvoeren daarvan.
JP2004510058A (ja) 特に有機皮膜をｏｖｐｄ法によって沈積する方法および装置
EP1890730A2 (en) Apparatus and methods for treating components of packaging units, particularly bottles and/or caps
NL8902810A (nl) Dampreinigings- en drooginrichting en -werkwijze.
JPH0817804B2 (ja) 殺菌剤気化装置
NO171243B (no) Fremgangsmaate og hydrogenperoksydgassgenerator for sterilisering
EP0317556A1 (en) DISTILLING DEVICE AND METHOD.
US4254820A (en) Heat transport device
JP2016501880A (ja) 低温保存装置、およびその作動方法
KR20100044862A (ko) 고체 물질을 위한 진공 증발 장치
JP2007534844A (ja) 蒸発装置および被覆材料を蒸発する方法
JPH01240419A (ja) 低温液体小出し装置及び方法
JPS586858B2 (ja) キユウシユウレイトウソウチノ セイギヨ
CA2277449A1 (en) Vapour management system
US5727453A (en) Apparatus and method for thawing frozen food product
US6161300A (en) Alcohol vapor dryer system
JP2008519905A (ja) 気化した有機材料の付着の制御
CN1251866A (zh) 蒸镀装置
US20070092233A1 (en) Evaporation device with receptacle for receiving material to be evaporated
JP2023528418A (ja) 凍結室と凝縮器の組み合わせによる凍結乾燥
US20230173403A1 (en) Solvent vapor supply apparatus and solvent vapor supply method
RU2019577C1 (ru) Устройство для загрузки в испаритель испаряемых веществ материалов

Legal Events

Date Code Title Description
A1A A request for search or an international-type search has been filed
BB A search report has been drawn up
BV The patent application has lapsed